25-05-2018 дата публикации
Номер: KR1020180055340A
Принадлежит:
The present invention relates to a high resolution positive photosensitive resin composition. More specifically, the present invention relates to a positive photosensitive resin composition which can be applied to devices accompanied with processes of wet-etching a display, a semiconductor, an MEMS, an E-paper or the like and is particularly suitably used in a large area high resolution display such as a TFT-LCD, an OLED or an O-TFT since the positive photosensitive resin composition is excellent in sensitivity, resolution, pattern profile, PED margin and the like, is excellent in heat resistance and repulsive force with respect to penetration of an etchant particularly due to a lipophilic bulky chromophore structure of the composition, and has excellent wet etching adhesive force, heat resistance and distribution by applying, to the composition, a photoacid generator facilitating control of acid diffusion rate due to an acid structure including a long alkyl chain. The positive photosensitive ...
Подробнее