22-03-2012 дата публикации
Номер: US20120069311A1
Автор:
A reflector structure suitable for extreme ultraviolet lithography (EUVL) is provided. The structure comprises a substrate having a multi-layer reflector. A capping layer is formed over the multi-layer reflector to prevent oxidation. In an embodiment, the capping layer is formed of an inert oxide, such as AlO, HfO, ZrO, TaO, YO-stabilized ZrO, or the like. The capping layer may be formed by reactive sputtering in an oxygen environment, by non-reactive sputtering wherein the materials are sputtered directly from the respective oxide targets, by non-reactive sputtering of the metallic layer followed by full or partial oxidation (e.g., by natural oxidation, by oxidation in oxygen-containing plasmas, by oxidation in ozone (O), or the like), by atomic level deposition (e.g., ALCVD), or the like. 1. A reflective mask comprising:a substrate formed of a low-thermal expansion material (LTEM);a multi-layer reflector of alternating layers of molybdenum and silicon formed on the substrate; anda capping layer formed in direct contact onto the multi-layer reflector, the capping layer comprising a single layer of an oxide that is chemically inert in an oxidizing environment, said layer of oxide selected from the group consisting of HfO2, Y2O3-stabilized ZrO2, and combinations thereof, the substrate, the multi-layer reflector, and the capping layer forming the reflective mask.2. The reflective mask of claim 1 , wherein the substrate comprises ultra-low expansion (ULE) glass.3. The reflective mask of claim 1 , wherein each pair of alternating layers of molybdenum and silicon is about 6.8 nm in thickness.4. The reflective mask of claim 1 , wherein the capping layer is about 1 nm to about 5 nm in thickness.5. The reflective mask of claim 4 , wherein the substrate comprises ultra-low expansion (ULE) glass.6. The reflective mask of claim 1 , wherein said substrate has a top surface and said multi-layer reflector is formed over and in contact with said top surface.7. A method of forming ...
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