28-06-2018 дата публикации
Номер: KR1020180071872A
Принадлежит:
The present invention relates to a MEMS piezoelectric sensor, and more particularly, to a MEMS piezoelectric sensor having a self-power generation function, an energy storage device using the MEMS piezoelectric sensor, and a manufacturing method thereof. The MEMS piezoelectric sensor according to the present invention is advantageous in that a manufacturing process is easy and a manufacturing method of an upper electrode layer and a lower electrode layer as well as a piezoelectric thin film layer is improved in order to increase the energy harvesting efficiency. In addition, since the piezoelectric thin film layer and the electrode layer are manufactured by the ink jet printing technique, the manufacturing process is simple, and expensive deposition equipment is not required, so that the MEMS piezoelectric sensor can be manufactured at a low manufacturing cost. As a material of the electrode layer, a nano ink including nano particles such as Ag, Au, Ti, Pt, Al, Ga, In, Sn, Re, W, Cr, Mo ...
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