12-09-2019 дата публикации
Номер: US20190276477A1
Автор:
Ming FANG,
Joby ELDO,
Charles DEZELAH,
Daniel MOSER,
Ravi KANJOLIA,
FANG MING,
ELDO JOBY,
DEZELAH CHARLES,
MOSER DANIEL,
KANJOLIA RAVI,
FANG, Ming,
ELDO, Joby,
DEZELAH, Charles,
MOSER, Daniel,
KANJOLIA, Ravi
Metal complexes including cyclopentadienyl ligands and methods of using such metal complexes to prepare metal-containing films are provided. 1. A metal complex corresponding in structure to Formula I:{'br': None, 'sup': 1', '1', '1, 'sub': n', '2, '[(R)Cp]ML\u2003\u2003 (I)'}wherein{'sup': '1', 'Mis selected from the group consisting of scandium, yttrium, and lanthanum;'}{'sup': '1', 'sub': 1', '5, 'each Ris independently hydrogen, C-C-alkyl or silyl;'}n is 1, 2, 3, 4, or 5;Cp is cyclopentadienyl ring; and{'sup': 1', '2', '3', '4', '5', '6', '7', '8', '32', '33', '34', '35', '36', '2', '3', '4', '5', '6', '7', '8', '32', '33', '34', '35', '36, 'sub': 2', '3', '2', '3', '4', '3', '3', '3', '2', '1', '5, 'Lis selected from the group consisting of: NRR; N(SiRRR); 3,5-RR—CHN; 1-(R)CH; 1-R-3-R—CH; and R, R—CHO; wherein R, R, R, R, R, R, and Rare each independently hydrogen or C-C-alkyl; and R, R, R, R, and Rare each independently alkyl or silyl;'}{'sup': 1', '1', '7', '8', '1, 'sub': 3', '2', '1', '5, 'wherein when Mis yttrium and Lis 3,5-RR—CHN, Ris C-C-alkyl or silyl; and'}{'sup': 1', '1', '4', '5', '6, 'sub': '2', 'wherein when Mis yttrium and Lis N(SiRRR), n is 1, 2, 3, or 4.'}2. (canceled)3. The metal complex of claim 1 , wherein each Ris independently hydrogen claim 1 , methyl claim 1 , ethyl claim 1 , propyl or silyl; R claim 1 , R claim 1 , R claim 1 , R claim 1 , R claim 1 , R claim 1 , and Rare each independently hydrogen claim 1 , methyl claim 1 , ethyl or propyl; and R claim 1 , R claim 1 , R claim 1 , R claim 1 , and Rare each independently C-C-alkyl or silyl.4. The metal complex of claim 1 , wherein each Ris independently hydrogen claim 1 , methyl or ethyl; R claim 1 , R claim 1 , R claim 1 , R claim 1 , R claim 1 , R claim 1 , and Rare each independently hydrogen claim 1 , methyl claim 1 , or ethyl; and R claim 1 , R claim 1 , R claim 1 , R claim 1 , and Rare each independently methyl claim 1 , ethyl claim 1 , propyl or silyl.5. The metal complex of claim ...
Подробнее