19-06-2014 дата публикации
Номер: US20140169729A1
Принадлежит:
Provided are a waveguide with a reduced phase error and a photonics device including the same. The waveguide structure may include a lower clad, a core pattern with at least one bending region, on the lower clad, a beam deflecting pattern on the core pattern, and an upper clad covering the core pattern provided with the beam deflecting pattern. The beam deflecting pattern may be formed of a material, whose refractive index may be higher than that of the upper clad and may be lower than or equivalent to that of the core pattern, and the beam deflecting pattern has an increasing and decreasing width or an oscillating width, when measured along the bending region. 1. A waveguide structure , comprising:a lower clad;a core pattern with at least one bending region, on the lower clad;a beam deflecting pattern on the core pattern; andan upper clad covering the core pattern provided with the beam deflecting pattern,wherein the beam deflecting pattern is formed of a material, whose refractive index is higher than that of the upper clad and is lower than or equivalent to that of the core pattern, andthe beam deflecting pattern has an increasing and decreasing width or an oscillating width, when measured along the bending region.2. The waveguide structure of claim 1 , wherein the core pattern is formed of silicon claim 1 , the upper clad is formed of silicon oxide claim 1 , and the beam deflecting pattern is formed of silicon nitride.3. The waveguide structure of claim 2 , wherein the beam deflecting pattern is formed to have a thickness ranging from 100 nm to 400 nm.4. The waveguide structure of claim 1 , wherein the beam deflecting pattern is formed on the bending region to expose partially a top surface of the core pattern.5. The waveguide structure of claim 1 , wherein the beam deflecting pattern comprises at least one portion that is provided on the bending region and is tapered toward an outer sidewall of the core pattern.6. The waveguide structure of claim 5 , wherein ...
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