04-06-2020 дата публикации
Номер: WO2020108076A1
Принадлежит:
A transfer apparatus (1, 1a, 1b, 1c, 1d) and transfer method for micro-elements (3, 3a, 3b), wherein the transfer apparatus (1, 1a, 1b, 1c, 1d) comprises: a transfer substrate (10, 10a, 10b, 10c, 10d), comprising a first surface (100, 100a, 100b, 100c, 100d) and second surface (102, 102a, 102b, 102c, 102d) that are arranged facing away from one another, said first surface (100, 100a, 100b, 100c, 100d) of the transfer substrate (10, 10a, 10b, 10c, 10d) being provided with a plurality of first blind holes (104, 104a, 104b, 104c, 104d); and a control assembly (14), which separately controls the temperature of a gas inside of each of the first blind holes (104, 104a, 104b, 104c, 104d), and thereby controls the first blind holes (104, 104a, 104b, 104c, 104d) to suction or release a selected micro-element (3, 3a, 3b). The present transfer apparatus (1, 1a, 1b, 1c, 1d) of the micro-elements may implement batch transfer of the micro-elements (3, 3a, 3b), and may further implement separate operation ...
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