28-11-2019 дата публикации
Номер: US20190363108A1
Принадлежит:
A high-performance semiconductor device is provided. The semiconductor device includes a transistor, an insulating film over the transistor, an electrode, and a metal oxide over the insulating film. The transistor includes a first gate electrode, a first gate insulating film over the first gate electrode, an oxide over the first gate insulating film, a source electrode and a drain electrode electrically connected to the oxide, a second gate insulating film over the oxide, and a second gate electrode over the second gate insulating film. The electrode includes a region in contact with the insulating film. The first gate insulating film is in contact with the insulating film. The thicknesses of the insulating film over the second gate electrode, the insulating film over the source electrode, and the insulating film over the drain electrode are substantially the same, and the insulating film includes excess oxygen. 1. A semiconductor device comprising:a transistor;an insulating film over the transistor;an electrode; anda metal oxide over the insulating film, a first gate electrode;', 'a first gate insulating film over the first gate electrode;', 'an oxide over the first gate insulating film;', 'a source electrode and a drain electrode electrically connected to the oxide;', 'a second gate insulating film over the oxide; and', 'a second gate electrode over the second gate insulating film,, 'wherein the transistor compriseswherein the electrode reaches the source electrode or the drain electrode through the metal oxide and the insulating film,wherein the electrode comprises a region in contact with the insulating film,wherein the first gate insulating film is in contact with the insulating film,wherein the insulating film comprises a first region overlapping the second gate electrode, a second region overlapping the source electrode, and a third region overlapping the drain electrode,wherein thickness of the first region, thickness of the second region and thickness of ...
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