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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 82. Отображено 82.
05-01-2023 дата публикации

3차원 반사도 곡면을 이용한 두께 측정 방법

Номер: KR20230001611A
Автор: 조영찬, 이승우, 박희재
Принадлежит:

... 본 발명에 따른 3차원 반사도 곡면을 이용한 두께 측정 방법은, 두께 측정 장치의 광원에서 간섭 렌즈 모듈을 통해 입사되어 시료에서 반사된 후 분광계에서 측정된 간섭광 신호로부터 파장(wavelength), 광경로차(OPD), 반사도(reflectance)의 좌표 성분으로 3차원 측정 반사도 곡면을 생성하는 측정 반사도 곡면 생성 단계; 상기 측정 반사도 곡면에 대응하도록, 계산된 이론 간섭관 신호를 파장과 광경로차(Optical Path Difference) 및 반사도(Reflectance) 좌표 성분을 포함하여 3차원 이론 반사도 곡면을 생성하는 이론 반사도 곡면 생성 단계; 상기 측정 반사도 곡면과 상기 이론 반사도 곡면에 대해 유사도를 반복적으로 판단하는 유사도 판단 단계; 및 상기 유사도 판단 단계에서 상기 유사도가 가장 높은 경우에 해당하는 이론 반사도 곡면을 생성하는 시료의 두께를 상기 측정 반사도 곡면을 형성하는 시료의 두께로 확정하는 시료 두께 산출 단계;를 포함한 것을 특징으로 한다.

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Номер записи: 1
21-07-2016 дата публикации

THIN FILM DEPOSITION APPARATUS

Номер: KR101641453B1
Автор: KANG, HAN MOOK, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a thin film deposition apparatus. According to the present invention, the thin film deposition apparatus comprises: a chamber which defines an inner space and has an opening formed in one region of a shield film contacting the inner space, wherein a substrate to be deposited is placed in the opening; a source supply unit which supplies a deposition source to the shield film while moving in the inner space of the chamber; and a source collection unit which is disposed between the source supply unit and the shield film on at least one side of the opening and collects the deposition source supplied to the shield film. Therefore, the thin film deposition apparatus is capable of preventing a deposition material from being unnecessarily supplied to the inner space of the chamber and recycling the deposition material collected through the source collection unit. COPYRIGHT KIPO 2016 ...

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Номер записи: 2
07-07-2016 дата публикации

METHOD OF COMPENSATING FRINGE ORDER ERROR IN WHITE-LIGHT PHASE-SHIFTING INTERFEROMETRY

Номер: KR101637252B1
Автор: HYUN, CHANG HONG, KIM, SEONG RYONG, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a method of compensating a fringe order error in white-light phase-shifting interferometry, including: an interference signal acquisition step, an index determination step, and a real position calculation step. The interference signal acquisition step includes acquiring at least two color interference signals, using a color camera, from among a red interference signal, a green interference signal, and a blue interference signal. The index determination step includes determining a position where a phase difference between the at least two interference signals reaches a minimum value as an index of the zero order interference signal position. The real position calculation step includes determining, as a zero order interference signal measured position, a position corresponding to the index of the zero order interference signal position from among positions where interference signals are measured from black-and-white interference signals acquired through a ...

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Номер записи: 3
28-02-2017 дата публикации

DEPOSITION MATERIAL DETECTING DEVICE HAVING IMPROVED SERVICE LIFE

Номер: KR101710064B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, YOON, SUNG WON, KANG, MIN KI, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus for measuring the amount of a deposited material vaporized in a crucible disposed in a chamber, comprising a sensor unit, a reflection unit, and a heating unit. The sensor unit is installed on one side of the chamber in which the crucible is arranged, and includes a sensing unit for calculating the vaporization amount of the deposition material vaporized in the crucible. The reflection unit is arranged to be separated from the upper or lower sides of the sensor unit, and reflects a part of the deposition material toward the sensor unit. The heating unit heats the reflection unit so that the deposition material deposited on the reflection unit is vaporized. COPYRIGHT KIPO 2017 (AA) Motor ...

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Номер записи: 4
06-09-2017 дата публикации

CLOUD-BASED MANUFACTURING SYSTEM

Номер: KR1020170101565A
Автор: PARK, HEE JAE
Принадлежит:

The present invention provides a cloud-based manufacturing system which can ensure proper profits to a creator and can minimize losses due to unnecessary or excessive investment for a manufacturer. The cloud-based manufacturing system comprises: a cloud server; a creator terminal; a manufacturer terminal; and a client terminal. The cloud-based manufacturing system comprises the following steps. The creator uploads a creation sample of a creation to a cloud server through the creator terminal. A client selects evaluation, vote, or reservation with respect to the creation sample through the client terminal. The manufacturer applies for each creation sample through the manufacturer terminal. The manufacturer terminal is selected through a matching engine. A matching result of the manufacturer terminal and the creation sample is disclosed to the client terminal. The client determines purchase of the corresponding creation. The creation of the creator is delivered to the client from the manufacturer ...

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Номер записи: 5
27-01-2016 дата публикации

ORGANIC MATERIAL DEPOSITING DEVICE

Номер: KR101588973B1
Автор: LEE, MYUNG SUN, MUN, JEONG IL, YOON, SUNG WON, KIM, JUNG HWAN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an organic material depositing device capable of easily performing rotative movement and linear movement of an organic material deposition source. The organic material depositing device comprises: a first transfer guide part expanded along one direction; a second transfer guide part separated from the first transfer guide part side by side; and a support member connected to the first and second transfer guide parts respectively to be rotatable, and configured to move along the first and second transfer guide parts and support the organic material deposition source. The support member has one movement of the rotative movement and linear movement by individually adjusting distances where the support member moves along the first and second transfer guide parts respectively. COPYRIGHT KIPO 2016 ...

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Номер записи: 6
18-10-2012 дата публикации

INTERFEROMETER FOR TSV MEASUREMENT AND MEASUREMENT METHOD USING SAME

Номер: WO2012141544A2
Автор: LEE, Ki Hun, SHIN, Heung Hyun, PAHK, Heui Jae
Принадлежит:

The present invention relates to an interferometer for TSV measurement and a measurement method using the same, and according to the present invention, an interferometer for TSV measurement comprises: a beam splitter on which the light generated from a light source is incident and is divided and outputted in a first direction and a second direction that are vertical to each other, and which combines lights inputted from said first direction and said second direction and outputs a combined light; a measuring object having mirrors and at least one TSV, wherein the mirrors are respectively disposed in said first direction or said second direction and reflect, to said beam splitter, the outputted light which is outputted from said beam splitter after the light has been inputted; an imaging means which receives the combined light that is reflected from said mirrors and said measuring object and is outputted from said beam splitter, and forms an interference signal through said combined light ...

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Номер записи: 7
28-02-2017 дата публикации

THERMAL VAPOR DEPOSITION DEVICE

Номер: KR101710063B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, YOON, SUNG WON, KIM, DO HUN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a thermal vapor deposition device capable of evaporating and adsorbing deposition substances in a crucible onto a substrate in order to form a thin film on the surface of the substrate placed in a deposition chamber. The present invention includes the crucible, a heating part, and a temperature control part. The crucible stores the deposition substances inside and includes an opening part with the upper side opened. The heating part heats the bottom half of the crucible, storing the deposition substances, at not lower than the solidification point of the deposition substances. The temperature control part adjusts the top of the crucible, in which the deposition substances are evaporated and moved, to not higher than the saturation point of the deposition substances. Some of the deposition substances, moved in the top half of the crucible, hit a wall of the top half of the crucible and are liquefied by the temperature control part so as to flow to the bottom ...

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Номер записи: 8
20-10-2015 дата публикации

APPARATUS FOR ROTATING AND ALIGNING SUBSTRATE

Номер: KR101561140B1
Автор: LEE, HYOUNG BAE, AN, KYOUN RYOUL, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus for rotating and aligning a substrate, and more specifically to an apparatus for rotating and aligning a substrate which aligns a substrate on a mask in a deposition process. The present invention may include: a connection pillar connected to a settling part on which the substrate is settled; a rotating stage which is circular-shaped, fixed with the connection pillar, and a protruding part and a concave part are alternately formed; a power delivering unit which has multiple roller pins arranged separately from one another at fixed intervals, and delivers the power to the rotating stage by rotating in the state that at least one roller pin is pressured and adhered to the concave part at a region of the rotating stage; and a fixing unit which adheres at least one fixing pin to the concave part at another region in the rotating stage in order to have the opposite force of vector to the force applied to the rotating stage of the power delivering ...

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Номер записи: 9
05-03-2018 дата публикации

SUBSTRATE CHUCKING DEVICE AND SUBSTRATE CHUCKING METHOD USING SAME

Номер: KR101833482B1
Автор: KIM, KWANG RAK, PARK, JONG KWAN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a substrate chucking device of an upper chucking type and a substrate chucking method using the same, wherein a substrate, used in manufacturing an OLED and the like, is arranged under an adsorption unit. According to the present invention, the substrate chucking device comprises a substrate support unit, a main adsorption unit, a vacuum pad unit, a first driving unit, a second driving unit, and a control unit. According to the present invention, the substrate chucking method comprises a substrate arrangement step, a pre-adsorption step, and an adsorption step. According to the present invention, the substrate is primarily absorbed by a vacuum pad unit and secondarily absorbed by the main adsorption unit to chuck the substrate in a state where the substrate becomes flat. COPYRIGHT KIPO 2018 ...

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Номер записи: 10
30-09-2010 дата публикации

REFLECTANCE DISTRIBUTION CURVE MODELING METHOD, THICKNESS MEASUREMENT SCHEME AND THICKNESS MEASUREMENT REFLECTOMETER USING SAME

Номер: WO2010110535A3
Автор: PAHK, Heui Jae, AHN, Woo Jung, KIM, Seong Ryong
Принадлежит:

The reflectance distribution curve modeling method of the present invention is for modeling a reflectance distribution of a thin film layer according to a change in the wavelength of light with respect to a thin film layer having a uniform thickness, and comprises: a reflectance distribution curve preparation step whereby a reflectance distribution curve is prepared to represent reflectance distribution of the thin film layer according to a change in wavelength of light; an input intensity setting step whereby an intensity distribution curve is prepared to represent intensity of light in a certain wavelength band around a specific wavelength for which white light was band-passed, and then the intensity distribution curve is integrated within the wavelength band to set as an input intensity of the specific wavelength; an output intensity setting step whereby a combined intensity distribution curve of the reflectance and intensity distribution curves is integrated within the wavelength band ...

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Номер записи: 11
12-02-2018 дата публикации

SUBSTRATE INSPECTION DEVICE USING LASER

Номер: KR101827497B1
Автор: KIM, TAI WOOK, LEE, JEONG HOON, KIM, YOUNG DAE, KIM, SEOUNG UK, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a substrate inspection device using a laser which uses a change difference of a light quantity by linearity of a laser beam and diffusion of the laser beam to detect foreign substances on a surface of a substrate and a lower surface of the substrate and accurately acquire positions of detected foreign substances. The substrate inspection device using a laser comprises: a surface plate unit to support or levitate a substrate in response to an intermittent movement of the substrate; a first and a second measurement unit arranged to have the opposite propagation directions for a first and a second laser beam; a position moving unit to relatively move the first and the second measurement unit in response to the surface plate unit; and a position indication unit to use a light quantity change of the first laser beam detected by a first detection unit by first measurement time in response to an area of the surface plate unit where the substrate is supported and ...

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Номер записи: 12
17-02-2016 дата публикации

EVAPORATING SOURCE FOR FORMING THIN FILM

Номер: KR1020160017671A
Автор: YOON, SUNG WON, KIM, MYEONG HUI, LEE, YEONG HU, LEE, KWANG HYUNG, PAHK, HEUI JAE
Принадлежит:

The present invention relates to an evaporating source for forming a thin film. The evaporating source according to the present invention includes a crucible which stores a deposition material; and inner plates which touch the inner surface of the crucible, are separated in the vertical direction of the crucible, and have at least one opening part respectively. Thereby, the injection pressure of the evaporated deposition material can be easily controlled. The components of the evaporated deposition material are uniformly mixed by increasing a traveling distance in the crucible of the injected deposition material. So, a thin film with uniform composition can be obtained. The thickness profile of the thin film can be made uniform by controlling the inner pressure of the crucible. COPYRIGHT KIPO 2016 ...

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Номер записи: 13
14-02-2024 дата публикации

오존을 이용한 이온교환스크러버의 악취오염물질 제거 효율향상 구조

Номер: KR20240019590A
Автор: 이규하, 박희재, 김동수, 김철환
Принадлежит:

... 본 발명은 일측 하부에는 악취물질 포함공기가 유입되는 유입구(70)가 형성되고, 내부 상측에는 상기 유입구(70)를 통해 유입되어 상승되는 악취물질 포함공기에 세정액을 분사하는 분사노즐(113)이 배열되며, 내부 하단에는 악취물질 포함공기와 반응한 세정액이 수용되는 집수조(450)가 구비되고 상단에는 배기구(170)가 형성되는 스크러버(10)와, 상기 스크러버(10)의 집수조(450) 내의 세정액을 상기 분사노즐(113)로 강제급송하는 세정액순환펌프와, 상기 세정액순환펌프와 상기 분사노즐을 연결하는 세정액공급관로;로 구성되며 상기 스크러버 내부에는 상기 악취물질과 반응하는 이온교환 카트리지가 구비되고, 상기 이온교환 카트리지에는 악취물질의 종류에 따라 설치되는 이온교환섬유가 끼워지되 상기 집수조에는 오존을 투입하기 위한 오존투입수단이 구비된 것을 특징으로 하는 오존을 이용한 이온교환스크러버의 악취오염물질 제거 효율향상 구조에 관한 것이다.

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Номер записи: 14
14-02-2024 дата публикации

오존 발생시스템과 이온교환 스크러버의 연계 처리시스템

Номер: KR20240020227A
Автор: 이규하, 박희재, 김동수, 김철환
Принадлежит:

... 본 발명은 일측 하부에는 악취물질 포함공기가 유입되는 유입구(70)가 형성되고 내부 상측에는 상기 유입구(70)를 통해 유입되어 상승되는 악취물질 포함공기에 세정액을 분사하는 로터노즐(113)이 배열되며 내부 하단에는 악취물질 포함공기와 반응한 세정액이 수용되는 집수조(450)가 구비되고 상단에는 배기구(170)가 형성되는 스크러버(10)와, 상기 스크러버(10)의 집수조(450) 내의 세정액을 상기 분사노즐(113)로 강제급송하는 세정액순환펌프와, 상기 세정액순환펌프와 상기 분사노즐을 연결하는 세정액공급관로;로 구성되며 상기 스크러버 내부에는 상기 악취물질과 반응하는 이온교환 카트리지가 구비되고, 상기 이온교환 카트리지에는 악취물질의 종류에 따라 설치되는 이온교환섬유가 끼워져 구비하고 상기 새정액에는 오존을 투입하여 상기 약취물질과의 반응을 통해 악취를 제거하는 것을 특징으로 하는 오존 발생시스템과 이온교환 스크러버의 연계 처리시스템.

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Номер записи: 15
25-11-2010 дата публикации

METHOD FOR MEASURING A THREE-DIMENSIONAL SHAPE

Номер: WO2010134694A3
Автор: PAHK, Heui-Jae, AHN, Woo-Jung
Принадлежит:

The present invention relates to a method for measuring a three-dimensional shape. The method for measuring the three-dimensional shape of an object having a substrate and a solder ball arranged on the substrate, comprises: a center-determining step of obtaining an image of the solder ball and determining the center of the solder ball; an image-acquiring step of forming a sine wave pattern on the object, and acquiring an integrated image containing images of both the upper surface of the substrate and of the solder ball; a phase value determination step of selecting, from within the integrated image, a reference line which is a virtual line passing through the center of the solder ball, extracting the phase value of the portion onto which the sine wave pattern is projected from the center of the solder ball located on the reference line and determining the extracted phase value to be a phase value of the center of the solder ball, and extracting the phase value of the portion onto which ...

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Номер записи: 16
08-03-2017 дата публикации

APPARATUS TO SUPPLY DEPOSITION MATERIAL

Номер: KR101713113B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, YOON, SUNG WON, KIM, DO HUN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus to supply a deposition material, comprising: a first crucible including a supply pipe on a bottom where a deposition material inflows; a first heating unit heating the first crucible to maintain the deposition material as a liquid state; a second crucible having an outlet pipe connecting to a deposition chamber on the top portion, connecting to a bottom portion of the first crucible on the bottom portion having a connecting pipe where the liquid state deposition material inflows, and having an inside capacity smaller than the one of the first crucible; and a second heating unit heating the second crucible to vaporize the deposition material. COPYRIGHT KIPO 2017 ...

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Номер записи: 17
24-08-2015 дата публикации

SCANNING SYNCHRONIZATION METHOD IN INTERFEROMETRY

Номер: KR101545849B1
Автор: YOON, DO YOUNG, KIM, MIN SU, PARK, JONG KWAN, KIM, TAI WOOK, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a scanning synchronization method in an interferometry. It includes a vibration signal generating step, a third vibration signal generating step, a vibration step, an image trigger generation step, and an applying step. The vibration signal generating step generates a first vibration signal with constant period for vibrating an object, and a second vibration signal of a pulsed waveform synchronized with the first vibration signal. The vibration step vibrates the object by using the first vibration signal. The third vibration signal generating step generates a third vibration signal which is delayed with a constant phase value according to the integer time of the period of the second vibration signal. The image trigger generation step generates an image trigger signal by sampling the third vibration signal according to the pulse delayed in the third vibration signal. The applying step applies an image trigger signal to the image obtaining part to obtain the ...

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Номер записи: 18
07-02-2017 дата публикации

SUBSTRATE SAG PREVENTION DEVICE

Номер: KR101702762B1
Автор: LEE, MYEONG JIN, LEE, JAE JIN, JANG, JEONG HO, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a substrate sag prevention device. The substrate sag prevention device is installed in a vapor deposition chamber and prevents sagging of a vapor deposition substrate arranged with the vapor deposition surface facing downward. The substrate sag prevention device includes: a plurality of support members installed in the vapor deposition chamber and supporting the vapor deposition substrate by being in contact with an edge portion of the vapor deposition surface of the vapor deposition substrate; and a pressing member installed to press an outer portion of the opposite surface of the vapor deposition substrate opposite to the deposition surface, rather than a portion of the opposite surface in contact with the support member, from above. Thus, when the vapor deposition substrate is placed in the vapor deposition chamber, the edge of the substrate is pressed alternately by the support member and the pressing member, thereby preventing the substrate from sagging ...

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Номер записи: 19
11-05-2016 дата публикации

APPARATUS TO INSPECT MAGNETIC MATERIAL FOR DEPOSITION

Номер: KR1020160050175A
Автор: LEE, HYOUNG BAE, LEE, MYEONG JIN, PAHK, HEUI JAE
Принадлежит:

The present invention relates to an apparatus to inspect a magnetic material for deposition, and more specifically to an apparatus to inspect a magnetic material used in aligning a mask and a substrate in a deposition process according to an embodiment of the present invention comprises: a mask having a pattern made up of metallic materials; a substrate aligned on the top surface of the mask; a fixation unit coming in contact with the top surface of the substrate aligned with the mask to temporarily fixate the same and accommodating the magnetic material therein to be moved in a vertical direction; and an inspection unit which is arranged in a lower side of the mask and measures at least one among a magnetic flux density and sagging of the pattern in accordance with a distance between the magnetic material and the mask. As such, the apparatus to inspect a magnetic material for deposition used in aligning the substrate and mask in the same environment as in a bottom-up type deposition apparatus ...

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Номер записи: 20
20-03-2014 дата публикации

CLIENT DEVICE IMPLEMENTING MIDDLEWARE FOR INTERLINKING HETEROGENEOUS GAME EXPERIENCE TYPE EXERCISE MACHINE WITH VARIOUS GAME CONTENT TO MANAGE SAME, AND CONTROL METHOD THEREFOR

Номер: WO2014042352A1
Автор: PARK, Hee Jae
Принадлежит:

The present invention relates to an exer-game exercise machine enabling a game and exercise to be enjoyed through an experience by interlinking an exercise machine with interesting content such as the game, and can provide a client device implementing a middleware for managing smooth communication between an application program and operating environment a complex heterogeneous environment by connecting various hardware components of the exer-game machine with various software components such as game content and applications.

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Номер записи: 21
14-10-2010 дата публикации

IMAGE-CENTERING METHOD

Номер: WO2010117176A3
Автор: HWANG, Young-Min, PAHK, Heui-Jae, LEE, Chang-Yeol, HYUN, Chang-Hong
Принадлежит:

The present invention relates to an image-centering method, and more particularly, to an image centering method comprising: a registration step of registering an inspection subject as a model image by photographing the inspection subject with an optical system with a first magnifying power and setting a position of an inspection region to be searched in a photographed image of the first magnifying power; a photographing step of photographing the inspection subject with an optical system with a second magnifying power higher than the first magnifying power according to a predetermined order to obtain a target image; a reduction step of reducing the target image obtained from the photographing step to the size of that of image of the first magnifying power to register the target image as an inspection image; a matching step of searching for the inspection image in the model image; and, when the inspection image is found through the matching step, a centering step of moving the optical system ...

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Номер записи: 22
26-03-2015 дата публикации

APPARATUS FOR MEASURING THICKNESS AND METHOD FOR MEASURING THICKNESS USING SAME

Номер: WO2015041506A1
Автор: PAHK, Heui jae, HWANG, Young min, JO, Tae yong
Принадлежит:

The present invention relates to an apparatus for measuring a thickness. The present invention relates to an apparatus for measuring a thickness, which is an apparatus for measuring a thickness using a reflectometer, comprising: a light source for emitting light; a light filter unit for receiving the light emitted from the light source, selectively transmitting the light having a plurality of different frequencies so as to be modulated to the light having an intensity distribution, wherein a wavelength width of the light having the intensity distribution is adjusted; an optic system for irradiating an object being measured with the light modulated from the light filter unit, and receiving the light reflected from the object being measured; a light detection unit for receiving the light passing through the optic system so as to acquire reflection information; and a control unit for setting a plurality of frequencies capable of transmitting through the light filter unit so as to adjust the ...

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Номер записи: 23
21-07-2017 дата публикации

DATA EVALUATION APPARATUS AND DATA EVALUATION METHOD OF OPTICAL MEASUREMENT APPARATUS

Номер: KR1020170084732A
Автор: KIM, TAI WOOK, LEE, JUN HYEOK, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a data evaluation apparatus and a data evaluation method of an optical measurement apparatus, evaluating measurement data in accordance with measurement of an object in the optical measurement apparatus measuring the object mounted on a surface plate while a measurement member is moving in a gantry to ensure quality reliability of the measurement data. To achieve this, the apparatus comprises: a data storage unit wherein the measurement data transferred from a measurement member with respect to a measurement section is stored, and the remaining vibration remained on a surface plate linked with the measurement data to be stored; a data comparison unit to compare the measurement data stored in the data storage unit; a vibration comparison unit to compare the remaining vibration linked with the measurement data out of an error range to be stored in the data storage unit with other remaining vibrations stored in the data storage unit or a predetermined reference ...

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Номер записи: 24
29-06-2015 дата публикации

ATOMIC LAYER DEPOSITION APPARATUS

Номер: KR1020150071724A
Автор: LEE, MYUNG SUN, KIM, MIN GAB, MUN, JEONG IL, PAHK, HEUI JAE
Принадлежит:

The present invention relates to an atomic layer deposition apparatus. According to the present invention, the atomic layer deposition apparatus comprises: an atomic layer deposition source in which an atom layer is formed on a substrate which is being transferred, wherein the atomic layer deposition source comprises: a first source area through which the substrate passes in a forward direction of a transfer direction and is exposed to a first source gas; a first purge area in which the substrate passing the first source area is exposed to purge gas; a second source area in which the substrate passing the first purge area is exposed to a second source gas; and a second purge area in which the substrate passing the second source area is exposed to the purge gas, and is plurally arranged in the forward direction of the transfer direction, and wherein arrangements of each area at the time of transfer in a reverse direction of the substrate is made to be equal to arrangements of each area of ...

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Номер записи: 25
02-02-2016 дата публикации

VACUUM DEPOSITION DEVICE

Номер: KR1020160011770A
Автор: MUN, JEONG IL, LEE, MYUNG SUN, AHN, JAE HYUNG, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a vacuum deposition device. According to the present invention, the vacuum deposition device deposits a source onto a substrate installed in a vacuum chamber. The vacuum deposition device comprises: the vacuum chamber having a first through unit formed on one side to be connected to the outside, and an accommodation space formed inside wherein the vacuum chamber is installed in a vacuum state; an atmospheric chamber having a second through unit formed on one side to correspond to the first through unit, and accommodated to be able to move in the vacuum chamber wherein the atmospheric chamber arranges the substrate in a mask or a source unit accommodated in the vacuum chamber; a connection pipe installed to be expanded, maintaining the vacuum state inside the vacuum chamber by connecting the first through unit and the second through unit; and a stage unit installed outside the vacuum chamber, moving the atmospheric chamber by being connected to the atmospheric ...

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Номер записи: 26
18-10-2012 дата публикации

INTERFEROMETER FOR TSV MEASUREMENT AND MEASUREMENT METHOD USING SAME

Номер: WO2012141544A3
Автор: LEE, Ki Hun, SHIN, Heung Hyun, PAHK, Heui Jae
Принадлежит:

The present invention relates to an interferometer for TSV measurement and a measurement method using the same, and according to the present invention, an interferometer for TSV measurement comprises: a beam splitter on which the light generated from a light source is incident and is divided and outputted in a first direction and a second direction that are vertical to each other, and which combines lights inputted from said first direction and said second direction and outputs a combined light; a measuring object having mirrors and at least one TSV, wherein the mirrors are respectively disposed in said first direction or said second direction and reflect, to said beam splitter, the outputted light which is outputted from said beam splitter after the light has been inputted; an imaging means which receives the combined light that is reflected from said mirrors and said measuring object and is outputted from said beam splitter, and forms an interference signal through said combined light ...

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Номер записи: 27
03-11-2017 дата публикации

기판 검사 장치

Номер: KR0101792543B1
Автор: 박희재, 김영대
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 기판 검사 장치에 관한 것으로서, 본 발명에 따른 기판 검사 장치는 검사모듈을 포함하는 기판 검사 장치에 있어서, 플레이트; 상기 플레이트에 결합되며, 상기 검사모듈을 Y축 방향으로 이동시키도록 설치되는 제1이동모듈; 상기 플레이트에 결합되며, 상기 검사모듈을 Z축 방향으로 이동시키도록 설치되고, 상기 검사모듈의 Y축 방향으로 이동시 동일한 방향으로 연동하여 이동하도록 설치되는 제2이동모듈;을 포함하여, X축, Y축 및 Z축 방향으로의 구동이 단일 구동부의 구동에 의해 이동이 가능하여 정밀한 이동 제어가 가능하며, X축, Y축 및 Z축 방향의 각 구동부를 개별적 또는 동시에 제어 가능하여 검사모듈이 검사 위치로 신속하게 이동 가능한 기판 검사 장치가 제공된다.

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Номер записи: 28
21-03-2017 дата публикации

SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD

Номер: KR101717994B1
Автор: KIM, TAI WOOK, LEE, JEONG HOON, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a substrate inspection apparatus and a substrate inspection method capable of accurately detecting the position of a detected foreign substance as well as detecting the foreign substance on a substrate surface by using a change in the amount of light per unit light receiving area due to the straightness of a laser beam and the divergence of the laser beam. The substrate inspection apparatus for inspecting a foreign substance on a surface of a substrate includes: a first measuring unit and a second measuring unit being in parallel to a first laser beam and a second laser beam exhibiting the same Gaussian cross-sectional profile and having light propagation directions opposite to each other; a position calculation unit for calculating a position of the foreign substance in the width direction of the substrate by using a light amount of the first laser beam detected when the foreign substance passes through the first measuring unit, a light amount of the second ...

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Номер записи: 29
26-09-2017 дата публикации

SUBSTRATE INSPECTION DEVICE

Номер: KR1020170107621A
Автор: PAHK, HEUI JAE, KIM, YOUNG DAE
Принадлежит:

The present invention relates to a substrate inspection device. According to the present invention, the substrate inspection device including an inspection module comprises: a plate; a first moving module coupled to the plate, and installed to move the inspection module in the Y axis direction; and a second moving module coupled to the plate, installed to move the inspection module in the Z axis direction, and installed to move in the same direction when moving in the Y axis direction of the inspection module. A driving in the X axis, Y axis and Z axis directions can be moved by a driving of a single driving part, so that precise movement control can be possible. Each driving part in the X axis, Y axis and Z axis directions can be individually or simultaneously controlled, so that the inspection module can be rapidly moved to an inspection location. COPYRIGHT KIPO 2017 ...

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Номер записи: 30
29-09-2016 дата публикации

패턴의 결함 검사 방법

Номер: KR0101661023B1
Автор: 황영민, 김상윤, 배정봉, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 마스터 기판을 광학계로 복수회 촬영하고 결합시킨 마스터 이미지를 이용하여 기판에 형성된 결함을 용이하게 검사할 수 있는 패턴의 결함 검사 방법에 관한 것으로, 결함이 존재하지 않는 마스터 기판을 준비하는 준비단계; 광학계를 이용하여 상기 마스터 기판의 서로 다른 영역을 복수회 촬영하고 결합시켜 마스터 이미지로 등록하는 등록단계; 검사대상기판에서 결함(defect)이 존재하는 것으로 예상되는 검사영역을 상기 광학계를 통해 상기 마스터 이미지와 동일한 배율로 촬영하여 검사화상으로 등록하는 촬영단계; 상기 마스터 이미지와 상기 검사화상을 매칭하여 상기 검사영역 내의 결함(defect)을 검색하는 매칭단계;를 포함하는 것을 특징으로 한다.

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Номер записи: 31
29-07-2015 дата публикации

INTEGRATED SHAPE MEASURING APPARATUS

Номер: KR0101539946B1
Автор: 윤도영, 김태욱, 황영민, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 통합형 형상 측정장치에 관한 것으로서, 반사형 간섭계 유닛과, 투과형 간섭계 유닛과, 광검출부를 포함한다. 반사형 간섭계 유닛은 제1광원부와 반사형 간섭계를 구비하고, 반사형 간섭계는 제1광원부에서 발생된 광을 측정대상물과 기준미러로 전달하여 측정대상물에서 반사된 광과 기준미러에서의 기준광을 이용하여 간섭무늬를 생성한다. 투과형 간섭계 유닛은 단색광을 발생하는 제2광원부와 투과형 간섭계를 구비하고, 투과형 간섭계는 제2광원부에서 발생된 광을 분할하여 일부는 측정대상물을 투과시키고 나머지 일부는 측정대상물을 투과시키지 않으며 측정대상물을 투과한 광과 측정대상물을 투과하지 않은 광을 이용하여 간섭무늬를 생성한다. 광검출부는 측정대상물의 상측에 배치되고, 반사형 간섭계 유닛 또는 투과형 간섭계 유닛에 의해 생성되는 간섭무늬를 검출한다. 통합형 형상 측정장치에서는 측정대상물의 광투과성에 따라 반사형 간섭계 유닛 또는 투과형 간섭계 유닛 중 어느 하나가 선택적으로 이용된다.

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Номер записи: 32
27-10-2016 дата публикации

METHOD FOR MEASURING THIN FILM THICKNESS

Номер: WO2016171397A1
Автор: KIM, Kwang Rak, KWON, Soon Yang, PAHK, Heui Jae
Принадлежит:

The present invention relates to a method for measuring thin film thickness, and comprises a reflectivity acquisition step, a refractive index assumption step, a conversion step, an error checking step, a phase extraction step, a phase restoration step, and a thickness calculation step. The reflectivity acquisition step acquires a light intensity signal of a thin film, and acquires a reflectivity of the thin film through the light intensity signal. The refractive index assumption step assumes the refractive index of air and the refractive index of the thin film to be a real number, and the refractive index of a substrate on which the thin film is formed to be a complex number. The conversion step converts the reflectivity into a normal reflectivity. The error checking step checks whether a first difference value, which is a difference between the maximum value of the normal reflectivity converted in the conversion step and a first reference value, or a second difference value, which is ...

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Номер записи: 33
11-11-2010 дата публикации

VISION INSPECTION SYSTEM AND COORDINATE CONVERSION METHOD USING SAME

Номер: KR2010128759A2
Автор: Kang, Sung Bum, PAHK, Heui-Jae, AHN, Woo-Jung
Принадлежит:

The present invention relates to a vision inspection system and to a coordinate conversion method using same. The vision inspection system of the present invention comprises: a table which supports an object to be inspected; a stage which enables the table to linearly reciprocate in the Y-axis direction; a plurality of cameras spaced apart from each other along the X-axis direction to acquire images of the object to be inspected or of the table; a plurality of first marks spaced apart from each other at one end of the table along the X-axis direction and intersecting the Y-axis direction; and a plurality of second marks spaced apart from each other at one side of the table along the Y-axis direction from the leftmost first mark from among the first marks, and spaced apart from each other at the other side of the table along the Y-axis direction from the rightmost first mark from among the first marks. The vision inspection system of the present invention acquires images of the first marks ...

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Номер записи: 34
08-09-2016 дата публикации

METHOD OF MEASURING THICKNESS OF THIN FILM

Номер: KR101655096B1
Автор: KIM, KWANG RAK, KWON, SOON YANG, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a method of measuring a thickness of a thin film. The method of measuring a thickness of a thin film comprises: a reflectance acquisition step, a refractive index assuming step, a conversion step, an error checking step, a phase extraction step, a phase restoring step, and a thickness calculation step. The reflectance acquisition step acquires a light intensity signal of a thin film, and acquires reflectance for the thin film by the light intensity signal. The refractive index assuming step assumes a refractive index of air and a refractive index of the thin film in real numbers, and a refractive index of a substrate on which the thin film is formed in a complex number. The conversion step converts the reflectance into normal reflectance. The error checking step checks whether a first difference value between a maximum value of the normal reflectance converted in the conversion step and a first reference value or a second difference value between a minimum ...

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Номер записи: 35
27-02-2018 дата публикации

TWO-WHEELED TRANSPORT CART

Номер: KR101832904B1
Автор: PARK, HEE JAE
Принадлежит: FOUNDATION FOR RESEARCH AND BUSINESS, SEOUL NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY

A two-wheeled transport cart includes: a main body; a pair of wheels installed on the main body; a driving motor for driving the pair of wheels; a motor encoder for detecting rotation of the wheel and measuring the number of revolutions of the wheel as unbalanced load is applied to the main body; and an estimator for calculating a target angle, which is an angle at which the main body is to be tilted from a current position due to a movement of the wheel, such that the new center of gravity due to the load is positioned on a vertical line by using the number of revolutions of the wheel received from the motor encoder. COPYRIGHT KIPO 2018 ...

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Номер записи: 36
31-01-2023 дата публикации

간섭과 파수 고주파 변조를 이용한 박막 두께와 형상을 측정하는 장치 및 그 장치를 이용한 박막 두께와 형상 측정 방법

Номер: KR102494082B1
Автор: 조영찬, 이승우, 이신용, 박희재
Принадлежит: 서울대학교산학협력단

... 본 발명에 따른 간섭과 파수 고주파 변조를 이용한 박막 두께와 형상을 측정하는 장치 및 그 장치를 이용한 박막 두께와 형상 측정 방법은, 광대역 다파장 빛을 발생시키는 광원; 상기 광원에서 발생된 빛의 일부를 투과하고 나머지를 반사시키는 제1빔 스플리터; 상기 제1빔 스플리터에서 분기된 빛을 시료를 향해 입사시키는 간섭 렌즈 모듈; 및 상기 시료와 상기 간섭 렌즈 모듈을 통해 생성된 간섭광이 상기 제1빔 스플리터를 통과한 후 측정되는 이미징 분광기;를 포함하며, 상기 이미징 분광기에 측정되는 빛의 신호에 파수에 대한 고주파 변조 효과를 구현하는 고주파 신호 변조 모듈을 포함한 것을 특징으로 한다.

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Номер записи: 37
08-03-2017 дата публикации

DEPOSITION MATERIAL SUPPLY DEVICE WHICH CAN BE CONTINUOUSLY CHARGED

Номер: KR101713112B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, YOON, SUNG WON, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a deposition material supply device which can be continuously charged. The deposition material supply device includes: a storage container, a first heating unit, a crucible, a second heating unit, a connection pipe, and a heating and cooling control unit. The storage container includes: an inlet in which a solid deposition material is placed; and an outlet from which the deposition material is discharged. The first heating unit liquefies the deposition material by heating the storage container. The crucible is installed to be lower than the storage container and includes an inflow unit in the lower part and an outflow unit connected to a deposition chamber in the upper part. The second heating unit evaporates the deposition material by heating the crucible. The connection pipe connects the inlet and the outlet, and the heating and cooling control unit controls the temperature of the connection pipe. In case it is necessary to charge the inside of the crucible ...

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Номер записи: 38
07-02-2017 дата публикации

APPARATUS FOR DEPOSITING THIN FILM

Номер: KR101702785B1
Автор: AHN, WOO JUNG, KIM, JUNG HWAN, KIM, SEONG RYONG, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus for depositing a thin film. Productivity can be improved by reducing a failure rate of a substrate by including a mask, a first plate, and a second plate. The quality of the substrate can be improved by easily controlling parallelism of a configuration to pressurize the substrate in a deposition process. Also, production processes are simplified and production costs are saved by obtaining high position reproducibility in the configuration to pressurize the substrate in the deposition process. COPYRIGHT KIPO 2017 ...

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Номер записи: 39
18-10-2022 дата публикации

선형 증발원의 노즐 및 증착 장치

Номер: KR102455594B1
Автор: 이명선, 윤성원, 문정일, 김지형, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 선형 증발원의 노즐 및 증착 장치에 관한 것으로서, 본 발명에 따른 선형 증발원의 노즐은 노즐의 유입구와 유출구 사이에 유입구로 유입된 증착 물질을 반사시켜 기판을 향하여 수직 방향으로 반사되도록 유도하는 반사면을 구비하도록 하여, 증착 물질의 사용 효율을 향상시키고 마스크 쉐도우 효과를 최소화할 수가 있다.

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Номер записи: 40
13-05-2016 дата публикации

SPUTTERING DEVICE

Номер: KR101615913B1
Автор: NAMGOONG, SUNG TAE, YOON, SUNG WON, KWON, YONG CHUL, AHN, JAE HYUNG, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a sputtering device comprising a crucible support unit and a heater unit. The crucible support unit supports a crucible to which raw material of a thin film is filled, and the heater unit provides heat to the crucible supported by the crucible support unit. The crucible support unit may comprise: a support body part forming a space for a crucible to be inserted; a heater bracket part arranged on the support body part, supporting the heater unit; and a settlement hook part joined to the heater bracket part, mounted and supported by a support hook part. The sputtering device prevents heat transferred to the crucible from being lost through the crucible support unit, and maintains raw material of a thin film discharged from the crucible to be uniform while maintaining uniformity of a thin film deposited on a substrate. Moreover, the sputtering device is able to increase an efficiency of the crucible using raw material of a thin film by leveling the shape of ...

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Номер записи: 41
30-09-2010 дата публикации

REFLECTANCE DISTRIBUTION CURVE MODELING METHOD, THICKNESS MEASUREMENT SCHEME AND THICKNESS MEASUREMENT REFLECTOMETER USING SAME

Номер: KR2010110535A2
Автор: PAHK, Heui Jae, AHN, Woo Jung, KIM, Seong Ryong
Принадлежит:

The reflectance distribution curve modeling method of the present invention is for modeling a reflectance distribution of a thin film layer according to a change in the wavelength of light with respect to a thin film layer having a uniform thickness, and comprises: a reflectance distribution curve preparation step whereby a reflectance distribution curve is prepared to represent reflectance distribution of the thin film layer according to a change in wavelength of light; an input intensity setting step whereby an intensity distribution curve is prepared to represent intensity of light in a certain wavelength band around a specific wavelength for which white light was band-passed, and then the intensity distribution curve is integrated within the wavelength band to set as an input intensity of the specific wavelength; an output intensity setting step whereby a combined intensity distribution curve of the reflectance and intensity distribution curves is integrated within the wavelength band ...

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Номер записи: 42
07-01-2010 дата публикации

METHOD FOR MEASURING THICKNESS OR SURFACE PROFILE

Номер: KR2010002085A1
Автор: PARK, Heui Jae, AH, Woo Jung, KIM, Seong Ryong, LEE, Jun Hyeok
Принадлежит:

The present invention concerns a method for measuring thickness or surface profile. According to the present invention, the method for measuring thickness or surface profile of a thin layer stacked on a base layer uses a white-light interferometer and comprises: a step for assuming plural thin sample layers having different thicknesses and simulating an interference signal for each thin sample layer to generating the simulation interference signal corresponding to each thickness, a step for obtaining the real interference signal for an optical axis direction projected on the thin layer by irradiating the white light on the thin layer, a step for preparing plural predicted thicknesses of the thin layer from the real interference signal, a step for comparing the simulation interference signal having the corresponding thickness to the predicted thickness with the real interference signal and checking whether they match, and a step for determining the thickness of the thin layer from the thickness ...

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Номер записи: 43
25-07-2016 дата публикации

CLUSTER TYPE EVAPORATION APPARATUS FOR MANUFACTURING OLED

Номер: KR1020160087953A
Автор: LEE, JAE JIN, PAHK, HEUI JAE
Принадлежит:

The invention relates to a cluster type deposition apparatus for manufacturing an organic light emitting device (OLED), capable of shortening the entire length of process equipment. The cluster type deposition apparatus for manufacturing the OLED according to the present invention includes: a loading chamber for supplying a substrate for the OLED; a plurality of cluster respectively having an unloading chamber having a conveying unit for conveying the substrate and a plurality of processing chambers arranged around the unloading chamber for receiving the substrate from the loading chamber to perform a deposition, and connected to a buffer chamber for returning and rotating the substrate. Substrate supports for supporting the substrate are formed at both inner sides of the processing chamber, and a deposition source is formed on a bottom surface inside the processing chamber to perform a reciprocating movement in a lower region of the both substrate supports, such that an organic material ...

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Номер записи: 44
19-03-2018 дата публикации

CRITICAL DIMENSION MEASURING APPARATUS AND METHOD USING SAME

Номер: KR1020180028590A
Автор: KIM, KWANG RAK, CHOI, JAE HYUK, KIM, SANG YUN, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a critical dimension measuring apparatus for measuring a critical dimension of a circuit pattern formed along one surface of a substrate made of a light transmitting material and a method using the same. The critical dimension measuring apparatus comprises: a substrate support portion; a first lighting portion; a reflection portion; an image acquisition portion; and a control portion. The method of measuring critical dimension comprises the following: a horizontal adjustment step; a light irradiation step; an image acquisition step; and a line width calculation step. And light irradiated toward the substrate is regularly reflected by the reflection portion. The light reflected by the reflection portion with the image acquisition portion is captured to acquire an image in which a pair of light and shade boundary lines are formed on both sides of the inclined surface of the circuit pattern. The critical dimension of the circuit pattern is calculated by measuring ...

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Номер записи: 45
17-06-2015 дата публикации

DEPOSITION CHAMBER APPARATUS

Номер: KR1020150066641A
Автор: LEE, MYUNG SUN, MUN, JEONG IL, KIM, MIN GAB, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a deposition chamber apparatus. According to the present invention, the deposition chamber apparatus comprises: a vacuum chamber having a first chamber which has a support surface having a penetration portion and has a first space therein and having a first shielding unit which is installed on the support surface to form a second space and prevents an external air from being introduced to the penetration portion and provided in a vacuum state; and an atmospheric chamber received to be moved in the first space and dividing the first space and the second space when the atmospheric chamber is closely attached to the support surface. Accordingly, the deposition chamber apparatus is capable of maintaining and repairing the atmospheric chamber received inside the vacuum chamber while the deposition chamber apparatus does not affect the vacuum state inside the vacuum chamber. COPYRIGHT KIPO 2015 ...

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Номер записи: 46
21-07-2015 дата публикации

APPARATUS FOR MEASURING THICKNESS AND METHOD FOR MEASURING THICKNESS FOR THE SAME

Номер: KR0101537854B1
Автор: 박희재, 황영민, 조태영
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 두께 측정 장치에 관한 것이며, 본 발명의 두께 측정 장치는 반사광도계(Reflectometer)를 이용하는 두께 측정 장치에 있어서, 광을 방출하는 광원;상기 광원으로부터 방출되는 광을 제공받아 서로 다른 복수개의 주파수에 대하여 선택적으로 투과시켜 강도분포를 갖는 광으로 변조하되 상기 강도분포를 갖는 광의 파장 폭을 조절할 수 있는 광필터부; 상기 광필터부로부터 변조된 광을 측정대상물 측으로 조사하고, 상기 측정대상물 측으로부터 반사되는 광이 입사되는 광학계; 상기 광학계를 통과한 광을 제공받아 반사도 정보를 획득하는 광검출부; 상기 광필터부를 투과가능한 복수개의 주파수를 설정하여 상기 광필터부에 의해 변조되는 광의 파장 폭을 조절하며, 수학식에 의해 모델링되어 기저장된 이론반사도 정보와 상기 광검출부를 통해 획득된 반사도 정보를 비교함으로써 측정대상물의 두께를 측정하는 제어부;를 포함하는 것을 특징으로 하는 두께 측정 장치 것을 특징으로 한다. 따라서, 본 발명에 의하면, 측정대상물의 소재 또는 측정 위치에 상관없이 두께 측정 정확도를 향상시킬 수 있는 할 수 있는 두께 측정 장치가 제공된다.

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Номер записи: 47
03-02-2022 дата публикации

SYSTEM FOR MEASURING THICKNESS AND PHYSICAL PROPERTIES OF THIN FILM USING SPATIAL LIGHT MODULATOR

Номер: WO2022025385A1
Автор: PAHK, Heui Jae, LEE, Seung Woo, KIM, Min Gyu
Принадлежит:

A system for measuring the thickness and physical properties of a thin film using a spatial light modulator according to the present invention is characterized by comprising: a spatial light modulator in which light that has departed a light source is spatially modulated so as to illuminate only a specific area of a sample; a first beam splitter which changes the direction of the light modulated by the spatial light modulator and through which a portion of the reflected light reflected from the sample passes; an objective lens for focusing the light, refracted by the first beam splitter, onto the specific area of the sample; a second beam splitter on which the portion of the reflected light reflected from the sample is incident after being split in the first beam splitter, and which then changes the direction of the incident light; a first camera for acquiring a surface image of the sample by means of the reflected light incident from the second beam splitter; an optical fiber in which ...

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Номер записи: 48
10-12-2018 дата публикации

복호장치와, 복호장치의 암호문 복호화 방법

Номер: KR0101906225B1
Автор: 유용국, 박희재, 이종호
Принадлежит: 삼성전자 주식회사

... 본 발명의 실시예에 따른 복호장치의 암호문 복호화 방법은, 기 설정된 공개키 암호 알고리즘에 따라서 암호문을 평문으로 복호화하는 비밀키가 분해된 기 설정된 복수의 다항함수를 기 저장하는 단계와; 암호문 생성장치로부터 복수의 다항함수로 분해된 비밀키에 기초하여 생성된 암호문을 수신하는 단계와; 수신된 암호문을 기 저장된 복수의 다항함수에 기초하여 평문으로 복호화하는 단계를 포함하는 것을 특징으로 한다.

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Номер записи: 49
28-02-2017 дата публикации

DEPOSITION MATERIAL COLLECTION APPARATUS

Номер: KR101710062B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, YOON, SUNG WON, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a deposition material collection apparatus which receives and collects deposition material, which escapes between substrates, among deposition material spread towards the substrates to form a thin film, comprising: a trap container; a trap container heating unit; a collector container; a discharge pipe; and a discharge pipe heating unit. The trap container is placed on one side of a substrate conveyor unit, which conveys a substrate in one direction in a deposition chamber; and has an opening unit whose surface in contact with the substrate conveyor unit is open. Deposition material, which has escaped from the substrate, among deposition material sprayed towards the substrate is accumulated inside the trap container. The trap container-heating unit heats the trap container up to a temperature which is the same or higher than a freezing point of the deposition material. The collector container is placed on the outside of the deposition chamber at a lower ...

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Номер записи: 50
22-01-2016 дата публикации

APPARATUS AND METHOD FOR CONTROLLING SURGICAL BURR CUTTER

Номер: KR0101587721B1
Автор: 박희재, 김태욱
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명에 따른 수술용 버커터의 제어방법 및 제어장치는 비교적 단순한 구성을 통해 환자에게 비가역적인 손상을 남기는 매크로 채터 및 마이크로 채터를 실시간으로 모니터링함으로써 매크로 채터 및 마이크로 채터를 동시에 방지할 수 있게 된다.

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Номер записи: 51
17-03-2023 дата публикации

웨어러블 디바이스 및 이를 이용한 재난 관리 시스템

Номер: KR20230037725A
Автор: 구다솜, 홍유진, 신상도, 홍기정, 김기홍, 민진기, 최준화, 박희재, 김도형, 박주연, 고승환, 배영윤, 최지영
Принадлежит:

... 본 발명은 웨어러블 디바이스 및 이를 이용한 재난 관리 시스템에 관한 것이다. 상기 웨어러블 디바이스는 사용자의 움직임 정보를 감지하는 관성 센서와 상기 사용자의 심박수 정보를 감지하는 심박 센서를 포함하는 센서 모듈, 상기 센서 모듈에서 감지된 사용자의 움직임과 심박수를 이용하여, 사용자 상태 중증도를 결정하는 제어 모듈 및 상기 결정된 사용자 상태 중증도를 외부에 제공하는 통신 모듈을 포함한다.

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Номер записи: 52
30-07-2015 дата публикации

METHOD FOR MEASURING VIBRATION USING INTERFEROMETER

Номер: KR101539945B1
Автор: KIM, MIN SU, YOON, DO YOUNG, PARK, JONG KWAN, KIM, TAI WOOK, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a method for measuring vibration using an interferometer. The method of the present invention comprises: a step for acquiring an image; a step for calculating the movement width; a step for calculating the amplitude; and a step for calculating the cycle. The step for acquiring consecutive image requires an image of the subject to be measured at a certain time interval for the subject to be measured which vibrates with a certain cycle. The step for calculating the movement width calculates the movement width to the left and the right of a moire pattern in the plurality of images acquired. The step for calculating the amplitude calculates the amplitude of the subject to be measured by using the distance between neighboring patterns of the moire pattern, the wavelength of the light irradiated to the subject to be measured, and the movement width to the left and the right of the moire pattern. The step for calculating a cycle calculates the cycle of the subject ...

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Номер записи: 53
08-06-2018 дата публикации

선폭 측정장치 및 이를 이용한 선폭 측정방법

Номер: KR0101865338B1
Автор: 김광락, 최재혁, 김상윤, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 광 투과성 재질로 된 기판의 일면을 따라 형성된 회로패턴의 선폭(critical dimension)을 측정하는 선폭 측정장치 및 이를 이용한 선폭 측정방법에 관한 것이다. 본 발명의 선폭 측정장치는 기판지지부와, 제1조명부와, 반사부와, 영상취득부와, 제어부를 포함하고, 본 발명의 선폭 측정방법은 수평 조절단계와, 광 조사단계와, 영상 취득단계와, 선폭 산출단계를 포함한다. 본 발명은 기판을 향해 조사된 광이 반사부에 의해 정반사되고, 반사부에서 반사된 광을 영상취득부로 촬상하여 회로패턴의 경사면 양측을 기준으로 한 쌍의 명암 경계선이 형성된 이미지를 취득하며, 한 쌍의 명암 경계선 사이의 거리를 측정하여 회로패턴의 선폭을 산출하는 것을 특징으로 한다.

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Номер записи: 54
07-11-2013 дата публикации

METHOD FOR MANUFACTURING THIN-FILM SOLAR CELL AND THIN-FILM SOLAR CELL USING SAME

Номер: WO2013165121A1
Автор: KIM, Tai-wook, PAHK, Heui Jae
Принадлежит:

The present invention relates to a method for manufacturing a thin-film solar cell. The method for manufacturing a thin-film solar cell, according to the present invention, comprises: a rear electrode layer lamination step for laminating a rear electrode layer on the upper side of a substrate; a rear electrode layer patterning step for removing a part of the rear electrode layer such that a part of the substrate is exposed and patterning the rear electrode layer; a protruding pattern formation step for forming a protruding pattern which protrudes from the substrate by deforming the rear electrode layer positioned near the substrate exposed in the patterning step; a light absorbing layer lamination step for laminating the light absorbing layer on the upper side of the rear electrode layer such that the protruding pattern is exposed to the outside; and a front electrode layer lamination step for laminating the front electrode layer on the upper side of the light absorbing layer so as to be ...

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Номер записи: 55
25-11-2010 дата публикации

METHOD FOR MEASURING A THREE-DIMENSIONAL SHAPE

Номер: KR2010134694A2
Автор: PAHK, Heui-Jae, AHN, Woo-Jung
Принадлежит:

The present invention relates to a method for measuring a three-dimensional shape. The method for measuring the three-dimensional shape of an object having a substrate and a solder ball arranged on the substrate, comprises: a center-determining step of obtaining an image of the solder ball and determining the center of the solder ball; an image-acquiring step of forming a sine wave pattern on the object, and acquiring an integrated image containing images of both the upper surface of the substrate and of the solder ball; a phase value determination step of selecting, from within the integrated image, a reference line which is a virtual line passing through the center of the solder ball, extracting the phase value of the portion onto which the sine wave pattern is projected from the center of the solder ball located on the reference line and determining the extracted phase value to be a phase value of the center of the solder ball, and extracting the phase value of the portion onto which ...

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Номер записи: 56
13-05-2016 дата публикации

SPUTTERING DEVICE

Номер: KR101620323B1
Автор: NAMGOONG, SUNG TAE, YOON, SUNG WON, KWON, YONG CHUL, AHN, JAE HYUNG, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a sputtering device comprising: a crucible support unit, a heater unit, and a reflection unit. The crucible support unit supports a crucible to which raw material of a thin film is filled. Also, the heater unit provides heat to the crucible supported by the crucible support unit; and the reflection unit surrounds the heater unit and reflects the heat released from the heater unit to the crucible. The reflection unit may comprise: separated frame parts arranged to be separated from each other, surrounding an outer circumference of the heater unit; and at least one reflection plate closing a space between the neighboring separated frame parts. At least one among the number, thickness, and area of the opened surface of the reflection plate is adjusted along a direction of a major axis of the crucible. The sputtering device is able to maintain uniform heat distribution of a linear evaporation source to which raw material of a thin film is filled. COPYRIGHT KIPO ...

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Номер записи: 57
09-08-2016 дата публикации

FREE TRACK EXERCISING TOOL APPARATUS CAPABLE OF CONTROLLING VIRTUAL REALITY ANIMATION AND VIRTUAL ANIMATION CONTROL METHOD

Номер: KR1020160093990A
Автор: PARK, HEE JAE
Принадлежит:

Partial embodiments of the present invention relate to a free track exercising tool apparatus capable of controlling a virtual reality animation and a virtual reality animation control method thereof. The free track exercising tool apparatus can control the virtual reality animation by receiving the movement of a user in a first axis direction and in a second axis direction. The free track exercising tool apparatus includes: an exercising tool unit including first and second axis frames forming a mechanical pattern of the movement of the user in the first and second axis directions, a rope connected to the second axis frame, and a transmission unit transmitting the movement of the user by being connected to the rope; an exercise measuring unit which senses the movement of the user being transmitted through the exercising tool unit and measures user exercise information of the first axis and second axis; a track calculating unit which uses the measured movement information of the first axis ...

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Номер записи: 58
11-10-2016 дата публикации

IMAGE STABILIZATION METHOD THROUGH COMPENSATION OF VIBRATION

Номер: KR101664468B1
Автор: PARK, HEE JAE, LEE, CHI BUM
Принадлежит: FOUNDATION FOR RESEARCH AND BUSINESS, SEOUL NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY

Disclosed is an image stabilization method through compensation of vibration. The image stabilization method through the compensation of the vibration comprises: (a) step for determining kinds of 3D vibration sensed by a gyro sensor for a support member surrounding a camera unit, and outputting an electric signal; (b) step for enabling a movement control unit to generate a movement control signal compensating the 3D vibration of up down or left right sides in response to the electric signal, and generating differential displacement of the up down or left right sides which compensates the 3D vibration while moving first and second coils or third and fourth coils when first and second permanent magnets or third and fourth permanent magnets installed in the center of the camera unit generate repulsive power or fundamental force in response to the movement control signal; and (c) step for enabling a flexible structure positioned between the camera unit and the support member to guide movement ...

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Номер записи: 59
22-05-2015 дата публикации

SYSTEM FOR MANAGING EXERCISE INFORMATION BASED ON SOCIAL NETWORKING TOOLS

Номер: KR1020150055662A
Автор: PARK, HEE JAE
Принадлежит:

An embodiment in accordance with the present invention relates to a system and an applied method to manage exercise information based on social networking services. Such an exercise information management system comprises: a terminal which converts data measured from an exercise machine into exercise data by using conversion parameters; and an exercise information management device which stores individualized exercise data and provides the exercise data after verifying the authentication of the terminal requesting the data through the social networking services. COPYRIGHT KIPO 2015 (2,A1,A2,A3) Exercise goods (20) Exercise information management server ...

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Номер записи: 60
03-06-2016 дата публикации

MONOMER VACUUM DEPOSITION APPARATUS

Номер: KR0101627047B1
Автор: 문정일, 이명선, 김정환, 강민기, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 모노머 진공 증착 장치에 관한 것으로서, 본 발명에 따른 모노머 진공 증착 장치는 기판 상에 모노머를 증착하는 모노머 증착 장치에 있어서, 상기 기판이 수용되며, 진공상태로 마련되는 진공챔버; 상기 진공챔버 내에 수용되며, 상기 기판의 면적보다 넓게 마련되고, 상기 기판과 대향되는 베이스부; 상기 기판 및 상기 베이스부가 이동하지 않고 상기 기판 상에 모노머가 증착되도록, 상기 베이스부 상에 다수 개의 열로 배치되며 상기 기판 측으로 모노머를 배출하는 노즐부; 상기 진공챔버 외부에 배치되는 광원부와, 상기 노즐부 사이에 배치되며 상기 광원부로부터 조사되는 자외선을 상기 기판 측으로 안내하는 광안내부를 포함하는 경화부;를 포함하는 것을 특징으로 한다. 이에 의하여, 진공챔버 외부에 배치되는 광원부로부터 조사되는 자외선이 진공 챔버 내부에 배치되는 기판 측으로 안내되도록 하여 노즐부 간의 거리 등에 영향을 미치지 않도록 함으로써, 우수한 증착 효율을 얻을 수 있는 모노머 진공 증착 장치가 제공된다.

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Номер записи: 61
09-09-2016 дата публикации

ARBITRARY TEMPERATURE DISTRIBUTION CONTROL APPARATUS FOR PLATE HEATER

Номер: KR101656182B1
Автор: PARK, HEE JAE
Принадлежит: FOUNDATION FOR RESEARCH AND BUSINESS, SEOUL NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY

The present invention discloses an arbitrary temperature distribution control apparatus for a plate heater. The arbitrary temperature distribution control apparatus for a plate heater includes: a plate heater having a plurality of sides; a plurality of electrodes installed to edges of the sides to spaced apart from each other by an interval; a plurality of electrode driving units electrically connected to the electrodes to output one of three-phase electric signals in response to a temperature distribution control signal applied thereto; and a control unit for outputting the temperature control signal controlled according to at least one selected from an area to be heated by the plate heater and a heating temperature. According to the present invention, the temperature distribution of one plane heater may be arbitrarily set such that a heat distribution of the heating distribution of a home or industrial heater is arbitrarily set, thereby greatly saving energy. In addition, the possibility ...

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Номер записи: 62
24-08-2016 дата публикации

METHOD AND APPARATUS TO MEASURE THICKNESS USING COLOR CAMERA

Номер: KR101650319B1
Автор: KIM, KWANG RAK, KWON, SOON YANG, KIM, JAE HO, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a method to measure a thickness using a color camera, comprising: a filtering step, a light intensity obtaining step, a scanning step, and a graph computing step. The filtering step is provided to filter a plurality of wavelengths within a plurality of wavelength bands of the light emitted from a white light source using an acoustic-optic modulation filter. The light intensity obtaining step is provided to simultaneously obtain light intensity signals of a plurality of wavelengths within a plurality of wavelength bands using the color camera. The scanning step is provided to scan a predefined length of a wavelength within the respective wavelength band, while repeating the filtering step and the light intensity obtaining step, to obtain a plurality of light intensity signals within the respective wavelength band. The graph computing step is provided to produce a reflectivity graph regarding an entire spectrum by synthesizing a plurality of light intensity ...

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Номер записи: 63
01-04-2016 дата публикации

APPARATUS AND METHOD FOR PREALIGNING

Номер: KR101607852B1
Автор: LEE, MYUNG SUN, MUN, JEONG IL, KIM, DO HUN, OH, MI HYUN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus and a method for prealigning. The apparatus of the present invention, in an apparatus for prealigning a base material to be aligned which comprises a first side, and a second side facing the first side vertically, comprises: a holding unit placed on the bottom of the base material to be aligned to hold the base material to be aligned; a pressurizing unit to pressurize the first side or the second side in a direction to be closer; an elevating means to elevate the holding unit to elevate the first side or the second side; and a control unit to align the base material to be aligned by letting the pressurizing unit pressurize the first side or the second side when the holding unit, where the first side is held, rises, and letting the pressurizing unit pressurize the first side or the second side when the holding unit, where the second side is held, rises. Accordingly, the present invention allows control of prealigning work to hold the center to ...

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Номер записи: 64
19-04-2016 дата публикации

APPARATUS TO DEPOSIT MONOMER IN VACUUM

Номер: KR1020160042267A
Автор: MUN, JEONG IL, LEE, MYUNG SUN, KIM, JUNG HWAN, KANG, MIN KI, PAHK, HEUI JAE
Принадлежит:

The present invention relates to an apparatus to deposit a monomer in a vacuum. According to the apparatus to deposit the monomer in the vacuum of the present invention, the apparatus to deposit the monomer on a substrate comprises: a vacuum chamber receiving the substrate, and arranged as a vacuum state; a base part received inside the vacuum chamber, having a wider area than the substrate, and opposing the substrate; a nozzle part disposed in a number of rows on the base part, discharging the monomer toward the substrate such that the monomer is deposited on the substrate without movement of the substrate and the base part; and a curing part including a light source part disposed outside the vacuum chamber and a light guide part disposed between the nozzle parts, and guiding an ultraviolet ray irradiated from the light source part to the substrate. According to the present invention, since the ultraviolet ray irradiated from the light source part disposed outside the vacuum chamber is ...

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Номер записи: 65
12-05-2017 дата публикации

NOZZLE OF LINEAR EVAPORATION SOURCE AND DEPOSITION DEVICE

Номер: KR1020170051682A
Автор: LEE, MYUNG SUN, YOON, SUNG WON, MUN, JEONG IL, KIM, JI HYUNG, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a nozzle of a linear evaporation source and a deposition device. According to the present invention, the nozzle of the linear evaporation source has a reflection surface which reflects a deposition material between an inlet and an outlet of the nozzle wherein the deposition material is inputted into the inlet so as to induce the deposition material to be vertically reflected toward a substrate, thereby improving usage efficiency of the deposition material and minimizing a mask shadow effect. COPYRIGHT KIPO 2017 ...

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Номер записи: 66
20-08-2015 дата публикации

SCANNING SYNCHRONIZATION METHOD IN INTERFEROMETRY

Номер: KR101545491B1
Автор: YOON, DO YOUNG, KIM, MIN SU, PARK, JONG KWAN, KIM, TAI WOOK, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a scanning synchronization method in an interferometry. It includes a vibration signal generating step, a third vibration signal generating step, a vibration step, an image trigger generation step, an applying step and a moving step. The vibration signal generating step generates a first vibration signal with a constant period, and a second vibration signal of a pulsed waveform synchronized with the first vibration signal. The vibration step vibrates the object by using the first vibration signal. The third vibration signal generating step generates a third vibration signal which is delayed with a constant phase value according to the integer time of the period of the second vibration signal. The image trigger generation step generates an image trigger signal by sampling the third vibration signal according to the pulse delayed in the third vibration signal. The applying step applies an image trigger signal to the image obtaining part to obtain the image ...

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Номер записи: 67
11-11-2010 дата публикации

VISION INSPECTION SYSTEM AND COORDINATE CONVERSION METHOD USING SAME

Номер: WO2010128759A3
Автор: Kang, Sung Bum, PAHK, Heui-Jae, AHN, Woo-Jung
Принадлежит:

The present invention relates to a vision inspection system and to a coordinate conversion method using same. The vision inspection system of the present invention comprises: a table which supports an object to be inspected; a stage which enables the table to linearly reciprocate in the Y-axis direction; a plurality of cameras spaced apart from each other along the X-axis direction to acquire images of the object to be inspected or of the table; a plurality of first marks spaced apart from each other at one end of the table along the X-axis direction and intersecting the Y-axis direction; and a plurality of second marks spaced apart from each other at one side of the table along the Y-axis direction from the leftmost first mark from among the first marks, and spaced apart from each other at the other side of the table along the Y-axis direction from the rightmost first mark from among the first marks. The vision inspection system of the present invention acquires images of the first marks ...

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Номер записи: 68
07-02-2017 дата публикации

ALIGNING APPARATUS FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE AND ALIGNING METHOD USING SAME

Номер: KR1020170013426A
Автор: LEE, MYEONG JIN, LEE, JAE JIN, JANG, JEONG HO, PAHK, HEUI JAE
Принадлежит:

The present invention relates to an aligning apparatus for manufacturing an organic light emitting diode and an aligning method using the same. The aligning apparatus for manufacturing an organic light emitting diode according to the present invention can remarkably reduce the number of aligning operations by performing control to align a substrate on a mask while holding the mask and can prevent wrinkling of the substrate by bonding a cooling plate part while supporting one side of the substrate. The aligning apparatus for manufacturing an organic light emitting diode includes a base on which the mask is fixed, a receiving unit which is prepared to receive the edge bottom part of the substrate, a measuring unit which measures the alignment state of the mask, and a control unit to align the substrate on the mask. COPYRIGHT KIPO 2017 ...

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Номер записи: 69
18-04-2018 дата публикации

SPIRAL FOLDABLE UMBRELLA

Номер: KR1020180039261A
Автор: PARK, HEE JAE
Принадлежит:

The present invention relates to a spiral foldable umbrella, where umbrella ribs are formed in a spiral shape to prevent the same from being easily damaged and can be folded while being spun to enable ready removal of water from the umbrella, thereby solving conventional problems that the ribs are easily damaged in strong wind-accompanying rain and there is a difficulty of removing water from an umbrella. The umbrella of the present invention comprises: a cap formed in a circular shape to finish the end portion of a middle rod; spiral ribs formed around a support pole of the umbrella in a spiral shape in order to prevent the same from being easily damaged; a middle rod having a cylindrical shape to be joined to a handle in order to keep balance of the umbrella pole; a handle having a cylindrical shape for helping a user easily grip the umbrella; fabric formed from cloth or a plastic material in a circular shape to have a waterproof function in order to block rainfall; and an opening/closing ...

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Номер записи: 70
17-07-2017 дата публикации

유기 전계 발광 소자 제조용 얼라인 장치 및 이를 이용한 얼라인 방법

Номер: KR0101757653B1
Автор: 이명진, 이재진, 장정호, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 유기 전계 발광 소자 제조용 얼라인 장치 및 이를 이용한 얼라인 방법에 관한 것으로서, 본 발명에 따른 유기 전계 발광 소자 제조용 얼라인 장치는 마스크를 고정시킨 상태에서 기판을 마스크에 얼라인되도록 조절하여 얼라인 횟수를 현저하게 감소시키고, 냉각 플레이트부 합착시 기판의 일 측을 지지한 상태에서 합착하여 기판의 우는 현상을 방지할 수 있는 유기 전계 발광 소자 제조용 얼라인 장치를 특징으로 한다.

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Номер записи: 71
13-10-2015 дата публикации

ATOMIC LAYER DEPOSITION APPARATUS

Номер: KR0101559629B1
Автор: 이명선, 김민갑, 문정일, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 원자층 증착장치에 관한 것으로서, 본 발명에 따른 원자층 증착장치는 이송되는 기판에 원자층을 형성하는 원자층 증착용 소스를 포함하는 원자층 증착장치에 있어서, 상기 원자층 증착용 소스는, 상기 기판이 이송방향의 정방향으로 통과하면서 제1소스가스에 노출되는 제1소스영역; 상기 제1소스영역을 통과한 상기 기판이 퍼지가스에 노출되는 제1퍼지영역; 상기 제1퍼지영역을 통과한 상기 기판이 제2소스가스에 노출되는 제2소스영역; 및, 상기 제2소스영역을 통과한 상기 기판이 퍼지가스에 노출되는 제2퍼지영역;을 포함하여, 상기 기판의 이송방향의 정방향으로 복수 개가 배열되며, 상기 기판이 역방향으로 이송시 각 영역의 배열은 상기 기판의 정방향 이송시 각 영역의 배열과 동일하도록 배열되면서, 각 영역의 해당 가스에 노출되는 기판 노출시간은 상기 정방향 이송시 각 영역의 해당 가스에 노출되는 기판 노출시간과 동일하도록 각 영역이 재배열되는 것을 특징으로 한다. 이에 의하여, 공간분할방식의 원자층 증착용 소스에서, 기판이 각 소스가스 및 퍼지가스에 노출되는 배열되는 순서 및 기판 노출시간이 기판의 이송방향의 역방향에서도 기판의 정방향 이송방향에서와 동일하도록 하여, 기판의 양방향 이송에서도 사용가능하여 공정시간을 단축시킬 수 있는 원자층 증착용 소스가 제공된다.

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Номер записи: 72
23-03-2016 дата публикации

APPARATUS AND METHOD OF CONTACTLESS PRE-ALIGNMENT

Номер: KR101605659B1
Автор: LEE, MYUNG SUN, MUN, JEONG IL, YOON, SUNG WON, SONG, KUNG JIN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an apparatus and a method of contactless pre-alignment. According to the present invention, the contactless pre-alignment apparatus acquires an image of an alignment object substrate, which is seated in a loader unit, while the alignment object substrate is transported to the inside of a chamber from the loader unit, determines a location of the alignment object substrate based on the loader unit by using the acquired image, and performs a pre-alignment process by moving a holder unit according to the determined location of the alignment object substrate during a loading procedure. A pre-alignment process can be conducted to a large substrate without damage. COPYRIGHT KIPO 2016 ...

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Номер записи: 73
26-10-2016 дата публикации

증착용 자성체 검사장치

Номер: KR0101669335B1
Автор: 이형배, 이명진, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 증착용 자성체 검사장치에 관한 것으로서, 본 발명에 따른 증착용 자성체 검사장치는 증착 공정에서 기판과 마스크의 정렬시 이용되는 자성체를 검사하는 장치에 있어서, 금속 소재로 소정의 패턴이 형성되는 마스크; 상기 마스크의 상면에 정렬되는 기판; 상기 마스크와 정렬된 상기 기판의 상면이 접촉하여 임시 고정되며, 내부에 상기 자성체가 상하방향으로 이동 가능하게 수용되는 고정부; 상기 마스크의 하방에 배치되며, 상기 자성체와 상기 마스크 간의 거리에 따른 자속밀도와 패턴의 처짐현상 중 적어도 어느 하나를 측정하는 검사부;를 포함하는 것을 특징으로 한다. 이에 의하여, 상향식 증착환경과 동일한 환경에서 기판과 마스크가 정렬시 이용되는 자성체를 검사하되, 검사시 발생할 수 있는 진동이 최소화되도록 함으로써, 정밀하며 신뢰성이 높은 자성체 검사결과를 얻을 수 있는 증착용 자성체 검사장치가 제공된다.

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Номер записи: 74
16-06-2015 дата публикации

EVAPORATION CONTAINER FOR IMPROVING EVAPORATION UNIFORMITY

Номер: KR101528709B1
Автор: MUN, JEONG IL, LEE, MYUNG SUN, AHN, JAE HYUNG, YOON, SUNG WON, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to an evaporation container for improving evaporation uniformity capable of increasing evaporation uniformity by preventing clogging and temperature deviation in the length direction of an organic crucible. According to the present invention, the evaporation container for improving evaporation uniformity comprises: a nozzle unit having a plurality of nozzles provided in a length direction; an accommodation unit accommodating an organic matter therein and arranged to be apart from the nozzle unit to form a heating space in which an organic matter is evaporated or sublimated between the nozzle unit and the accommodation unit; and a connection unit interposed between the nozzle unit and the accommodation unit to deteriorate the heat transfer between the nozzle unit and the accommodation unit, connecting the nozzle unit and the accommodation unit, and finishing the heating space from the outside. COPYRIGHT KIPO 2015 ...

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Номер записи: 75
14-09-2017 дата публикации

광학측정장치의 데이터 평가장치 및 데이터 평가방법

Номер: KR0101777290B1
Автор: 김태욱, 이준혁, 박희재
Принадлежит: 에스엔유 프리시젼 주식회사

... 본 발명은 측정부재가 겐트리에서 움직이면서 정반에 안착된 대상물을 측정하는 광학측정장치에서 대상물의 측정에 따른 측정데이터를 평가하여 측정데이터의 품질 신뢰성을 확보할 수 있도록 하는 광학측정장치의 데이터 평가장치 및 데이터 평가방법에 관한 것이다. 이를 위해 광학측정장치의 데이터 평가방법은 측정구간에 대하여 측정부재에서 전달되는 측정데이터와, 정반에 남아있는 잔여진동이 측정데이터에 연계하여 저장되는 데이터저장부와, 데이터저장부에 저장되는 측정데이터를 비교하는 데이터비교부와, 데이터저장부에 저장되는 측정데이터 중 데이터비교부를 통해 비교된 측정데이터가 오차범위를 벗어나는 경우, 오차범위를 벗어난 측정데이터에 연계하여 데이터저장부에 저장된 잔여진동을 데이터저장부에 저장된 다른 잔여진동과 비교하거나, 오차범위를 벗어난 측정데이터에 연계하여 데이터저장부에 저장된 잔여진동을 기설정된 기준진동과 비교하는 진동비교부 및 진동비교부를 거쳐 정반에서 발생되는 잔여진동이 오차범위를 벗어나는 경우, 측정데이터의 오류 정보를 표시하는 오류알림부를 포함한다.

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Номер записи: 76
20-07-2017 дата публикации

DATA EVALUATION DEVICE AND DATA EVALUATION METHOD FOR OPTICAL MEASUREMENT APPARATUS

Номер: WO2017122850A1
Автор: KIM, Tae Wook, LEE, Jun Hyeok, PAHK, Heui Jae
Принадлежит:

The present invention relates to a data evaluation device and a data evaluation method for an optical measurement apparatus, the device and the method being capable of ensuring quality reliability for measurement data by evaluating measurement data according to the measurement of an object by the optical measurement apparatus having a measurement member, which measures the object loaded on a surface plate while moving on a gantry. To this end, the data evaluation method for the optical measurement apparatus comprises: a data storage unit for storing measurement data transferred from the measurement member with respect to a measurement section, and residual vibration remaining on the surface plate and being linked to the measurement data; a data comparison unit for comparing the measurement data stored in the data storage unit; a vibration comparison unit for comparing the residual vibration, stored in the data storage unit and being linked to the measurement data exceeding an error range ...

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Номер записи: 77
15-06-2015 дата публикации

VACUUM DEPOSITION APPARATUS CAPABLE OF ADJUSTING SPRAY FLUID FLOW

Номер: KR101528685B1
Автор: MUN, JEONG IL, KIM, JUNG HWAN, KANG, MIN KI, LEE, MYUNG SUN, PAHK, HEUI JAE
Принадлежит: SNU PRECISION CO., LTD.

The present invention relates to a vacuum deposition apparatus capable of adjusting spray fluid flow wherein an amount of fluid in a certain range can be sprayed by controlling a flow rate of the fluid coming into a nozzle part. The vacuum deposition apparatus capable of adjusting spray fluid flow comprises: a fluid supply part to supply vaporized fluid; a source part including a flow part to receive fluid having a present flow rate, pressure, or higher from the fluid supply part, and a nozzle part connected to the flow part to receive the fluid, spraying the fluid having the preset flow rate, pressure, or higher toward a substrate; a supply flow channel connecting the fluid supply part to the source part having the vaporized fluid flowing therein; a discharge flow channel connected to the source part to discharge the fluid inside the source part; a valve part to open and close either or both of the supply flow channel and the discharge flow channel; a sensor part installed in the supply ...

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Номер записи: 78
14-10-2010 дата публикации

IMAGE-CENTERING METHOD

Номер: KR2010117176A2
Автор: HWANG, Young-Min, PAHK, Heui-Jae, LEE, Chang-Yeol, HYUN, Chang-Hong
Принадлежит:

The present invention relates to an image-centering method, and more particularly, to an image centering method comprising: a registration step of registering an inspection subject as a model image by photographing the inspection subject with an optical system with a first magnifying power and setting a position of an inspection region to be searched in a photographed image of the first magnifying power; a photographing step of photographing the inspection subject with an optical system with a second magnifying power higher than the first magnifying power according to a predetermined order to obtain a target image; a reduction step of reducing the target image obtained from the photographing step to the size of that of image of the first magnifying power to register the target image as an inspection image; a matching step of searching for the inspection image in the model image; and, when the inspection image is found through the matching step, a centering step of moving the optical system ...

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Номер записи: 79
25-09-2014 дата публикации

THREE-DIMENSIONAL SHAPE MEASURING DEVICE CAPABLE OF MEASURING COLOR INFORMATION

Номер: WO2014148781A1
Автор: Jo, Tae yong, Hwang, Young min, Kim, Seong ryong, Kang, Sang soo, Pahk, Heui jae
Принадлежит:

The present invention relates to a three-dimensional shape measuring device capable of measuring color information. The three-dimensional shape measuring device capable of measuring color information according to the present invention, which measures the shape of an object being measured by using an interferometer, comprises: a light source for emitting light; a light divider for reflecting the light emitted by the light source or transmitting light reflected by the object being measured; a lens unit for focusing the light reflected by the light divider on the object being measured; a light detection unit for detecting the light reflected by the object being measured; and a light adjustment unit, disposed on a light path between the light source and the light divider, for shielding light emitted from the central area of the light source to thereby weaken the interference of light generated in the lens unit.

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Номер записи: 80
12-07-2016 дата публикации

IMAGE STABILIZATION DEVICE FOR CAMERA

Номер: KR101638628B1
Автор: PARK, HEE JAE, LEE, CHI BUM
Принадлежит: FOUNDATION FOR RESEARCH AND BUSINESS, SEOUL NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY

The present invention discloses an image stabilization device for a camera. The device comprises: a gyro sensor which detects 3D vibration transferred via a support member surrounding a camera unit, and outputs an electric signal; a motion control unit which generates a motion control signal by using a predetermined control algorithm in response to the electric signal; a plurality of vibration compensation units which are installed to be origin-symmetrical with respect to a center of the camera unit, generate repulsive force or attractive force corresponding to the motion control signal, and generate differential displacements compensating for the 3D vibration; and a flexible structure which is disposed between the camera unit and the support member, and flexibly guides the camera unit through motion in response to the differential displacements. The camera unit performs pitch or yaw movement in response to the differential displacements and the guiding, thereby canceling the 3D vibration ...

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Номер записи: 81
03-02-2016 дата публикации

METHOD TO INSPECT DEFECT OF PATTERN

Номер: KR1020160012319A
Автор: HWANG, YOUNG MIN, KIM, SANG YUN, BAE, JEONG BONG, PAHK, HEUI JAE
Принадлежит:

The present invention relates to a method to inspect a defect of a pattern, which is to easily inspect a defect formed on a substrate using a master image wherein a master substrate is photographed multiple times by an optical system and combined. The method to inspect the defect of a pattern comprises: a preparation step of preparing the master substrate wherein defect does not exist; a registration step of photographing different areas in the master substrate multiple times to combine photographed images and registering the photographed images as the master image; a photographing step of photographing an inspection area which is expected that there is a defect in a substrate to be inspected, at a same ratio as the master image by an optical system and registering the photographed image as an inspection image; and a matching step of searching the defect in the inspection area by matching the master image to the inspection image. COPYRIGHT KIPO 2016 (AA) Start (BB) End (S110) Preparing ...

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Номер записи: 82