04-11-2021 дата публикации
Номер: US20210343861A1
Принадлежит:
A semiconductor arrangement includes a first well formed to a first depth and a first width in a substrate and a second well formed to a second depth and a second width in the substrate. The first well is formed in the second well, the first depth is greater than the second depth, and the second width is greater than the first width. A source region is formed in the second well and a drain region is formed in the substrate. 1. A method of forming a semiconductor arrangement , comprising:forming a first well to a first depth and a first width in a substrate; and the second well surrounds the first well,', 'the first depth is greater than the second depth, and', 'the second width is greater than the first width., 'forming a second well to a second depth and a second width in the substrate, wherein2. The method of claim 1 , wherein the first depth is at least 0.1 micrometers greater than the second depth.3. The method of claim 1 , comprising:driving dopants of the first well from the first depth in the substrate to a third depth in the substrate by subjecting the substrate to a dopant drive-in condition.4. The method of claim 3 , wherein the dopant drive-in condition comprises a temperature within a range of 900° Celsius to 1000° Celsius.5. The method of claim 1 , comprising: forming the first well comprises forming the first well to a third depth in the substrate, and', 'the third depth is a depth of an upper surface of the buried oxide layer., 'forming a buried oxide layer in the substrate, wherein6. The method of claim 1 , comprising:forming a first conductive region in the second well; andforming a second conductive region in the substrate.7. The method of claim 6 , wherein:forming the first conductive region comprises doping the substrate with a first dopant type, andthe first dopant type is a different dopant type than a dopant type of the second well.8. The method of claim 1 , comprising:forming a first conductive region within the second well and to a first ...
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