17-09-2015 дата публикации
Номер: US20150262853A1
Принадлежит:
A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed. 1. A wafer container , comprising:a housing having a room with an opening formed therein, and a door frame surrounding the opening;a door fitting in the door frame to close the opening; andan air-tight device disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room, wherein the protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.2. The wafer container as claimed in claim 1 , wherein the early-stage pressure-adjusting element includes at least one selected from the group consisting of a concave claim 1 , a through-hole claim 1 , a seam claim 1 , a tunnel claim 1 , a groove and any combination thereof.3. The wafer container as claimed in claim 1 , further comprising:an exhaust valve disposed on the housing, and configured to exhaust the first gas from the room.4. The wafer container as claimed in claim 1 , further comprising:a pumping valve disposed on the housing, and configured to pump the second gas into the room.5. The wafer container as claimed in claim 4 , wherein the second gas includes one selected from the group consisting of nitrogen claim 4 , an inert gas and a clean dry air.6. The wafer container as claimed in claim 1 , wherein the protruding part comprises a first protruding portion having a first ...
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