14-09-2011 дата публикации
Номер: CN0102181922A
Автор:
RENG WANG,
XIANGYANG LI,
XINGCHAO LIN,
LIPING ZHANG,
KEFENG ZHANG,
CUILING JIAO,
YE LU,
XIUHUA SHAO,
RONG LU,
WANG RENG,
LI XIANGYANG,
LIN XINGCHAO,
ZHANG LIPING,
ZHANG KEFENG,
JIAO CUILING,
LU YE,
SHAO XIUHUA,
LU RONG
Принадлежит:
The patient discloses a quartz container used for isothermal crystal vapor phase epitaxy process, which consists of a quartz plug, a quartz box and quartz rings made of 99.99999% of high-purity quartz material. The quartz is a cylindrical hollow polishing opening plug with conical degree and the conical lower part, the quartz box has a cylindrical cup-shaped structure, raw material for crystal growing is arranged at the bottom of the quartz box, the quartz rings are arranged on the raw material, a substrate for the crystal growing is arranged on the quartz ring, and if a plurality of substrates exist, the substrates are separated by the quartz rings, then stacked and put into the quartz box, and the quartz plug plugs and seals the opening of the quartz box. According to the quartz container, the problem of the Hg loss of HgCdTe in the isothermal crystal vapor phase epitaxy can be solved, so that the uniformity of the material can be improved and the expitaxy area of the material can be ...
Подробнее