18-07-2019 дата публикации
Номер: US20190219925A1
Автор:
Qi Jiang,
Hua Ren,
Xin Jiang,
Eungkyu Kim,
JIANG QI,
REN HUA,
JIANG XIN,
KIM EUNGKYU,
Jiang, Qi,
Ren, Hua,
Jiang, Xin,
Kim, Eungkyu
Принадлежит:
Solvents useful for removing, among other things, photoresists and poly(amic acid)/polyimide from display/semiconductor substrates or electronic processing equipment, consist essentially of: (A) a first component consisting of at least one of dimethyl sulfoxide (DMSO) and N-formyl morpholine, and (B) a second component consisting of at least one of N,N-dimethyl propionamide, 3-methoxy-N,N-dimethyl propanamide, N,N-dimethyl acetoacetamide and N-methyl-ε-caprolactam. 1. A solvent consisting essentially of:(A) a first component consisting of at least one of dimethyl sulfoxide (DMSO) and N-formyl morpholine, and(B) a second component consisting of at least one of N,N-dimethyl propionamide, 3-methoxy-N,N-dimethyl propanamide, N,N-dimethyl acetoacetamide and N-methyl-ε-caprolactam.2. The solvent of consisting essentially of claim 1 , based on the weight of the solvent claim 1 , from 1 to 70 wt % of the first component and from 30 to 99 wt % of the second component.3. The solvent of in which the first component is N-formyl morpholine and the second component consists of at least one of N claim 2 ,N-dimethyl propionamide or 3-methoxy-N claim 2 ,N-propanamide.4. The solvent of in which the second component is N claim 3 ,N-dimethyl propionamide.5. The solvent of in which the second component is 3-methoxy-N claim 3 ,N-propanamide.6. The solvent of consisting essentially of claim 1 , based on the weight of the solvent claim 1 , from 1 to 60 wt % of the first component and from 40 to 99 wt % of the second component.7. The solvent of in which the first component is DMSO and the second component consists of at least one of N claim 6 ,N-dimethyl propionamide or 3-methoxy-N claim 6 ,N-propanamide.8. The solvent of in which the second component is N claim 7 ,N-dimethyl propionamide.9. The solvent of in which the second component is 3-methoxy-N claim 7 ,N-propanamide.10. The solvent of consisting essentially of claim 1 , based on the weight of the solvent claim 1 , from 40 to 70 wt % ...
Подробнее