24-06-2021 дата публикации
Номер: US20210191264A1
An object of the invention is to provide a cured film which is high in sensitivity, capable of forming a pattern in a low-taper shape after development, capable of the change in pattern opening width between before and after thermal curing, an excellent in light-blocking property, and a negative photosensitive resin composition that forms the film. The negative photosensitive resin composition contains an (A) alkali-soluble resin, a (C1) photo initiator, and a (Da) black colorant, where the (A) alkali-soluble resin contains a (A1) first resin including one or more selected from the group consisting of a (A1-1) polyimide, a (A1-2) polyimide precursor, a (A1-3) polybenzoxazole, and a (A1-4) polybenzoxazole precursor, and has a structural unit having a fluorine atom at a specific ratio, and the (C1) photo initiator contains an (C1-1) oxime ester-based photo initiator that has a specific structure. 2. The negative photosensitive resin composition according to claim 1 ,wherein the (Da) black colorant contains a (D1a) black pigment, andthe (D1a) black pigment contains, as a (D1a-1) black organic pigment, one or more selected from the group consisting of a (Da-1a) benzofuranone-based black pigment, a (Da-1b) perylene-based black pigment, and an (D1a-1c) azo-based black pigment.3. The negative photosensitive resin composition according to claim 2 ,wherein the (D1a-1) black organic pigment contains a (D1a-1a) benzofuranone-based black pigment.4. The negative photosensitive resin composition according to claim 1 ,wherein the (Da) black colorant contains a (D1a) black pigment,the (D1a) black pigment contains, as (D1a-3) coloring pigment mixture of two or more colors, a (D1a-3a) coloring pigment mixture including a blue pigment, a red pigment, and a yellow pigment, a (D1a-3b) coloring pigment mixture including a purple pigment and a yellow pigment, a (D1a-3c) coloring pigment mixture including a blue pigment, a red pigment, and an orange pigment, or a (D1a-3d) coloring pigment ...
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