30-01-2014 дата публикации
Номер: US20140030881A1
A positive photoresist composition including a novolac resin, a photo active compound (PAC), a melamine crosslinking agent, and a solvent. 1. A positive photoresist composition , comprising:a novolac resin,a photo active compound,a melamine crosslinking agent, anda solvent.2. The positive photoresist composition of claim 1 , wherein the photo active compound comprises 1 claim 1 ,2-naphthoquinonediazide-5-sulfonate.3. The positive photoresist composition of claim 2 , wherein the photo active compound is a product of condensing a quinone diazide sulfonic acid chloride comprising 1 claim 2 ,2-benzoquinone diazide-4-sulfonic acid chloride and 1 claim 2 ,2-napthoquinone diazide-5-sulfonic acid chloride with a phenol compound comprising 2 claim 2 ,3 claim 2 ,4-trihydroxybenzophenone and 2 claim 2 ,2′ claim 2 ,4 claim 2 ,4′-tetrahydroxybenzophenone.4. The positive photoresist composition of claim 1 , wherein the novolac resin includes a high molecular weight portion claim 1 , a medium molecular weight portion and a low molecular weight portion claim 1 , andwherein an amount of at least one of the medium molecular weight portion or the low molecular weight portion of the novolac resin is reduced compared to an amount of a medium molecular weight portion or the low molecular weight portion in a same novolac resin not treated by a solvent.5. The positive photoresist composition of claim 1 , wherein the novolac resin comprises at least one structural unit of ortho-cresol claim 1 , meta-cresol claim 1 , para-cresol claim 1 , 2 claim 1 ,3-dimethylphenol claim 1 , 3 claim 1 ,4-dimethylphenol claim 1 , 3 claim 1 ,5-dimethylphenol claim 1 , 2 claim 1 ,4-dimethylphenol claim 1 , 2 claim 1 ,6 claim 1 ,6-trimethylphenol claim 1 , 2-methylresorcinol claim 1 , 4-methylresorcinol claim 1 , 5-methylresorcinol claim 1 , 3-propylphenol claim 1 , 4-propylphenol claim 1 , 2-isopropylphenol claim 1 , or 2-methoxy-5-methylphenol.6. The positive photoresist composition of claim 5 , wherein the ...
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