Scanning single electron transistor microscope for imaging ambient temperature objects

Scanning single electron transistor microscope for imaging ambient temperature objects

A system, method, and computer program product are provided for scanning objects such as computer chips. A near-field scanning Single Electron Transistor (SET) is used to detect features of the object. In particular, the SET detects variations in an electric field surrounding or emanating from the object. The variation in the field may be associated with an irregularity in the object, such as an open in the circuitry of a chip. In the case of a chip or a multi-chip module, a voltage is applied to the line containing the suspected open. If an actual open is present, the open will be manifested in an irregularity in the electric field associated with the line. The SET detects the irregularity in the field. For the SET to operate, a sufficiently cold operating temperature is maintained for the SET. A very low (cryogenic) temperature allows the use of a larger, more sensitive SET. Scanning SETs are known in the literature, but in such systems the object to be scanned must also be at cryogenic ...