SILICON INGOT HAVING UNIFORM MULTIPLE DOPANTS AND METHOD AND APPARATUS FOR PRODUCING SAME

19-02-2014 дата публикации

Номер:

EP2697412A2

Автор: JOHNSON, Bayard K., DELUCA, John P., LUTER, William L.

Принадлежит: GT Advanced CZ LLC

Контакты:

Номер заявки: 09-19-1277.4

Дата заявки: 13-04-2012

CPC - классификация

C C3 C30 C30B C30B1 C30B15 C30B15/C30B15/0 C30B15/00 C30B15/002 C30B15/04 C30B15/1 C30B15/12 C30B15/2 C30B15/20 C30B2 C30B29 C30B29/C30B29/0 C30B29/06 H H0 H01 H01L H01L3 H01L31 H01L31/H01L31/1 H01L31/18 H01L31/182 H1 H10 H10F H10F1 H10F19 H10F19/H10F19/0 H10F19/00 H10F7 H10F71 H10F71/H10F71/1 H10F71/12 H10F71/122 H10F71/1221 Y Y0 Y02 Y02E Y02E1 Y02E10 Y02E10/Y02E10/5 Y02E10/52 Y02E10/54 Y02E10/546 Y02P Y02P7 Y02P70 Y02P70/Y02P70/5 Y02P70/50 Y1 Y10 Y10T Y10T1 Y10T11 Y10T117 Y10T117/Y10T117/1 Y10T117/10 Y10T117/105 Y10T117/1052 Y10T117/1056

IPC - классификация

C C3 C30 C30B C30B1 C30B15 C30B15/C30B15/0 C30B15/04 C30B15/2 C30B15/20 C30B2 C30B29 C30B29/C30B29/0 C30B29/06 H H0 H01 H01L H01L3 H01L31 H01L31/H01L31/0 H01L31/04 H01L31/042