25-02-2021 дата публикации
Номер: US20210057320A1
Автор:
Fu-Yang Chen,
Chun-Hsien Chien,
Cheng-Hui Wu,
Wei-Ti Lin,
CHEN FU-YANG,
CHIEN CHUN-HSIEN,
WU CHENG-HUI,
LIN WEI-TI,
Chen, Fu-Yang,
Chien, Chun-Hsien,
Wu, Cheng-Hui,
Lin, Wei-Ti
Принадлежит:
A method of preparing a package structure is provided, which includes providing a carrier plate including a supporting layer, a first release layer, and a first metal layer; forming a first dielectric layer over the first metal layer, the first dielectric layer having a plurality of holes, each of the holes having an end portion substantially coplanar with each other at a same plane; forming a plurality of conductive protrusions filling the holes, each of the conductive protrusions having a first end and a second end opposite thereto; forming a circuit layer structure including at least one circuit layer and at least one second dielectric layer, the circuit layer being connected to the second end, the second dielectric layer being disposed over the circuit layer; removing the carrier plate; and removing a portion of the first dielectric layer to expose the conductive protrusions. A package structure is also provided. 1. A method of preparing a package structure , comprising:providing a carrier plate, the carrier plate including a support layer, a first metal layer, and a first release layer disposed between the support layer and the first metal layer;forming a first dielectric layer over the first metal layer, the first dielectric layer having a plurality of holes, wherein each of the holes adjacent to the first metal layer has an end portion, and each of the end portions is substantially coplanar with each other at a same plane;forming a plurality of conductive protrusions, each of the conductive protrusions filling each of the holes, each of the conductive protrusions having a first end and a second end opposite thereto, wherein each of the first ends corresponds to each of the end portions;forming a circuit layer structure over the first dielectric layer and each of the conductive protrusions, wherein the circuit layer structure comprises at least one circuit layer and at least one second dielectric layer, and the circuit layer is connected to the second end of ...
Подробнее