METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT

29-01-2015 дата публикации

Номер:

US20150028972A1

Автор: Peter F. Vandermeulen

Принадлежит: Individual

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/5 C23C16/51 C23C16/511 C23C16/513 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/0 H01J2237/05 H01J2237/057 H01J2237/08 H01J2237/081 H01J2237/0817 H01J2237/3 H01J2237/33 H01J2237/332 H01J2237/3323 H01J3 H01J37 H01J37/H01J37/0 H01J37/05 H01J37/08 H01J37/3 H01J37/32 H01J37/321 H01J37/3219 H01J37/32192 H01J37/322 H01J37/3220 H01J37/32201 H01J37/3222 H01J37/32229 H01J37/324 H01J37/3244 H01J37/326 H01J37/3266 H01J37/32669 H01P H01P3 H01P3/H01P3/1 H01P3/12 H01P3/127 H01Q H01Q2 H01Q21 H01Q21/H01Q21/0 H01Q21/00 H01Q21/004 H01Q21/0043

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/5 C23C16/50 C23C16/507 C23C16/51 C23C16/511 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/0 H01J37/05

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