SOLENOID KLEINVENTIL.

FADENSPANNER.

DEVICE FOR ISOLATING THREADS.

MECHANISM FOR THE SEPARATION OF THE LAMELLAS WITH A KETTFADENWAECHTER.

To clamp thread introduction head for a braid contriving device and procedure around a braid.

Coupling member, fluid-device connecting jig, and fluid-device connecting structure

A fluid-device connecting structure includes a first fluid device having a first connection part, a second fluid device having a second connection part, an annular seal member to connect the first and second connection parts, and a coupling member to keep the first and second connection parts in a connected state. The coupling member includes a first coupling segment and a second coupling segment, each including at one end a first hinge part or a second hinge part. The first and second connection parts each have a cylindrical outer shape. The first coupling segment has a U-like shape having an opening and surrounds the first and second connection parts over a range more than 180 degrees of an entire circumference of each of the first and second connection parts.

Levitation unit with a tilting function and levitation device

A rocking substrate 31 provided with a porous unit 41 is supported by a platform 21 by means of a spherical bearing. Furthermore, air is provided between the platform 21 and the rocking substrate 31 to allow the rocking substrate 31 and the porous unit 41 to rock along a spherical surface. This rocking allows the top surface 12a of an improved levitation unit 12 to tilt freely. When a wavy glass substrate is placed on the levitation device, the top surface 12a of the improved levitation unit 12 tilts, tracing the tilt of the substrate. Jetting air out in this state levitates the substrate, with its top surface 12a in the horizontal state, and allows the levitational force to be reliably applied to the substrate.

Electromagnetic actuator

A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.

Electromagnetic valve

Fluid device mounting structure

A fluid device mounting structure is provided for installing a plurality of fluid devices on a support assembly. The support assembly includes a support member for supporting connecting portions of the fluid devices by the support assembly, so that the fluid devices are freely disposed in three dimensions.

Electrical actuator

An electric actuator includes a motion conversion mechanism and a position detector. The motion conversion mechanism converts rotation of a rotary shaft of a motor into linear motion of an output shaft. The position detector detects a permanent magnet M, which moves integrally with the output shaft. A motor control portion controls the motor based on commands from a host command unit. A control program for controlling the motor includes, as control modes, six fluid pressure cylinder modes, according to which the motor is controlled. Specifically, each of the control modes corresponds to one of the cases where the fluid pressure cylinder is controlled by three solenoid valves, or a two-position single solenoid valve, a two-position double solenoid valve, and a three-position double solenoid valve. The motor is controlled according to the selected control mode.

FOUR-WAY VALVE, VALVE UNIT, TEMPERATURE CONTROL SYSTEM

A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

Verteiler

Teile einer ersten Kopplung und einer zweiten Kopplung, die aus Verteilerblöcken herausragen, haben jeweils die Form eines länglichen Rohrs. Wenn die erste Kopplung und die zweite Kopplung in axialer Richtung betrachtet werden, stimmt die Querrichtung der ersten Kopplung und der zweiten Kopplung jeweils mit der Anordnungsrichtung von Verteilerblöcken überein. Ein Teil des Rohreinfügelochs ist ein Loch mit kleinem Durchmesser, das ein stadionförmiges Loch ist. Wenn die erste Kopplung und die zweite Kopplung in axialer Richtung betrachtet werden, stimmt die Querrichtung des Lochs mit kleinem Durchmesser mit der Querrichtung der ersten Kopplung und der zweiten Kopplung überein.

DREIDIMENSIONALE MESSVORRICHTUNG

Es wird eine dreidimensionale Messvorrichtung bereitgestellt, die ausgelegt ist, um eine Verringerung der Messgenauigkeit einer dreidimensionalen Messung zu verringern. Ein Substratuntersuchungseinrichtung 1 umfasst eine Projektionsvorrichtung 4 zum Projizieren eines Streifenmusters auf eine Platine 2; eine Kamera 5 zum Aufnehmen eines Bildes eines projizierten Teils, in dem das Streifenmuster auf die Platine 2 projiziert wird; und eine Steuerungsvorrichtung 6 zum Ausführen verschiedener Steuerungen in der Substratuntersuchungseinrichtung 1. Die Projektionsvorrichtung 4 umfasst zum Beispiel eine Lichtquelle 4a zum Aussenden eines vorgegebenen Lichts; und ein DMD 4b zum Umwandeln des von der Lichtquelle 4a ausgesendeten Lichts in ein Streifenmuster. Die Projektionsvorrichtung 4 ist ausgelegt, um das Streifenmuster mit einer vorgegebenen Anzahl von Einzelbildern pro Zeiteinheit auf die Platine 2 zu projizieren. Die Steuerungsvorrichtung 6 ist ausgelegt, um eine Vollschwarzmuster-Projektionszeitspanne ...

GAS FLOW MONITORING METHOD AND GAS FLOW MONITORING APPARATUS

In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

Three-dimensional measurement device

A three-dimensional measurement device includes: a projector that includes: a light source that emits predetermined light; and a reflective optical modulator that converts the predetermined light into a predetermined striped pattern, wherein the projector projects the predetermined striped pattern onto a measurement object at a predetermined number of frames per unit time; an imaging device that takes an image of the measurement object projected with the predetermined striped pattern; a processor that: controls the projector and the imaging device to sequentially project a plurality of different ones of the predetermined striped pattern and take images of the plurality of different ones of the predetermined striped pattern to obtain a plurality of image data having different light intensity distributions; and executes three-dimensional measurement of the measurement object based on the plurality of image data.

VORRICHTUNG ZUR DREIDIMENSIONALEN MESSUNG UND VERFAHREN ZUR DREIDIMENSIONALEN MESSUNG

Es werden eine Vorrichtung zur dreidimensionalen Messung und ein Verfahren zur dreidimensionalen Messung bereitgestellt, die Hochgeschwindigkeitsmessung in der Verarbeitung zum Ausführen dreidimensionaler Messung unter Verwendung eines Phasenverschiebungsverfahrens erreichen. Eine Substratinspektionsvorrichtung 1 beinhaltet eine Beleuchtungsvorrichtung 4, die konfiguriert ist, um eine Leiterplatine 2 schräg nach unten mit einem vorbestimmten Lichtmuster zu bestrahlen; eine Kamera 5, die konfiguriert ist, um ein Bild eines Abschnitts aufzunehmen, der mit dem Lichtmuster auf der Leiterplatine 2 bestrahlt wird; und eine Steuervorrichtung 6, die konfiguriert ist, um diese Vorrichtungen zu steuern. Die Steuervorrichtung 6 ist konfiguriert, um die Phase des abgestrahlten Lichtmusters auf vier unterschiedliche Arten zu verschieben und Bildgebung unter jeweiligen Lichtmusters mit unterschiedlichen Phasen auszuführen, um vier unterschiedliche Bilddaten zu erlangen. In der Verarbeitung zum Ausführen ...

Tank structure

A tank structure comprises a tank body for storing liquid and control devices for supplying or discharging the liquid to or from the tank body. The tank structure further includes an upper exterior member having a lower flat surface and a lower exterior member having an upper flat surface. The tank body includes an upper and a lower flat surfaces facing the lower flat surface of the upper exterior member and the upper flat surface of the lower exterior member. The tank body is held in sandwiched between the upper and lower exterior members.

Combined valve

A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supply to an operation port. When the handle is in the safety mechanism release position and the valve mechanism is even in a valve open state, the valve mechanism can be forcibly brought to a valve closed state by rotating the handle to a safety mechanism set position. Further, when the handle is in the safety mechanism set position, the valve mechanism can always be kept in the valve closed state irrespective of air supply to the operation port.

Electromagnetic valve

An electromagnetic valve has a solenoid, which includes a coil, a plunger, a fixed core, and a plunger spring. The fixed core is E-shaped and has a base, a first outer leg, a second outer leg, and a central leg. The first outer leg, the second outer leg, and the central leg extend from the base. The first outer leg has a first outer attraction surface configured to attract the plunger. The second outer leg has a second outer attraction surface configured to attract the plunger. The central leg has a central attraction surface configured to attract the plunger. The central attraction surface is larger in area than each of the first and second outer attraction surfaces.

VORTEX FLOWMETER

In this vortex flowmeter provided with a vortex generator and a flow rate measuring unit the flow rate measurement unit includes a piezoelectric element and a piezoelectric element case. The piezoelectric element case includes: a fitted part fitted in the body case; a pressure receiving part protruding out from a distal end face of the fitted part and placed in a body passage; a hollow portion formed along the axial direction of the piezoelectric element case in the fitted part to separate the fitted part and the pressure receiving part; and a slit formed inside of the pressure receiving part and configured to accommodate the piezoelectric element. 1. A vortex flowmeter comprising: a body case including a body passage; a vortex generator placed in the body passage; and a flow rate measuring unit placed downstream of the vortex generator and configured to detect a Karman vortex generated by the vortex generator to measure a flow rate , 'a piezoelectric element and a piezoelectric element case, and', 'wherein the flow rate measuring unit comprises a fitted part fitted in the body case;', 'a pressure receiving part protruding out from a distal end face of the fitted part, the distal end face being located close to the body passage, so that the pressure receiving part is placed inside the body passage;', 'a hollow portion formed in the fitted part along an axial direction of the piezoelectric element case to separate the fitted part and the pressure receiving part from each other; and', 'a slit provided inside the pressure receiving part and configured to accommodate the piezoelectric element., 'the piezoelectric element case comprises2. The vortex flowmeter according to claim 1 , whereinthe body case includes an insertion hole in which the flow rate measuring unit is inserted,the vortex flowmeter includes a seal member mounted to seal between the body case and the flow rate measuring unit, andthe hollow portion is located more radially inside than a mounting position ...

Valve

Electromagnetic valve

Manual valve

A manual valve comprises a valve element, a rod connected to the valve element, and a knob for moving the rod by screw feeding in an opening/closing direction with respect to the valve element. The valve element is moved by rotation of the knob through the rod. The rod includes an external thread portion on an outer periphery thereof and is not connected to the knob and is held against rotation. Further, the manual valve includes a cylindrical sliding nut rotatably held by a body and formed with an internal thread portion to be engaged with the external thread portion of the rod on its inner periphery and a clip fixed to the knob to be elastically deformably engaged with the sliding nut but disengaged when a larger torque than the predetermined value is applied.

Fluid mixing system and fluid mixing apparatus

A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

KOMPONENTENBESTÜCKUNGSSYSTEM UND KLEBEMITTELUNTERSUCHUNGSVORRICHTUNG

Electromagnetic valve

MULTI-LAYER DIAPHRAGM

This invention provides a multi-layer diaphragm which is for use in fluid devices and has excellent maintainability in addition to both operability and pressure resistance. This multi-layer diaphragm is provided with a first and second plate and with an elastic adhesive layer which binds together the first and second metal plates. The elastic adhesive layer has an elastic layer that is elastic in a direction which offsets the first and second metal plates from one another in the in-plane direction. The multi-layer diaphragm is provided with a metal mounting plate which, provided in a position allowing protrusion beyond the first and second metal plates in the outer edge direction, has a mounting unit for mounting to the fluid device. 1. A multi-layer diaphragm to be attached to a fluid device , comprising:a plurality of metallic plate materials;an adhesion layer adhering the plurality of metallic plate materials to each other; andthe adhesion layer including an elastic layer, the elastic layer possessing elasticity in a direction for displacing the plurality of metallic plate materials relative to each other in an in-plane direction thereof.2. The multi-layer diaphragm according to claim 1 , further comprising:a metallic attachment plate material; andthe attachment plate material having an attachment portion configured to be attached to the fluid device, the attachment portion formed in such a manner as to project outward from an outer edge of the plurality of metallic plate materials.3. The multi-layer diaphragm according to claim 2 , wherein the metallic plate materials are adhered respectively to either side of the attachment plate material.4. The multi-layer diaphragm according to claim 3 , wherein an equal number of the plurality of metallic plate materials is attached to each side of the attachment plate material.5. The multi-layer diaphragm according to claim 2 , wherein the attachment portion includes a positioning portion that regulates a positional ...

Inspection device and PTP packaging machine

An inspection device for inspecting an inspection object of a PTP sheet including a pocket portion formed in a container film, and a cover film mounted to the container film to close the pocket portion, or a portion of a PTP film forming the PTP sheet, includes: an irradiator that irradiates the inspection object with a predetermined light; an imaging device that takes an inspection image of the irradiated inspection object and a peripheral portion of the inspection object; and a processor that: determines whether the inspection object is defective or non-defective based on inspection image data of the inspection object taken from the inspection image. The inspection image data includes data of respective pixels corresponding to an inspection target area subjected to the defective/non-defective determination, and data of respective pixels corresponding to a non-inspection target area that excludes the inspection target area.

Measurement device

A measurement device includes: an optical system that splits incident light into two lights to emit one light as measurement light to a measurement object and the other light as reference light to a reference surface, and recombines the two lights to emit combined light; a light emitter that emits light entering the optical system; an imaging system that takes an image of output light emitted from the optical system; and a processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein the processor: obtains complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area based on the interference fringe image.

Coupling apparatus for chemical fluid flow channel

A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.

Three-dimensional measuring device

A three-dimensional measuring device includes an irradiation device configured to irradiate and switch among a multiplicity of light patterns having different periods and having a striped light intensity distribution on at least a measurement object, a camera having an imaging element capable of imaging reflected light from the measurement object irradiated by the light pattern, a rack configured to cause relative change in positional relationship between the imaging element and the measurement object, and a control device configured to perform three-dimensional measurements based on image data imaged by the camera. The control device performs the three-dimensional measurements by performing a phase shift method calculation of height data as a first height data for each pixel unit of image data based on a multiply phase-shifted image data obtained by irradiating on a first position a multiply phase-shifted first light pattern having a first period.

Substrate inspection device and component mounting device

Electromagnetic valve

An electromagnetic valve includes a valve casing, which has a valve hole, a spool valve in the valve hole, first and second output ports each communicating with the valve hole, first and second pressure introduction holes, which respectively communicate with the first and second output ports, first and second pressure sensors, which is respectively fitted in the first and second pressure introduction holes, sealing members, which are arranged between the respective pressure sensors and the pressure introduction holes, first and second substrates, on which the corresponding first and second pressure sensors are mounted, and a housing, which accommodates the first and second substrates, has the first and second pressure introduction holes, and is attached to the valve casing. The first and second substrates are arranged to be opposed to each other in a state of being upright in a direction perpendicular to the movement direction of the spool valve.

Gas supply unit

To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve.

Fluid control valve

A fluid control valve comprises a diaphragm formed of a plurality of circular thin metal plates laminated one on another, the diaphragm being placed to be movable into or out of contact with a valve seat for closing and opening the valve. Each thin metal plate has a warp in a predetermined direction due to rolling anisotropy, and the thin metal plates are laminated with the directions of respective warps coinciding with one another in such a manner that variations in lift amount of the diaphragm are decreased.

Diaphragm Valve

The present invention is made to prevent stress concentration on or around a boundary between a valve element body and a web portion of a diaphragm even in controlling supply of high-pressure fluid, thereby improving durability of the diaphragm. A diaphragm valve 1 of the present invention comprises a diaphragm valve element 20 including a valve element body 21 movable into contact with a valve seat 13, a web portion 22 extending outward from the valve element body 21, and a fixed portion 23 formed at an outer peripheral edge of the web portion 22. The web portion 22 includes a vertical portion 22a vertically formed continuous with the valve element body 21, a horizontal portion 22c horizontally formed continuous with the fixed portion 23, and a connecting portion 22b of a circular arc shape (an upward protruding shape) in section to connect the vertical portion 22a with the horizontal portion 22c, thereby holding the vertical portion 22a in constant contact with an outer surface of a backup ...

LIQUID CHEMICAL DISCHARGE VALVE AND LIQUID CHEMICAL SUPPLY SYSTEM

A liquid chemical discharge valve which includes a diaphragm valve having a contact portion for varying that varies a flow condition between the liquid chemical supply port and the liquid chemical discharge port by manipulating a lift amount, which is a distance between the contact portion and one of the liquid chemical supply port and the liquid chemical discharge port, between a closed valve condition and a maximum lift amount. The liquid chemical discharge valve includes an actuator unit for driving the contact portion in accordance with a supply pressure of the operating gas supplied from the operating gas supply port, to thereby manipulate the lift amount. The actuator unit includes a lift amount limiting unit for limiting the maximum lift amount adjustably. 1. A liquid chemical discharge valve for supplying a liquid chemical onto a rotating wafer , comprising:a valve main body having a valve chamber formed with a liquid chemical supply port to which the liquid chemical is supplied and a liquid chemical discharge port through which the liquid chemical is discharged;a diaphragm valve having a contact portion for varying a flow condition between the liquid chemical supply port and the liquid chemical discharge port by manipulating a lift amount, which is a distance between the contact portion and one of the liquid chemical supply port and the liquid chemical discharge port, between a closed valve condition and a maximum lift amount;an operating gas supply unit having a first proportional control valve capable of continuously adjusting a first opening in order to manipulate a supply amount of an operating gas, a second proportional control valve capable of continuously adjusting a second opening in order to manipulate a discharge amount of the operating gas, and an operating gas supply port connected to an intermediate flow passage that connects the first proportional control valve to the second proportional control valve; andan actuator unit for driving the ...

FLUID CONTROL VALVE

A fluid control valve comprises a ferromagnetic material portion that is formed on the spool so as to extend in the axial direction of the spool, permanent magnets that are arranged opposite each other having the middle portion therebetween in a direction orthogonal to the axial direction of the spool, form between themselves oppositely oriented magnetic fields aligned in the axial direction, and which are formed to be longer than the middle portion in the axial direction of the spool, and a coil that is arranged in a direction orthogonal to the axial direction of the spool with respect to the permanent magnets and generates a magnetic field that penetrates the opposing permanent magnets due to the conduction of electricity.

Seal structure for connection sections and seal member used for the same

A seal structure for connection sections, which facilitates installation and removal of a seal member from the connection sections. The seal member is placed in the connection sections between a first part and a second part. A first groove-ridge section is formed at the connection section of the first part, and a second groove-ridge section is formed at the connection section of the second part. The seal member has, on one face, a first fitting section fitting to the first groove-ridge section, and also has, on the other face, a second fitting section fitting to the second groove-ridge section. Press-fitting interferences in the wall-thickness direction are provided at the first and second fitting sections. The seal member has an extended section protruding radially outward from an annular body section where the first and second fitting sections are provided. The extended section protrudes to a position outside the connection sections of the first and second parts.

Inspection device, PTP packaging machine and PTP sheet manufacturing method

An inspection device includes: an irradiator that irradiates an object with near-infrared light; a spectroscope that has a slit where reflected light enters and that disperses the reflected light into wavelength component lights; an imaging device that comprises an imaging element that takes a spectroscopic image of the wavelength component lights; and a processor that: obtains spectral data based on the spectroscopic image; and detects a type of the object using a predetermined analysis based on the spectral data. Each of the wavelength component lights is a single wavelength light, the inspection device satisfies L≥2P, where L is a width of each of the wavelength component lights in a wavelength dispersion direction on a light receiving surface of the imaging element and P is a width of a pixel in the wavelength dispersion direction on the light receiving surface.

Thermal flow sensor

A laminated filter is fit in a passage space formed in a body. The laminated filter is made of a mesh plate including a mesh part, a first blocking plate including a blocking part, a second blocking plate including a blocking part, and a third blocking plate including a blocking part which are arbitrarily combined and layered. Accordingly, a three-layered mesh part is placed between a main passage and a sensor passage and a blocking wall is constructed of the three blocking parts.

Assembling structure of actuator part of fluid control valve, and fluid control valve formed with the structure

In an assembling structure of an actuator part of a chemical liquid valve, a cover is formed with a protrusion extending in a radial direction of a valve element, and a cylinder is formed with an engagement part engageable with the protrusion. A cover is placed to hold a spring in a compressed state in the cylinder and make a cap part cover an opening of the cylinder. The protrusion and the engagement part are engaged with each other to integrally connect the cylinder and the cover without separating from each other.

Spool valve

A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.

FLUID CONTROL VALVE

A fluid control valve includes a resin valve body formed with first and second passages, a resin valve upper part connected to an upper surface of the valve body, and a resin diaphragm valve element held between the valve body and the valve upper part. 1. A fluid control valve including: a resin valve body formed with a first passage and a second passage; a resin valve upper part connected to an upper surface of the valve body; and a resin diaphragm valve element held between the valve body and the valve upper part ,whereinthe valve body is internally formed with a valve hole through which the first passage and the second passage are communicated with each other,the first passage includes a port communication passage of a cylindrical shape having one end communicating with a port provided in the valve body and a valve-hole communication passage of a cylindrical shape having one end communicating with the valve hole, the port communication passage and the valve-hole communication passage being communicated with each other at a predetermined angle, anda part of the valve body forming a connecting part on an internal corner side between the port communication passage and the valve-hole communication passage is formed with a curved surface having a taper shape.2. The fluid control valve according to claim 1 , wherein the tapered curved surface is formed by a cutting tool that takes a conical rotation track. This application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2011-018108, filed Jan. 31, 2011, the entire contents of which are incorporated herein by reference.The present invention relates to a fluid control valve including a resin valve body having a first passage and a second passage, a resin valve upper part connected to an upper surface of the valve body, and a resin diaphragm valve element held between the valve body and valve upper part.As this type of technique, heretofore, there is a fluid control valve ...

Vacuum control valve and vacuum control system

The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.

THREE-DIMENSIONAL MEASUREMENT APPARATUS AND THREE-DIMENSIONAL MEASUREMENT METHOD

A three-dimensional measurement apparatus measures measurement targets placed in a target measurement area on a measurement object. The apparatus includes: a measurement module that: is positioned with respect to the target measurement area, and includes: a first irradiator that irradiates the target measurement area with predetermined light for height measurement; a second irradiator that irradiates the target measurement area with predetermined patterned light for three-dimensional measurement; and an imaging device that takes an image of the target measurement area; and a control device that moves the measurement module in a height direction and successively positions the measurement module at a predetermined height position determined by mapping, and performs, based on image data taken by irradiating the target measurement area with predetermined patterned light, three-dimensional measurement to the measurement targets at the predetermined height position.

Pulse shot type flow controller and pulse shot type flow controlling method

A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve ( 12 ) and, after that, opening/closing operation of a second cutoff valve ( 17 )) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve ( 17 ) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity ( 13 ) measure by a pressure sensor ( 14 ). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve ( 17 ) per unit time.

SUBSTRATE FOREIGN MATTER INSPECTION DEVICE AND SUBSTRATE FOREIGN MATTER INSPECTION METHOD

A substrate foreign matter inspection device includes: an image data obtaining device that obtains image data of a target inspection area in the printed circuit board including a printed portion of the solder paste; a storage that stores a neural network and a model, the model being generated by learning of the neural network that includes an encoding portion and a decoding portion by using, as learning data, only image data of the target inspection area that do not include any foreign matter; and a control device that obtains reconfigured image data by inputting original image data obtained by the image data obtaining device into the model, compares the original image data with the reconfigured image data, and determines whether any foreign matter is present or absent on the printed circuit board based on a result of comparison with the reconfigured image data.

Inspection device, PTP packaging machine and calibration method of inspection device

An inspection device includes: an illumination device that irradiates standard and inspection objects with near-infrared light; a spectroscope that disperses reflected light; an imaging device that takes images of first and second optical spectrums of the reflected light dispersed by the spectroscope to obtain standard spectroscopic image data and inspection spectroscopic image data; and a processor. The processor executes a predetermined arithmetic operation with regard to at least one of (i) each pixel row of the standard spectroscopic image data perpendicular to a wavelength dispersion direction and (ii) each pixel column of the standard spectroscopic image data parallel to the wavelength dispersion direction. The processor, based on luminance values of pixels belonging to the pixel row or column, determines a characteristic of the pixel row and grasps a wavelength sensitivity characteristic of the imaging element under the near-infrared light emitted from the illumination device.

Vorrichtung zur dreidimensionalen Messung

Chemical liquid valve

A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm includes an engagement part whose top end is formed in semispherical shape, which is inserted and engaged in a recess of the piston rod so that the engagement part of the diaphragm comes into point contact with an inner wall of the recess of the piston rod. Thus, the piston rod swingably holds the diaphragm.

Flow rate control device

A flow rate control device comprises a regulator that adjusts the pressure of a fluid to be supplied, a plurality of narrowed pathways arranged in parallel on the downstream side of the regulator, and an open/close section that switches a predetermined narrowed pathway amongst the plurality of narrowed pathways between an open position and a closed position. One of the pathways can be an open narrowed pathway arranged on the downstream side of the regulator and another can be an opened/closed narrowed pathway arranged downstream of the regulator in parallel with the open narrowed pathway. In this case, the open/close section that switches the opened/closed narrowed pathway between as open position and a closed position.

ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.

Open/close valve

Three-dimensional measurement device

A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.

INSPECTION DEVICE, PACKAGING SHEET MANUFACTURING DEVICE, AND PACKAGING SHEET MANUFACTURING METHOD

An inspection device includes: X-ray irradiators that irradiates, with a predetermined X-ray from a first film-side, inspection ranges that respectively correspond to positions of packaging sheets to be separated from the packaging film; an imaging device that is disposed on a second film-side and opposed to the X-ray irradiators across the packaging film, that comprises an X-ray detector comprising detection elements arrayed along the film width direction and detecting the X-ray transmitted through the packaging film, and that successively outputs X-ray transmission image data obtained every time the packaging film is conveyed by a predetermined amount; and a controller that inspects the packaging sheet based on the X-ray transmission image data obtained by the imaging device, 1. An inspection device used in manufacturing a packaging film in a belt-like form , wherein the packaging film comprises a first film made of an opaque material and a second film made of an opaque material attached to each other; and a tablet disposed in a space between the first film and the second film , the inspection device comprising:a plurality of X-ray irradiators that irradiates, with a predetermined X-ray from a first film-side, a plurality of inspection ranges that respectively correspond to positions of packaging sheets arranged in a film width direction and to be separated from the packaging film;an imaging device that is disposed on a second film-side and opposed to the plurality of X-ray irradiators across the packaging film, that comprises an X-ray detector comprising a plurality of detection elements arrayed along the film width direction and detecting the X-ray transmitted through the packaging film, and that successively outputs X-ray transmission image data obtained every time the packaging film is conveyed by a predetermined amount; anda controller that inspects the packaging sheet based on the X-ray transmission image data obtained by the imaging device, whereina non- ...

EUV LIGHT SOURCE APPARATUS

A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Seal structure, fluid device, integrated valve, and sealing member

A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side. When the sealing member 510 is fitted in the seal holding part 120 while the engagement portion 515 is pressed, the sealing member 510 is ...

Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid

A liquid supply apparatus is to supply a polishing liquid from a polishing supply source onto a polishing surface of a polishing table at a predetermined flow rate. The liquid supply apparatus according to the present invention includes at least one supply tube for retaining the liquid supplied from the liquid supply source, an electropneumatic regulator for supplying a pressurized gas from a gas source to the supply tube, and a pipe having no narrow portion for controlling a flow rate of the liquid. The supply tube is vertically disposed. The pressurized gas supply mechanism is operable to supply the pressurized gas to the supply tube so as to supply the liquid, filling the supply tube, to the polishing surface of the polishing table via the pipe and a polishing liquid supply pipe.

Connected part seal structure, and seal member

In a connected-part seal structure configured to couple a first connected part and a second connected part through a seal member, the taper angles of first and second inner pressure-contact tapered parts provided in the seal member are smaller than the taper angles of first and second inner tapered parts provided in the first and second connected parts. Thus, a pressure-contact force of first and second inside tapered pressure-contact allowances are larger as the inside tapered pressure-contact allowances are located closer to base end parts of first and second annular protrusions.

Butterfly valve

A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy.

Vorrichtung zur dreidimensionalen Messung

Vorrichtung (10) zur dreidimensionalen Messung mit:- einem Bestrahlungsmittel (14), das dazu geeignet ist, ein Messobjekt mit mehreren Lichtmustern unterschiedlicher Leuchtdichte zu bestrahlen, wobei jedes der mehreren Lichtmuster eine streifenförmige Lichtstärkenverteilung entlang einer Transportrichtung des Messobjekts besitzt, und das dazu geeignet ist, zwischen den mehreren Lichtmustern umzuschalten;- einem Abbildungsmittel (15), das ein von dem Messobjekt reflektiertes Licht abbildet und Bilddaten, die wenigstens Leuchtdichtewerte enthalten, ausgibt, wobei jedes von mehreren Pixeln in den Bilddaten einen Leuchtdichtewert besitzt;- einem Bilddaten-Ermittlungsmittel, das immer dann, wenn das Messobjekt (1) um einen vorbestimmten Betrag transportiert worden ist, für jedes der mehreren Lichtmuster einen Datensatz aus den während der Bestrahlung mit dem jeweiligen Lichtmuster ausgegebenen Bilddaten bildet;- einem Bestimmungsmittel, das aus den Bilddaten bestimmt, ob sich jeder der Leuchtdichtewerte ...

Dreidimensionale Messvorrichtung

Es wird eine dreidimensionale Messvorrichtung bereitgestellt, die eine dreidimensionale Messung durch ein Phasenverschiebungsverfahren mit der höheren Genauigkeit in der kürzeren Zeitdauer ermöglicht. Ein Substratuntersuchungsapparat 1 enthält zwei Beleuchtungsvorrichtungen 4A und 4B, die konfiguriert sind, um eine Leiterplatte 2 mit vorgegebenen Lichtmustern zu bestrahlen, eine Kamera 5, die konfiguriert ist, um Bilder von bestrahlten Teilen, die mit den Lichtmustern bestrahlt werden, aufzunehmen, und eine Steuerungsvorrichtung 6, die konfiguriert ist, um verschiedene Bildbearbeitungen und arithmetische Bearbeitungen, und dergleichen durchzuführen. Der Substratuntersuchungsapparat 1 ist konfiguriert, um einen ersten Bildgebungsprozess unter einem ersten Lichtmuster der ersten Beleuchtungsvorrichtung 4A durchzuführen und anschließend einen zweiten Bildgebungsprozess unter einem zweiten Lichtmuster der zweiten Beleuchtungsvorrichtung 4B durchzuführen, und zwar ohne auf eine Vervollständigung ...

Vorrichtung zur dreidimensionalen Messung

Es wird eine Vorrichtung zur dreidimensionalen Messung bereitgestellt, die die Messgenauigkeit und die Messungseffizienz verbessert. Die Vorrichtung 1 zur dreidimensionalen Messung gewinnt mehrere Sätze von Intensitäts-Bilddaten an einer vorbestimmten Position in Richtung einer optischen Achse bezüglich jeder Koordinatenposition in einem vorbestimmten Messgebiet auf einem Werkstück W auf der Grundlage von durch Abbilden durch Abbildungssysteme 4A und 4B gewonnenen Interferenzstreifenbild. Die mehreren Sätze der Intensitäts-Bilddaten werden an vorbestimmten Messbereichsintervallen gewonnen. Die Vorrichtung 1 zur dreidimensionalen Messung bestimmt danach eine Fokussierungsposition in Richtung der optischen Achse bezüglich der Koordinatenposition auf der Grundlage der mehreren Sätze der Intensitäts-Bilddaten und spezifiziert eine Ordnung, die der Fokussierungsposition in Richtung der optischen Achse entspricht, als eine Ordnung bezüglich der Koordinatenposition. Die Vorrichtung 1 zur dreidimensionalen ...

Prüfvorrichtung, Blisterverpackungsmaschine, und Verfahren zum Herstellen einer Blisterverpackung

Es wird bereitgestellt: eine Prüfvorrichtung, die konfiguriert ist, um einen Formungsfehler eines Seitenabschnitts eines Taschenabschnitts mit hoher Genauigkeit zu erfassen, eine Blisterverpackungsmaschine und ein Verfahren zum Herstellen einer Blisterverpackung. Eine Taschenabschnitt-Prüfvorrichtung 21 weist auf: eine Beleuchtungsvorrichtung 50, die konfiguriert ist, um eine Behälterfolie 3 mit darin ausgebildeten Taschenabschnitten 2 mit einer vorgegebenen elektromagnetischen Welle zu bestrahlen; und eine Kamera 51, die auf einer entgegengesetzten Seite der Beleuchtungsvorrichtung 50 über der Behälterfolie 3 vorgesehen ist und konfiguriert ist, um zumindest die elektromagnetische Welle abzubilden, die einen Bodenabschnitt des Taschenabschnitts 2 passiert, und um Bilddaten zu erhalten. Die Taschenabschnitt-Prüfvorrichtung 21 ist konfiguriert, um ein Schattierungsmuster, das in dem Bodenabschnitt des Taschenabschnitts 2 durch Bestrahlung mit der elektromagnetischen Welle erzeugt wird, basierend ...

Board inspection apparatus

A board inspection apparatus includes an irradiation unit, an imaging unit, and an image processing unit. The image processing unit includes a three-dimensional measurement unit configured to perform three-dimensional measurement of the surfaces of the solder and the resist film by a certain three-dimensional measurement method based on the image data, a virtual standard surface setting unit configured to set a virtual standard surface corresponding to a contacting surface of a certain component mounted in a certain area of the printed board, a protrusion amount calculation unit configured to calculate a protrusion amount from the virtual standard surface for each solder printed and formed in the certain area, and a determination unit configured to determine whether the printed state of the solder passes or fails based on each of the protrusion amounts of the solder.

Vacuum valve and vacuum pressure control system using the same

A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

Device for measuring three dimensional shape

A device for measuring three dimensional shape includes a first irradiation unit, a first grating control unit, a second irradiation unit, a second grating control unit, an imaging unit, and an image processing unit. After performance of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said first light pattern of multiply varied phases, a second imaging operation is performed as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said second light pattern of multiply varied phases. After completion of the first imaging operation and the second imaging operation, shifting or switching operation of the first grating and the second grating is performed simultaneously.

Fluidsteuergeräteeinheit

Fluidsteuergeräteeinheit enthaltend als Baugruppen: einen Fluidsteuergeräteblock mit einem Anschlussblockhauptteil, der als ein Polyeder ausgestaltet ist, einem Fluiddurchgang, der sich durch den Anschlussblockhauptteil erstreckt, und Anschlussabschnitten, wobei der Anschlussblockhauptteil ein Fluidsteuergerät enthält, wobei der Fluiddurchgang Öffnungen besitzt, die jeweils an einer von zwei gegenüberliegenden Seiten entlang der Erstreckungsrichtung des Fluiddurchgangs angeordnet sind, und wobei jeder Anschlussabschnitt an einer der Seiten mit einer der Öffnungen vorgesehen ist; einen Verbindungsblock mit einem Verbindungsblockhauptteil, der als ein Polyeder ausgestaltet ist, und einen Kommunikationsdurchgang, der sich durch den Verbindungsblockhauptteil erstreckt, und Anschlussabschnitten, wobei der Kommunikationsdurchgang Öffnungen an wenigstens zwei Seiten des Verbindungsblocks besitzt, wobei die Anschlussabschnitte der Baugruppen miteinander über Kopplungsmittel gekoppelt sind, wobei ...

Three dimensional measuring device

Vacuum control system and vacuum control method

A vacuum control system using a vacuum pump to control a vacuum pressure and a flow of a processing gas in a vacuum chamber. The vacuum control system includes: a plurality of vacuum control valves, each of the valves being connected between each of a plurality of gas discharge ports and the vacuum pump; a pressure measurement unit configured to measure the vacuum pressure of the processing gas supplied to the object; and a controller configured to manipulate respective openings of the valves in accordance with the measured vacuum pressure.

INSPECTION DEVICE, PTP PACKAGING MACHINE AND INSPECTION METHOD

An inspection device performs an inspection in manufacture of a Press Through Package (PTP) sheet, and includes: an illumination device; a spectroscope that disperses reflected light from the PTP sheet; an imaging device that takes an image of an optical spectrum of the disperses light and acquires spectroscopic image data; and a controller. Before the inspection is performed, the controller grasps disturbance data that is one of either spectral data of a predetermined content placed in the pocket portion and attributed to ambient light, or approximate spectral data approximate to the spectral data of the predetermined content attributed to the ambient light, and corrects either spectral data of the content as an inspection object obtained based on the spectroscopic image data acquired by the imaging device, or a reference value used for determining the spectral data of the content as the inspection object. 1. An inspection device that performs an inspection by spectral analysis in manufacture of a Press Through Package (PTP) sheet that comprises a container film including a pocket portion in which a content is placed and a cover film closing the pocket portion , the inspection device comprising:an illumination device that irradiates the PTP sheet with near-infrared light;a spectroscope that disperses reflected light from the PTP sheet irradiated with the near-infrared light;an imaging device that takes an image of an optical spectrum of the reflected light dispersed by the spectroscope and acquires spectroscopic image data; and obtains spectral data of the PTP sheet based on the spectroscopic image data,', 'executes a predetermined analysis process based on the spectral data of the PTP sheet,', 'before the inspection is performed, grasps disturbance data that is one of either spectral data of a predetermined content placed in the pocket portion and attributed to ambient light, or approximate spectral data approximate to the spectral data of the predetermined ...

Fluid control valve

Purge gas unit and purge gas supply integrated unit

To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.

Three-dimensional measurement device

A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area.

COOLING STRUCTURE FOR ELECTROMAGNETIC COIL, AND ELECTROMAGNETIC ACTUATOR

ÜBERPRÜFUNGSVORRICHTUNGS-ÜBERWACHUNGSSYSTEM

Überprüfungsvorrichtungs-Überwachungssystem zur Überwachung des Betriebszustands von einer oder mehreren Überprüfungsvorrichtungen, die aufweisen:- Überprüfungsmittel zum Ausführen bestimmter Überprüfungen bezüglich bestimmter Überprüfungsobjekte, die befördert werden und nacheinander ankommen, und- Bewertungsmittel zum Ausführen von Fehlerhaftes-/Nicht-Fehlerhaftes-Produkt-Bewertungen an den Überprüfungsobjekten auf der Grundlage von Überprüfungsinformation, die von den Überprüfungsmitteln erhalten wird, mit:- mehreren mobilen Endgeräten, die sich im Besitz von mehreren Bedienern befinden und Kommunikationsmittel aufweisen, die in der Lage sind, über eine bestimmte Kommunikationsschaltung mit einer oder mehreren Überprüfungsvorrichtungen und miteinander zu kommunizieren, wobei die Überprüfungsvorrichtung aufweist:- Temporärstoppmittel zum temporären Stoppen einer Fehlerhaftes-Produkt-Aussonderung von wenigstens einem Überprüfungsobjekt betreffend eine Fehlerhaftes-Produkt-Bewertung, wenn ...

3D-MESSGERÄT

Eine Aufgabe ist es, ein 3D-Messgerät zur Verfügung zu stellen, das eine genauere Messung in einem kürzeren Zeitraum bei dreidimensionaler Messung unter Verwendung eines Phasenverschiebungsverfahrens gewährleistet. Eine Leiterplattenprüfvorrichtung 1 beinhaltet eine Beleuchtungseinrichtung 4, die so konfiguriert ist, dass sie eine Leiterplatte 2 mit einem streifenartigen Lichtmuster bestrahlt, eine Kamera 5, die so konfiguriert ist, dass sie ein Bild eines Abschnitts aufnimmt, der mit dem Lichtmuster auf der Leiterplatte 2 bestrahlt wird, und eine Steuereinrichtung 6, die so konfiguriert ist, dass sie eine dreidimensionale Messung auf der Grundlage von aufgenommenen Bilddateien durchführt. Die Steuereinrichtung 6 berechnet einen ersten Höhenmesswert basierend auf Bilddateien, die durch Bestrahlung mit einem ersten Lichtmuster mit einer ersten Periode an einer ersten Position aufgenommen wurden, und erlangt Werte einer Verstärkung und eines Versatzes aus den Bilddateien. Die Steuereinrichtung ...

Portable compressed air feeder

一種移動式壓縮空氣供應機，具備：移動式箱，其由第1箱構件和第2箱構件組裝而構成；在第1箱構件的內側劃定的第1收納室及第2收納室；壓縮機，其收納於第1收納室，構成為將壓縮空氣排出；調質設備，其收納於第2收納室，構成為對從壓縮機排出的壓縮空氣進行調質；以及面板，其安裝於第1箱構件，覆蓋第1收納室及第2收納室。在移動式箱的內側形成有在面板與第2箱構件之間劃定的內部空間，該內部空間與第1收納室連通。

Suction dampening apparatus

CHECKING TOOL FOR TUBE COUPLER

The present invention provides a checking tool for a tube coupler with which it is possible to visually check an attachment state of the tube coupler. A checking tool 10 for a tube coupler according to the present invention is a checking tool configured to be attached to a tube coupler 30, the tube coupler being formed of a first coupling piece 31 and a second coupling piece 35 hingedly connected to each other so as to be able to be opened and closed, being configured to couple tubes to each other with use of the first coupling piece and the second coupling piece, and having hook pieces 33 and 37 that are provided protruding from outer circumferential surfaces of the first coupling piece and the second coupling piece. The checking tool includes a pair of longitudinal frames 11 that conform to an outer circumferential surface of the tube coupler, a first lateral frame 12 that connects end portions at one end of the pair of longitudinal frames to each other, a second lateral frame 16 that ...

Component mounting system and adhesive inspection device

A component mounting system includes: a component mounting machine that mounts an electronic component having a predetermined electrode portion on a solder printed on a substrate, the electronic component being fixed to the substrate with a thermosetting adhesive; and an adhesive inspection device. The component mounting machine: sets, with regard to the electronic component to be fixed with the adhesive that cures at a temperature lower than a melting temperature of the solder, a target mounting height along a height direction perpendicular to a face of the substrate on which the adhesive is applied; and mounts the electronic component at the target mounting height. The target mounting height is: an ideal mounting height based on design data; or a height lower than the ideal mounting height by a value that corresponds to a sinking of the electronic component as a result of melting of the solder.

Fluid control valve

A fluid control valve for controlling high-temperature fluid includes: a valve body including a valve chamber communicating with first and second flow passages, and a valve seat provided in the valve chamber; a metal diaphragm that contacts with and separates from the valve seat; a stem that moves the metal diaphragm up and down; and an actuator that drives the stem. The first flow passage includes a first orifice having a diameter set to 50% or less of a diameter of the second flow passage. Alternatively, the second flow passage includes a second orifice having a diameter set to 50% or less of the diameter of the second flow passage. The diameter of the second flow passage is calculated by converting a cylindrical flow passage area defined between the valve seat and the metal diaphragm when separated from the valve seat into a diameter of a circular flow passage.

FLUID CONTROL VALVE

A regulator performing fluid control includes an annular protruding portion having a valve seat on its leading end and an annular diameter-decreasing surface formed by decreasing an inner diameter of the annular protruding portion toward a valve hole. The regulator includes a valve element provided with a contact surface to be in contact with the valve seat and a columnar step portion provided on an inner peripheral side of the valve seat protruding from the contact surface toward the valve hole, the step portion having a diameter larger than an inner diameter of the valve hole and being coaxially formed with the valve hole. An annular ridge is formed by an outer peripheral surface of the step portion intersecting an end face of the step portion on the valve-hole side with the annular diameter-decreasing surface to constitute a passage narrowing portion. 1. A fluid control valve comprising:a valve element;a valve chamber on an upstream side accommodating the valve element;a valve hole on a downstream side communicated with the valve chamber; and the annular protruding portion is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface decreasing an inner diameter of the annular protruding portion toward the valve hole,', 'the valve element includes a contact surface to be in contact with the valve seat and a columnar step portion provided coaxially with the valve hole with a large diameter larger than an inner diameter of the valve hole, the step portion protruding from the contact surface toward the valve hole on an inner peripheral side of the valve seat, and', 'an annular ridge formed by intersecting an outer peripheral surface of the step portion with an end face of the step portion on a side of the valve hole is placed in a vicinity of the annular diameter-decreasing surface to form a passage narrowing portion., 'an annular protruding portion protruding from an inner surface of the valve chamber on a side of the ...

Flow verification system and flow verification method

A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first ...

FLUID CONTROL METHOD, FLUID CONTROL SYSTEM, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING FLUID CONTROL PROGRAM

A fluid control method for maintaining a split flow ratio of main gas to be split from a main line into first and second sublines constant before and after additive gas is supplied to one of the sublines is achieved by controlling a flow rate of the main gas to be supplied from the main line to a chamber through the first and second sublines based on the pressure in each of the first and second sublines when the additive gas is to be supplied to the second subline. The pressure in the first subline not supplied with the additive gas is controlled to remain constant during supply of the additive gas to the second subline.

Electromagnetic valve

LIQUID EJECTING APPARATUS

A liquid ejecting apparatus having a storage portion () for storing a treatment liquid, a slit-shaped opening portion () for ejecting the treatment liquid, and a connecting passage () that has a slit-shaped cross-section and connects the storage portion () to the slit-shaped opening portion () includes: a valve body portion () that is provided in the storage portion () to cover the connecting passage (), and forms a gap () together with a lower wall () of the storage portion () so that the treatment liquid is caused to flow into the connecting passage () through the gap (); a first curved surface portion () that smoothly connects a surface of the lower wall () of the storage portion () to an inner wall surface () of the connecting passage (); and a second curved surface portion () that is provided on the valve body portion () so as to project to an identical side to the first curved surface portion (). With this constitution, air bubbles can be prevented from intermixing with the treatment liquid ejected from the slit-shaped opening portion (). 1. A liquid ejecting apparatus comprising:a storage portion for storing a liquid; liquid,a slit-shaped opening portion for ejecting the liquid;a connecting passage that has a slit-shaped cross-section and connects the storage portion to the slit-shaped opening portion;a flow varying member that is provided in the storage portion to cover a flow passage cross-section of the connecting passage, and forms a gap together with an inner wall of the storage portion so that the liquid is caused to flow into the connecting passage through the gap;a first curved surface portion that projects to the storage portion side and smoothly connects an inner wall surface of the storage portion to an inner wall surface of the connecting passage; anda second curved surface portion that is provided on the flow varying member to project to an identical side to the first curved surface portion and oppose the first curved surface portion.2. The ...

VALVE SEAT STRUCTURE OF FLUID CONTROL VALVE

In a valve seat structure of a fluid control valve comprising a valve element, a body formed with an inlet port and an outlet port, and a valve seat member provided in the body, the fluid control valve being configured to bring the valve element into or out of contact with the valve seat member to control the flow of a fluid, the valve seat member is formed in a ring shape and includes a valve seat portion with which the valve element will come into our out of contact. Assuming that a thickness of the valve seat portion in a radial direction of the valve seat member is a first thickness t (0 Подробнее

VACUUM CONTROL VALVE AND VACUUM CONTROL SYSTEM

The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod. 1. A vacuum control valve connected between a vacuum chamber and a vacuum pump and configured to control the vacuum pressure in the vacuum chamber by manipulating valve opening using working fluid , the vacuum control valve comprising:a control valve main body comprising a flow passage and a valve seat formed in the flow passage, the flow passage connecting the vacuum chamber and the vacuum pump;an operation unit comprising a valve body, a piston, and a rod that joins the valve body and the piston, the valve body being configured to manipulate the valve opening by adjusting a lift that is a distance between the valve body and the valve seat and to block the flow passage by contacting the valve seat;a cylinder connected to the control valve main body and housing the piston;a biasing unit configured to press the operation unit in a direction for reducing the lift; anda bellofram configured to seal a gap between an outer peripheral surface of the piston and an inner peripheral surface of the cylinder following a movement of the piston, wherein a valve opening manipulation chamber sealed by the bellofram, the valve opening manipulation chamber having a tubular shape surrounding the rod and being configured to generate a load applied to the piston in a direction for increasing ...

LIQUID VAPORIZATION SYSTEM

Provided is a liquid vaporization system capable of promoting vaporization of a liquid material while solving a problem of residual liquid material. A liquid vaporization system has a liquid vaporization apparatus having a pump and a vaporizer. The vaporizer has a case, a heater provided inside the case, a heat storage plate heated by the heater, and a mesh. The mesh is formed by interweaving wires and has an overall flat plate shape. By overlapping the mesh on an upper surface of the heat storage plate, minute irregularities are formed on the heat storage plate by the mesh. A nozzle is provided above the mesh, whereby the liquid material is dropped from the nozzle onto the heat storage plate. The liquid material spreads over the heat storage plate in a thin film and is heated and vaporized on the upper surface of the heat storage plate. 1. A liquid vaporization system comprising a vaporizer that is configured to apply heat to vaporize a liquid material ,wherein a liquid adhering surface which is formed approximately flat and to which the liquid material is adhered;', 'thin-film forming means that is configured to form the liquid material adhered to the liquid adhering surface into a thin film; and', 'heating means that is configured to heat the liquid adhering surface, and, 'the vaporizer includeswhereinthe thin-film forming means is wetting promoting means that is configured to promote wetting of the liquid adhering surface by the liquid material, and the liquid material adhered to the liquid adhering surface is formed into a thin film by promoting the wetting of the liquid adhering surface by the liquid material,the wetting promoting means is a minute irregular section provided on the liquid adhering surface to enhance wettability of the liquid adhering surface by the liquid material,the liquid adhering surface is mounted with a mesh formed by interweaving wires in an overall flat plate shape and is provided with the irregular section in which the wires ...

GAS FLOW-RATE VERIFICATION SYSTEM AND GAS FLOW-RATE VERIFICATION UNIT

A gas flow-rate verification system includes: process gas lines each being arranged to supply gas from a process gas supply source to a process chamber through a first line cutoff valve, a second line a cutoff valve, and flow control device; and a shared gas line connected in a branch form to the process gas lines to discharge gas from a shared gas supply source through the second line cutoff valve and the flow control device. The shared gas line includes a shared cutoff valve, a measuring tank, a first pressure sensor, and a pressure regulating valve. When the first line cutoff valve and the shared cutoff valve are closed, the first pressure sensor measures a pressure drop of gas in the tank to verify a flow rate of the flow control device. The pressure regulating valve feedback-controls secondary side pressure of the pressure regulating valve. 1. A gas flow-rate verification system including:a plurality of process gas lines each including a first line cutoff valve, a second line cutoff valve, and a flow control device to supply gas from a process gas supply source to a process chamber through the first line cutoff valve, the second line cutoff valve, and the flow control device; anda shared gas line connected in a branch form to the process gas lines to discharge gas from a shared gas supply source through the second line cutoff valve and the flow control device;wherein the shared gas line includes a shared cutoff valve, a measuring tank, a first pressure sensor, and a pressure regulating valve,when the first line cutoff valve and the shared cutoff valve are closed, the first pressure sensor measures a pressure drop of gas in the tank to verify a flow rate of the flow control device, andthe pressure regulating valve feedback-controls secondary side pressure of the pressure regulating valve.2. The gas flow-rate verification system according to claim 1 , further including a second pressure sensor for measuring the secondary side pressure of the pressure regulating ...

LIQUID CONTROL APPARATUS

A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface. 1. A liquid control apparatus controlling a spread of a liquid ,the apparatus comprising:a main body having a supply subject surface onto which the liquid is supplied; anda mesh form body woven into a mesh form and provided to contact the supply subject surface,wherein a heater configured to heat the supply subject surface is provided in an interior of the main body,a supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body, anda groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.2. The liquid control apparatus according to claim 1 , wherein the groove surrounds a periphery of the supply port on sides excluding a side of the heater in the expanse direction of the supply subject surface.3. The liquid control apparatus according to claim 1 , whereinan introduction port and a discharge port for a gas are provided in the main body,the introduction port is an opening for introducing the gas into a space on a periphery of the supply subject surface from the interior of the main body,the discharge port is an ...

LIQUID CONTROL APPARATUS

A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The appartus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface and a guiding member that is provided to contact an opposite side of the mesh form body to the main body side. 1. A liquid control apparatus controlling a spread of a liquid ,the apparatus comprising:a main body having a supply subject surface onto which the liquid is supplied;a mesh form body woven into a mesh form and provided to contact the supply subject surface; anda guiding member provided to contact an opposite side of the mesh form body with respect to the main body.2. The liquid control apparatus according to claim 1 , wherein the guiding member is formed by being woven into a mesh form.3. The liquid control apparatus according to claim 1 , wherein a supply port is provided in the main body to supply the liquid from an interior of the main body to a part of the supply subject surface contacted by the mesh form body.4. The liquid control apparatus according to claim 3 , wherein the mesh form body and the guiding member are provided to cover the supply port.5. The liquid control apparatus according to claim 3 , wherein a blocking member formed in a plate form or a film form is provided to cover the supply port.6. The liquid control apparatus according to claim 5 , wherein the blocking member is provided to cover only the supply port and a vicinity of the supply port.7. The liquid control apparatus according to claim 5 , whereina through hole is formed in the blocking member, andthe guiding member is inserted into the through hole.8. The liquid control apparatus according to claim 1 , whereina heater configured to heat the supply subject surface is provided in an interior of the main body, andthe guiding member extends toward the heater in an expanse direction of the supply subject surface.9. The ...

GAS FLOW MONITORING SYSTEM

A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device. 1. A gas flow monitoring system to be provided in a plurality of process gas lines each being arranged to supply gas from a process gas supply source to a predetermined process chamber via a flow control device , the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device , the system including:a first flow monitoring unit placed in a passage located upstream of the flow control device;a second flow monitoring unit placed in a discharge passage branching from a passage located upstream of the process chamber; anda controller that constantly monitors a flow rate of the flow control device with the first flow monitoring unit and that, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether the flow-rate abnormality is present or not in the flow control device.2. The gas flow monitoring system according to claim 1 , whereinthe first flow monitoring unit includes a first start cutoff valve, a first ...

DEVICE FOR MEASURING THREE DIMENSIONAL SHAPE

A device for measuring three dimensional shape includes a first height data acquisition unit for acquiring a height data specified from measurement values according to a multiplicity of light patterns related to an entirely irradiated region irradiated by all of the multiplicity of light patterns, and for using an acquired specified height data as a height data for the entirely irradiated region; a supplemental data acquisition unit for acquiring, based on the height data for the entirely irradiated region, a supplemental data relating to a partially irradiated region that is irradiated by only part of the multiplicity of light patterns; and a second height acquisition unit for specifying a fringe order of the measurement values for the partially irradiated region based on the supplemental data, and for acquiring as height data for the partially irradiated region a height data corresponding to the measurement values of the specified fringe order. 1. A device for measuring three dimensional shape comprising:a multiplicity of irradiation units, each configured to irradiate a object to be measured from a respective different position using a multiplicity of light patterns having a stripe-shaped light intensity distribution and differing pitches;an imaging unit configured to image the object to be measured irradiated by each of the light patterns; andan image processing unit configured to perform three dimensional measurement based on image data imaged by the imaging unit, wherein the image processing unit comprises:a measurement value acquisition unit configured to perform three dimensional measurement by the phase shift method based on a multiplicity of image data;a measurement value acquisition unit configured to perform three dimensional measurement by the phase shift method based on a multiplicity of image data of a multiplicity of multi-phase shift light patterns imaged by respective irradiating using each of the multi-phase shift light patterns and by imaging by ...

FLUID CONTROL VALVE

A fluid control valve includes: a resin valve main body including inlet and outlet ports in opposite side surfaces, a valve chamber communicating between the inlet and outlet ports and opening at the upper surface center of the main body, and a valve seat provided in an inner wall of the chamber; a valve element movable into or out of contact with the valve seat; and a valve upper body including a drive part to drive the valve element. An inflow passage is formed like an L shape extending through the inner wall to communicate between the inlet port and the chamber via the valve seat. The inner wall is cylindrical having a thick-wall portion to have a wall thickness thicker on the inlet port side than on the outlet port side. The valve main body is provided, at a center of a lower surface, with a resin injected part. 1. A fluid control valve comprising:a resin valve main body including an inlet port and an outlet port formed in opposite side surfaces of the valve main body, a valve chamber communicating between the inlet port and the outlet port and opening at a center of an upper surface of the valve main body, and a valve seat provided in an inner wall of the valve chamber;a valve element arranged to be moved into or out of contact with the valve seat; anda valve upper body including a drive part to drive the valve element,an inflow passage being formed like an L shape extending through the inner wall to communicate between the inlet port and the valve chamber via the valve seat,wherein the inner wall is shaped in a cylindrical form including a thick-wall portion so that a wall thickness of the inner wall is thicker on the inlet port side than on the outlet port side, andthe valve main body is provided, at a center of a lower surface, with a resin injected part.2. The fluid control valve according to claim 1 , whereinan outer wall of the valve chamber is formed, at an upper end, with an annular seal portion to hold a retainer portion of the valve element between ...

FLUID CONTROL DEVICE

In a fluid control device, a valve body is prevented from being pressed forcefully against a valve seat or the like, and an excessive load is prevented from acting on a motor. A flow rate adjustment device includes a first engagement portion, and a second engagement portion that is capable of moving relative to the first engagement portion and transmitting and receiving rotary force. The flow rate adjustment device includes a valve body that adjusts an opening of a flow passage, and a rod that is coupled to the valve body. The flow rate adjustment device further includes a male screw portion and a female screw portion that are intermeshed so as to be fed relative to each other in the axial direction, a projecting portion that restricts movement of the second engagement portion, and a first cylinder that restricts movement of the rod. 1. A fluid control device comprising:a motor having a drive shaft;a first engagement portion provided on the drive shaft;a second engagement portion configured to move relative to the first engagement portion in an axial direction of the drive shaft and receive a rotary force from the first engagement portion;a valve main body having a flow passage for a fluid and a valve seat portion;a valve body provided to face the valve seat portion in order to adjust an opening of the flow passage;a moving member coupled to the valve body of which movement in the axial direction is permitted and of which rotation about the drive shaft is restricted;an elastic member configured to exert a force on the moving member in a direction for causing the valve body to approach the valve seat portion;a first restricting portion configured to restrict movement of the second engagement portion to the side of the valve seat portion beyond a first restriction position; anda second restricting portion configured to restrict movement of the moving member to the side of the valve seat portion beyond a second restricting position,wherein the second engagement portion ...

DEVICE FOR MEASURING THREE DIMENSIONAL SHAPE

A device for measuring three dimensional shape is configured to perform one of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a first light pattern of multiply varied phases, and a second imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a second light pattern of multiply varied phases. The device is configured to, simultaneous with completion of the first or second imaging operation, start shifting or switching operation of said first grating or a second grating relating to said first imaging operation. The device is configured to, without waiting for completion of the shifting or switching operation, perform the other imaging operation from among the first and second imaging operations. 1. A device for measuring three dimensional shape , the device comprising:a first irradiation unit having a first light source for generation of a certain light, and a first grating for transforming light from said first light source into a first light pattern having a stripe-like light intensity distribution, so that the first irradiation unit is capable of irradiating said first light pattern from a first position upon an object to be measured;a first grating control unit configured to control shifting or switching of said first grating and causing multiple changes of phase of said first light pattern irradiated from said first irradiation unit;a second irradiation unit having a second light source for generation of a certain light, and a second grating for transforming light from said second light source into a second light pattern having a stripe-like light intensity distribution, so that the second irradiation unit is capable of irradiating said second light pattern from a second position upon an object to be measured, said second position being different from said first position;a second grating ...

LIQUID CONTROL APPARATUS

A liquid control apparatus controls a spread mode of a liquid. The liquid control apparatus includes a main body having an upper surface to which the liquid is supplied, and a mesh knitted in a net-like shape and provided to be in contact with the upper surface . An inhibiting groove is provided in the upper surface in a portion that is in contact with the mesh . An introducing port for introducing a gas from the inside of the main body into the inhibiting groove is provided in the main body . The introducing port is formed such that the gas is introduced into the inhibiting groove substantially parallel to the upper surface 1. A liquid control apparatus configured to control a spread of a liquid , comprising:a main body having a supply surface to which the liquid is supplied; anda net-shaped body knitted in a net-like shape and provided to be in contact with the supply surface, whereina first groove is formed in the supply surface in a portion in contact with the net-shaped body; andan introducing port configured to introduce a gas from an inside of the main body into the first groove is formed in the main body.2. The liquid control apparatus according to claim 1 , wherein the introducing port is formed such that the gas is introduced into the first groove substantially parallel to the supply surface.3. The liquid control apparatus according to claim 1 , whereina supply port configured to supply the liquid from the inside of the main body to the supply surface and a discharge port configured to discharge a fluid from a space on the periphery of the supply surface into the inside of the main body are formed in the main body; andthe supply port is formed between the first groove and the discharge port.4. The liquid control apparatus according to claim 3 , wherein a second groove connected to the discharge port is formed in the supply surface.5. The liquid control apparatus according to claim 4 , wherein the second groove extends in a direction substantially ...

FLUID CONTROL SYSTEM AND FLUID CONTROL METHOD

A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter. 1. A fluid control system comprising:a gas supply source to supply gas which is a fluid to the vacuum chamber;an exhaust pipe to discharge the fluid from the vacuum chamber;a gas supply pipe to connect the vacuum chamber and the gas supply source;a pressure sensor to detect an internal pressure of the vacuum chamber;a flowmeter placed on the gas supply pipe between the gas supply source and the vacuum chamber;a proportional valve placed on the gas supply pipe between the flowmeter and the vacuum chamber;a pressure controller to control the proportional valve in response to an output of the pressure sensor;a metering valve placed on the exhaust pipe; anda flow controller to control the metering valve in response to an output of the flowmeter.2. The fluid control system according to claim 1 , whereina flow-rate set value is set in the flow controller,the flow controller controls the metering valve so that a flow rate of gas flowing in the gas supply pipe coincides with the flow-rate set value,a pressure set value is set in the pressure controller, andthe pressure controller controls the proportional valve so that the internal pressure of the vacuum chamber coincides with the pressure set value.3. The fluid control system according to claim 1 , wherein the system ...

VACUUM CONTROL VALVE AND VACUUM CONTROL APPARATUS

A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod. 1. A vacuum control valve connected between a vacuum chamber that generates plasma and a vacuum pump to control a vacuum pressure in the vacuum chamber in accordance with manipulation of a valve opening , comprising:a control valve main body having a valve body flow passage connecting the vacuum chamber to the vacuum pump, and a valve seat formed in the valve body flow passage; andan actuator, a valve body configured to manipulate the valve opening by performing a linear motion to adjust a lift, which is a distance between the valve body and the valve seat;', 'a linear driving unit configured to generate driving force for causing the valve body to perform the linear motion;', 'a columnar rod configured to transmit the driving force from the linear driving unit to the valve body;', 'a cylindrical member having a cylindrical shape that covers a sliding range of the rod; and', 'a sliding/sealing member configured to form a seal between the valve body flow passage side and an exterior side of the valve body flow passage while allowing the cylindrical member to slide,, 'the actuator comprisingwherein the sliding range includes a range movable from the valve body flow passage side ...

LIQUID FEED PUMP AND FLOW CONTROL DEVICE

A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber. 1. A liquid feed pump comprising:a pump housing formed with a columnar hole, a recessed portion surface opposing an opening portion of the hole and a peripheral portion of the hole, an intake passage having an intake port in the recessed portion surface, and a discharge passage having a discharge port in the recessed portion surface;a diaphragm that forms a pump chamber together with the recessed portion surface and partitions the pump chamber from the columnar hole;a reciprocating member reciprocatably inserted into the hole, and configured to reciprocate to press the diaphragm such that the diaphragm deforms;a driving member configured to displace the reciprocating member periodically in a direction of reciprocation of the reciprocating member and vary a stroke of the reciprocation;a seal portion configured to sandwich the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface; anda diaphragm receiving surface provided between the seal portion and the opening portion, the diaphragm receiving surface of which a contact area contacting the diaphragm varies in ...

COUPLING APPARATUS FOR CHEMICAL FLUID FLOW CHANNEL

A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member. 1. A chemical liquid circuit apparatus comprising: a chemical liquid channel for flowing a chemical fluid; and', 'a main opening formed on an end of the chemical liquid channel;, 'a main circuit member havinga sub-circuit member mounted on and in contact with the main circuit member such that a first load is applied to the main circuit member, the sub-circuit member having a sealing surface for sealing the main opening from outside of the chemical liquid circuit apparatus; and a storing portion for storing the main circuit member; and', 'a connecting opening disposed in a position connecting to the main opening of the main circuit member stored in the storing portion, the frame member having such a shape that a reaction force of the first load is transferred from the storing portion to the main circuit member., 'a frame member having2. The chemical liquid circuit of claim 1 , wherein the storing portion includes:a mounting portion mounted on the sub-circuit member; anda support member having a contact surface facing the mounting portion, the contact surface transferring the load to the main circuit member.3. The ...

FLUID CONTROL VALVE

In a fluid control valve, a valve part houses a diaphragm in a valve body including a valve seat, first and second ports, and a drive part includes a piston dividing a piston chamber in a cylinder body into first and second chambers, and a rubber sealing member attached to the outer peripheral surface of the piston. A constriction is provided between the piston chamber and the surface of the cylinder body contacting the valve body. The cylinder body is formed with an exhaust port communicating with the first chamber, an operation port communicating with the second chamber, and a purge port communicating with a fluid non-contact chamber. The piston is formed with a flow path which enables communication between the first chamber and the fluid non-contact chamber. Accordingly, a temperature increase of the drive part can be restricted, and degradation of internal parts can be prevented. 1. A fluid control valve including a valve section for controlling fluid and a drive section for imparting a drive force to the valve section , wherein a valve body formed with a first port and a second port;', 'a valve seat provided between the first port and the second port; and', 'a diaphragm movable into or out of contact with the valve seat, the drive section includes:', 'a cylinder body provided with a piston chamber and clamping the diaphragm with respect to the valve body;', 'a piston slidably mounted in the piston chamber to divide the piston chamber into a first chamber and a second chamber and connected to the diaphragm; and', 'a rubber sealing member mounted on sliding-contact surfaces of the piston and the cylinder body,, 'the valve section includesthe cylinder body includes a constriction to reduce a cross sectional area of a portion between the piston chamber and a surface contacting the valve body,the cylinder body is formed with an air exhaust port communicating with the first chamber, an operation port communicating with the second chamber to supply operation air to ...

THREE-DIMENSIONAL MEASURING APPARATUS

A three-dimensional measuring apparatus includes a first irradiating unit, a second irradiating unit, imaging unit that can image a measured object, a first image data acquiring unit that acquires a plurality of image data imaged by the imaging unit under the light pattern irradiated from the first irradiating unit for each predetermined amount of conveyance by the measured object, a three-dimensional measuring unit that three dimensionally measures based on a plurality of image data acquired by the first image data acquiring unit, and a second image data acquiring unit that acquires image data imaged by the imaging unit under the second light irradiated from the second irradiating unit between after predetermined image data from among the plurality of image data acquired by the first image data acquiring unit is imaged and until the next image data is imaged. 1. A three-dimensional measuring apparatus , comprising:first irradiating unit that can irradiate a light pattern, onto a continuously conveyed measured object, having a banded light intensity distribution in a conveying direction of the measured object;second irradiating unit that can irradiate a second light that differs from the first light pattern, onto the measured object;imaging unit that can image the measured object irradiated by the various light;first image data acquiring unit that acquires a plurality of image data imaged by the imaging unit under the light pattern irradiated from the first irradiating unit for each predetermined amount of conveyance by the measured object;three-dimensional measuring unit that three dimensionally measures based on a plurality of image data acquired by at least the first image data acquiring unit;second image data acquiring unit that acquires image data imaged by the imaging unit under the second light irradiated from the second irradiating unit between after predetermined image data from among the plurality of image data acquired by the first image data acquiring ...

FLUID CONTROL VALVE WITH SENSOR

A fluid control valve includes a valve main body and a vibration sensor. The valve main body has an actuator section and a valve section. The sensor detects vibration generated in the valve main body. The vibration is generated by a water hammer phenomenon. The water hammer phenomenon generates impact when the valve element comes into contact with the valve seat and no fluid leaks between a valve element and a valve seat. The fluid control valve further includes a controller to execute an abnormality determining program and determines the valve main body to be normal when the sensor detects the vibration with an amplitude exceeding the predetermined threshold, while determines the valve main body to be abnormal when the sensor does not detect the vibration with an amplitude exceeding the predetermined threshold. 1. A fluid control valve with a sensor , comprising: an actuator section provided with a movable member including a valve element and configured to move the movable member; and', 'a valve section provided with a valve seat with which the valve element will come into or out of contact; and, 'a valve main body includinga vibration sensor which detects vibration generated in the valve main body,wherein the vibration is generated by a water hammer phenomenon that generates impact when the valve element comes into contact with the valve seat and no fluid leaks between the valve element and the valve seat, andthe fluid control valve further includes an abnormality determining unit configured to determine the valve main body to be normal when the vibration sensor detects the vibration with an amplitude exceeding a predetermined threshold, and determine the valve main body to be abnormal when the vibration sensor does not detect the vibration with an amplitude exceeding the predetermined threshold.2. The fluid control valve with the sensor according to claim 1 , wherein the vibration sensor is specialized in detecting the impact.3. The fluid control valve with the ...

COMPONENT MOUNTING SYSTEM AND ADHESIVE INSPECTION DEVICE

A component mounting system includes: a component mounting machine that mounts an electronic component having a predetermined electrode portion on a solder printed on a substrate, the electronic component being fixed to the substrate with a thermosetting adhesive; and an adhesive inspection device. The component mounting machine: sets, with regard to the electronic component to be fixed with the adhesive that cures at a temperature lower than a melting temperature of the solder, a target mounting height along a height direction perpendicular to a face of the substrate on which the adhesive is applied; and mounts the electronic component at the target mounting height. The target mounting height is: an ideal mounting height based on design data; or a height lower than the ideal mounting height by a value that corresponds to a sinking of the electronic component as a result of melting of the solder. 1. A component mounting system comprising:a component mounting machine that mounts an electronic component having a predetermined electrode portion on a solder printed on a substrate, wherein the electronic component is fixed to the substrate with a thermosetting adhesive; andan adhesive inspection device, wherein sets, with regard to the electronic component to be fixed with the adhesive that cures at a temperature lower than a melting temperature of the solder, a target mounting height along a height direction perpendicular to a face of the substrate on which the adhesive is applied; and', 'mounts the electronic component at the target mounting height,, 'the component mounting machine an ideal mounting height based on design data; or', 'a height lower than the ideal mounting height by a value that corresponds to a sinking of the electronic component as a result of melting of the solder;, 'wherein the target mounting height is measures a height of the adhesive relative to the substrate;', 'determines a quality of the adhesive based on the height of the adhesive; and', ' ...

THREE-DIMENSIONAL MEASURING DEVICE

A three-dimensional measurement device includes: an illuminator that irradiates a measured object with a predetermined light; an imaging device that comprises: an imaging sensor displaceable at least in a vertical direction; and a both-sided telecentric optical system that causes the imaging sensor to form an image of a predetermined area on the measured object irradiated with the predetermined light; a conveyor that moves the illuminator and the imaging device relative to the measured object; and a controller that: executes three-dimensional measurement of a predetermined measurement object on the measured object, based on the taken image; measures a height of the predetermined area at least at a time prior to imaging of the predetermined area under the predetermined light; and changes a height position of the imaging sensor based on a measurement result to adjust an interval between the predetermined area and the imaging sensor to a predetermined distance. 1. A three-dimensional measurement device , comprising:an illuminator that irradiates a measured object with a predetermined light; an imaging sensor displaceable at least in a vertical direction; and', 'a both-sided telecentric optical system that causes the imaging sensor to form an image of a predetermined area on the measured object irradiated with the predetermined light;, 'an imaging device comprisinga conveyor that moves the illuminator and the imaging device relative to the measured object; and executes three-dimensional measurement of a predetermined measurement object on the measured object, based on the image taken by the imaging device;', 'measures a height of the predetermined area at least at a time prior to imaging of the predetermined area on the measured object under the predetermined light; and', 'adjusts a height position of the imaging sensor based on a measurement result until an interval between the predetermined area and the imaging sensor becomes equal to a predetermined distance for ...

INSPECTION DEVICE, PACKAGING MACHINE, AND PACKAGE INSPECTION METHOD

An inspection device includes: an electromagnetic wave irradiator that irradiates, with a predetermined electromagnetic wave from a first film side, the package that is conveyed along a predetermined direction and that has the spaces at a plurality of positions in a width direction; an imaging device that is disposed opposed to the electromagnetic wave irradiator across the package, includes an electromagnetic wave detector including a plurality of detection elements that is arrayed along the width direction and that detects the electromagnetic wave radiated from the electromagnetic wave irradiator and transmitted through the package, and sequentially outputs an obtained electromagnetic wave transmission image every time the package is conveyed by a predetermined amount; and an image processing device that processes an image signal output from the imaging device. 1. An inspection device that inspects a package comprising a first film made of an opaque material and a second film made of an opaque material attached to each other and a plurality of spaces each for placing a tablet between the first film and the second film , the inspection device comprising:an electromagnetic wave irradiator that irradiates, with a predetermined electromagnetic wave from a first film side, the package that is conveyed along a predetermined direction and that has the spaces at a plurality of positions in a width direction perpendicular to the predetermined direction;{'claim-text': ['is disposed opposed to the electromagnetic wave irradiator across the package,', 'comprises an electromagnetic wave detector comprising a plurality of detection elements that is arrayed along the width direction and that detects the electromagnetic wave radiated from the electromagnetic wave irradiator and transmitted through the package, and', 'sequentially outputs an obtained electromagnetic wave transmission image every time the package is conveyed by a predetermined amount; and'], '#text': 'an imaging ...

INSPECTION DEVICE, PTP PACKAGING MACHINE AND PTP SHEET MANUFACTURING METHOD

An inspection device includes: an irradiator that irradiates an object with near-infrared light; a spectroscope that has a slit where reflected light enters and that disperses the reflected light into wavelength component lights; an imaging device that comprises an imaging element that takes a spectroscopic image of the wavelength component lights; and a processor that: obtains spectral data based on the spectroscopic image; and detects a type of the object using a predetermined analysis based on the spectral data. Each of the wavelength component lights is a single wavelength light, the inspection device satisfies L≥2P, where L is a width of each of the wavelength component lights in a wavelength dispersion direction on a light receiving surface of the imaging element and P is a width of a pixel in the wavelength dispersion direction on the light receiving surface. 1. An inspection device comprising:an irradiator that irradiates an object with near-infrared light;a spectroscope that has a predetermined slit where reflected light from the irradiated object enters and that disperses the reflected light into wavelength component lights;an imaging device that comprises an imaging element that takes a spectroscopic image of the wavelength component lights; and obtains spectral data based on the spectroscopic image; and', 'detects a type of the object using a predetermined analysis based on the spectral data, wherein, 'a processor thateach of the wavelength component lights is a single wavelength light, {'br': None, 'i': L≥', 'P, '2\u2003\u2003(1)'}, 'the inspection device satisfies relational expression (1)where L is a width of each of the wavelength component lights in a wavelength dispersion direction on a light receiving surface of the imaging element and P is a width of a pixel in the wavelength dispersion direction on the light receiving surface.2. An inspection device comprising:an irradiator that irradiates an object with near-infrared light;a spectroscope that ...

Fluid Control Valve

A fluid control valve includes a passage block formed with a passage, a valve seat provided in the passage block, and a valve element to be brought into contact with or separated from the valve seat. The fluid control valve is configured to open and close the passage by movement of the valve element with respect to the valve seat to control a fluid. The fluid control valve further includes a shape-changeable part which changes its shape in association with the movement of the valve element. The shape-changeable part has a surface formed with a monomolecular film of fluorosilane material. 1. A fluid control valve including: a passage block formed with a passage; a valve seat provided in the passage block; and a valve element to be brought into contact with or separated from the valve seat , the fluid control valve being configured to open and close the passage by movement of the valve element with respect to the valve seat to control a fluid ,wherein the fluid control valve further comprises a shape-changeable part which is deformed in association with the movement of the valve element,the shape-changeable part includes a surface formed with a monolayer film of fluorosilane material.2. The fluid control valve according to claim 1 , further comprising a valve stem holding the valve element to move the valve element claim 1 ,the shape-changeable part is a bellows connected to the valve element to protect the valve stem from the fluid allowed to flow through the passage, andthe fluid control valve is a vacuum pressure control valve to be disposed in a pipe connecting a vacuum vessel and a vacuum pump, and configured to change an opening degree defined between the valve seat and the valve element to regulate vacuum pressure in the vacuum vessel.3. The fluid control valve according to claim 1 , wherein the shape-changeable part is a diaphragm valve element and also used as the valve element.4. The fluid control valve according to claim 1 ,wherein the shape-changeable part ...

INSPECTION DEVICE, PTP PACKAGING MACHINE AND PTP SHEET MANUFACTURING METHOD

An inspection device includes: an irradiator that irradiates an object with near-infrared light; a spectroscope that disperses reflected light from the irradiated object; an imaging device that takes a spectroscopic image of the reflected light; a processor that: obtains spectral data of a plurality of points on the object, based on the spectroscopic image; defines a group of similar spectral data from among the spectral data of the plurality of points; extracts a group having a largest number of spectral data from the defined group; calculates an average of the spectral data of the extracted group; and detects a type of the object using a predetermined analysis of the object, based on the average. 1. An inspection device comprising:an irradiator that irradiates an object with near-infrared light;a spectroscope that disperses reflected light from the irradiated object;an imaging device that takes a spectroscopic image of the dispersed light; obtains spectral data of a plurality of points on the object, based on the spectroscopic image;', 'defines a group of similar spectral data from among the spectral data of the plurality of points;', 'extracts a group having a largest number of spectral data from the defined group;', 'calculates an average of the spectral data of the extracted group; and', 'detects a type of the object using a predetermined analysis of the object, based on the average., 'a processor that2. A Press Through Package (PTP) packaging machine that manufactures a PTP sheet , a pocket portion former that forms a pocket portion in a container film that is conveyed in a belt-like manner;', 'a filler that fills an object into the pocket portion;', 'a mounter that mounts a cover film onto the container film to close the pocket portions;', 'a separator that separates the PTP sheet from a belt-like body obtained by mounting the cover film to the container film; and', {'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the inspection device according to .'}], ' ...

PIPE COUPLING STRUCTURE

A pipe coupling structure includes an electromagnetic valve and a passage block having an upper surface mounted with the electromagnetic valve and opposite side surfaces formed with an inlet port and an outlet port. The inlet port is connected to a PCV pipe through an inlet pipe joint, and the outlet port is connected to a PCV pipe through an outlet pipe joint. At least one of the inlet pipe joint and the outlet pipe joint is a union joint. The union joint includes a hollow cylindrical union end making contact with a first surface formed with the inlet port or a second surface formed with the outlet port and a hollow cylindrical union nut configured to connect the inlet port or the outlet port to the union end. 1. A pipe coupling structure comprising: an electromagnetic valve and a passage block having an upper surface on which the electromagnetic valve is mounted and opposite side surfaces in which an inlet port and an outlet port are individually formed , the inlet port being connected to an inlet pipe through an inlet pipe joint and the outlet port being connected to an outlet pipe through an outlet pipe joint ,wherein at least one of the inlet pipe joint and the outlet pipe joint is a union joint,the opposite side surfaces are a first surface and a second surface, the first surface being formed with the inlet port and the second surface being formed with the outlet port, and a union end having a hollow cylindrical shape and being in contact with one of the first surface and the second surface; and', 'a union nut having a hollow cylindrical shape and being configured to connect one of the inlet port and the outlet port with the union end., 'the union joint includes2. The pipe coupling structure according to claim 1 , whereinat least one of the inlet pipe and the outlet pipe is placed in an inner periphery of the union end, andthe union end is formed with a protruding portion protruding radially inward at an end of the inner periphery on a side where the union end ...

THREE-DIMENSIONAL MEASUREMENT DEVICE AND THREE-DIMENSIONAL MEASUREMENT METHOD

A three-dimensional measurement device performs three-dimensional measurement of a measured object using a phase shift method. The three-dimensional measurement device includes: an irradiator that irradiates the measured object with a predetermined light pattern having a light intensity distribution in a fringe shape; a control device that shifts a phase of the light pattern radiated from the irradiator in N different ways, where N is a natural number of not less than 3; and an imaging device that takes an image of the measured object irradiated with the light pattern. The control device executes three-dimensional measurement of the measured object by the phase shift method based on N different image data taken under the light pattern having the phase shifted in the N different ways. 1. A three-dimensional measurement device that performs three-dimensional measurement of a measured object using a phase shift method , the three-dimensional measurement device comprising:an irradiator that irradiates the measured object with a predetermined light pattern having a light intensity distribution in a fringe shape;a control device that shifts a phase of the light pattern radiated from the irradiator in N different ways, where N is a natural number of not less than 3; andan imaging device that takes an image of the measured object irradiated with the light pattern, whereinthe control device executes three-dimensional measurement of the measured object by the phase shift method based on N different image data taken under the light pattern having the phase shifted in the N different ways, obtaining N luminance values with respect to a predetermined coordinate position on the image data based on the N different image data;', 'extracting luminance values of not less than two but less than N from among the N luminance values, wherein the extracted luminance values are neither overexposed nor underexposed; and', 'executing height measurement at the predetermined coordinate ...

VORTEX FLOWMETER

In this vortex flowmeter provided with a vortex generator and a flow rate measuring unit, a seal member is mounted on a temperature sensing element including a temperature sensor adhered with an adhesive to a metal temperature sensing case. The temperature sensing element is inserted into a first insertion hole formed in a body case so as to communicate with a body passage. A distal end surface of the temperature sensing element is arranged in either a position where the distal end surface is flush with the passage surface of the body passage formed in the body case or a position more outside than the passage surface in the radial direction of the body passage. 1. A vortex flowmeter comprising: a vortex generator; and a flow rate measuring unit placed downstream of the vortex generator and configured to detect a vortex generated by the vortex generator to measure a flow rate , the vortex flowmeter further comprising:a temperature sensing element including a metal temperature sensing case and a temperature sensor adhered to the metal temperature sensing case with an adhesive;a body case including: a body passage in which the vortex generator is placed; and an insertion hole in which the temperature sensing element is inserted, the body passage and the insertion hole being communicated with each other; anda seal member mounted to seal between the temperature sensing element and an inner wall of the insertion hole, andwherein the temperature sensing element inserted in the insertion hole further includes a distal end face located close to the body passage, the distal end face being placed at either a position where the distal end face is flush with a passage surface of the body passage or a position more outside than the passage surface of the body passage in a radial direction of the body passage.2. The vortex flowmeter according to claim 1 , whereinthe temperature sensing case includes an accommodating hole configured to accommodate the temperature sensor, the ...

MONITOR SYSTEM

A monitor system for monitoring a status of one or more equipment includes a plurality of mobile terminals respectively operated by a plurality of operators. Each of the plurality of mobile terminals includes a communicator that receives status information with regard to the status of the equipment via a communication line; a display that displays, when the status according to the status information received from one of the mobile terminals indicates that the equipment requires a specified operation, information showing that the specified operation is required; and a territory setter that sets a territory in which one or more operations for the equipment to be performed by the operator of the each of the plurality of mobile terminals. 1. A monitor system for monitoring a status of one or more equipment , the monitor system comprising:a plurality of mobile terminals respectively operated by a plurality of operators, wherein a communicator that receives status information with regard to the status of the equipment via a communication line;', 'a display that displays, when the status according to the status information received from one of the mobile terminals indicates that the equipment requires a specified operation, information showing that the specified operation is required; and', 'a territory setter that sets a territory in which one or more operations for the equipment to be performed by the operator of the each of the plurality of mobile terminals,, 'each of the plurality of mobile terminals compriseswhen the specified operation is to be performed in the territory, the display displays the information showing that the specified operation is required in the territory,the communicator establishes communication with another mobile terminal via the communication line, andwhen the operator of the each of the plurality of mobile terminals sets the territory, the communicator sends territory information representing the territory set by the operator to the other ...

ACTUATOR-OPERATION DETECTING APPARATUS

An actuator-operation detecting apparatus is configured to check the operating state of a piston of an actuator. The actuator includes a double-acting cylinder, the piston that partitions the cylinder into a first pressure acting chamber and a second pressure acting chamber, and a rod connected to an end face of the piston facing the second pressure acting chamber. The actuator-operation detecting apparatus includes a first pressure detector to detect the pressure in the first pressure acting chamber, a second pressure detector to detect the pressure in the second pressure acting chamber, a differential amplifier circuit to calculate a thrust force acting on the piston based on the pressures detected by the first and second pressure detectors and the pressure-receiving area of the piston, and a microcomputer to monitor the operation of the piston based on the thrust force. 1. An actuator-operation detecting apparatus for an actuator , the actuator including: a double-acting cylinder; a piston slidably supported in the double-acting cylinder to partition an inside of the double-acting cylinder into a first pressure acting chamber and a second pressure acting chamber; and a rod coupled to an end face of the piston that faces the second pressure acting chamber , the actuator-operation detecting apparatus being configured to monitor an operating state of the piston , a first pressure detector configured to detect pressure in the first pressure acting chamber;', 'a second pressure detector configured to detect pressure in the second pressure acting chamber;', 'a calculator configured to calculate a thrust force acting on the piston based on the pressure detected by the first pressure detector, the pressure detected by the second pressure detector, and a pressure-receiving area of the piston; and', 'a monitor configured to check the operating state of the piston., 'wherein the actuator-operation detecting apparatus comprises2. The actuator-operation detecting apparatus ...

LIQUID DRIP PREVENTION VALVE

In a liquid drip prevention valve, an input port is formed in the upper face of a flow passage block, and an output port is formed in the lower face, which opposes the upper face of the flow passage block. In addition, a valve chamber is formed on a side face of the flow passage block, and an air block abuts the side face. Furthermore, a diaphragm valve makes contact with a valve seat when pressure is applied with respect to a back side chamber of the diaphragm valve and separates from the valve seat when the back side chamber is brought to negative pressure, thus forming the liquid drip prevention valve. 1. A liquid drip prevention valve comprising: a flow passage block including an input passage , an output passage , and a valve chamber with which the input passage and the output passage are communicated , the flow passage block being formed with a valve seat around a valve hole communicated with the output passage in the valve chamber;an air block formed with an airflow passage; and a diaphragm valve fixed between the flow passage block and the air block to move into or out of contact with the valve seat, whereinthe flow passage block is formed, on an upper face, with an input port communicated with the input passage,the flow passage block is formed, on a lower face opposite the upper face, with an output port communicated with the output passage,the valve chamber is formed in a side face of the flow passage block and the air block is in contact with the side face, andthe diaphragm valve will come into contact with the valve seat when a back side chamber of the diaphragm valve is pressurized and will separate from the valve seat when the back side chamber is subjected to negative pressure.2. The liquid drip prevention valve according to claim 1 ,wherein a diaphragm escape groove is formed around the valve seat,the diaphragm escape groove is formed in an annular form around the valve hole, anda valve chamber communication port is formed in the diaphragm escape ...

BUTTERFLY VALVE

A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor. 1. A butterfly valve comprising: a motor; a passage; a rod connected to the motor and placed in a direction orthogonal to the passage; and a butterfly valve element joined to the rod to open and close the passage by rotation of the rod by the motor , whereina joint-body gravity center as a gravity center of the joint body at least including the rod and the butterfly valve element as constituent components is positioned on an axis of a rotary shaft of the motor.2. The butterfly valve according to claim 1 , wherein each constituent-component gravity center as a gravity center of each constituent component configuring the joint body is placed on an imaginary plane passing through the axis,', 'on the imaginary plane, a distance from the axis to the constituent-component gravity center placed in one region partitioned by the axis is defined as a positive value, and a distance from the axis to the constituent-component gravity center placed in the other region partitioned by the axis is defined as a negative value, and', 'moment is calculated by multiplying mass of the constituent component by a distance between the constituent-component gravity center and the axis so that a sum of the calculated moment is arranged to become almost zero., 'the joint body is configured such that'}3. The butterfly valve according to claim 1 , wherein the joint body is formed by joining the butterfly valve element to the rod by a fixing member claim 1 , and the joint-body gravity center is considered with a ...

BLISTER PACKING MACHINE AND BLISTER PACK MANUFACTURING METHOD

A blister packing machine includes: a conveyor that conveys a belt-like container film having a pocket portion forming area and an expected mounting part; a preheating device that preheats the container film conveyed by the conveyor; a pocket portion forming device that forms a pocket portion in the container film softened by the preheating device; and a tension applier that applies a tension along a width direction of the container film to at least the pocket portion forming area. The pocket portion forming device forms the pocket portion while the tension applier applies the tension to the container film, the container film has an edge area between an edge in the width direction and the expected mounting part, and the tension applier includes a projection that applies the tension to the container film by pressing the edge area to form a protruding portion in the container film.

MOUNTING STRUCTURE OF SOLENOID VALVE FOR OPERATION, AND FLUID CONTROL VALVE

A mounting structure of a solenoid valve for operation on a cylinder provided with an operation port, the solenoid valve being configured to control operation fluid to be supplied to the cylinder, includes a mounting block attached with the solenoid valve, and a mounting screw threadedly engaged with internal threads of the operation port to mount the mounting block on the cylinder. The mounting block includes an inlet passage for supplying the operation fluid to the solenoid valve, an outlet passage for flowing the operation fluid controlled by the solenoid valve, and a through hole through which the mounting screw is inserted and with which the outlet passage is communicated. The mounting screw includes an inner passage to communicate the operation port with the outlet passage. Seal members seal between an inner wall of the through hole and the mounting screw. 1. A mounting structure of a solenoid valve for operation to mount the solenoid valve for operation on a cylinder provided with an operation port , the solenoid valve for operation being configured to control operation fluid to be supplied to the cylinder , whereinthe operation port has internal threads,the mounting structure includes a mounting block to which the solenoid valve for operation is attached, and a mounting screw threadedly engaged with the internal threads to mount the mounting block to the cylinder, an inlet passage in which the operation fluid flows and through which the operation fluid is supplied to the solenoid valve for operation;', 'an outlet passage in which the operation fluid having been controlled by the solenoid valve for operation flows from the solenoid valve; and', 'a through hole through which the mounting screw is inserted, the through hole being communicated with the outlet passage,', 'the mounting screw includes an inner passage for providing communication between the operation port and the outlet passage, and', 'the mounting structure further includes a seal member for ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images. 1. A three-dimensional measurement device , comprising: splits a predetermined incident light into two lights;', 'radiates one of the two lights as a measurement light to a measurement object and the other of the two lights as a reference light to a reference surface; and', 'recombines the two lights to a combined light and emits the combined light;, 'a predetermined optical system thata first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first input-output element of the predetermined optical system;a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second input-output element of the predetermined optical system;a first camera that takes an image of an output light with regard to the first light that is emitted from the second input-output element when the first light enters the first input-output element;a second camera that takes an image of an output light with regard to the second light that is emitted from the first input-output element when the second light enters the second input- ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes a light source and grid that irradiate a measurement object; a luminance controller that changes luminance levels of the light; a phase controller that changes phase levels of the light pattern; a camera that takes an image of the measurement object; and a processor that three-dimensionally measures a first measurement object area based on different image data taken by radiating a first light pattern in different phases; determines a relationship between a gain and offset determined according to an imaging condition based on the different image data; and three-dimensionally measures a second measurement object area based on two different image data taken by radiating a second light pattern in two different phases by using a gain and offset regarding each pixel determined according to a luminance value of each pixel in the two different image data and the determined relationship. 1. A three-dimensional measurement device , comprising: comprises a light source that emits a predetermined light and a grid that converts the light from the light source into a light pattern having a striped light intensity distribution; and', 'irradiates a measurement object comprising at least a first and a second measurement object area with the light pattern;, 'an irradiator thata luminance controller that changes luminance levels of the light emitted from the light source;a phase controller that controls transfer or changeover of the grid and that changes phase levels of the light pattern radiated from the irradiator;a camera that takes an image of reflected light from the measurement object irradiated with the light pattern; and performs three-dimensional measurement of the first measurement object area based on a predetermined number of different image data taken by radiating a first light pattern of a first luminance level corresponding to the first measurement object area in a predetermined number of different phases;', 'determines a ...

INSPECTING DEVICE MONITORING SYSTEM

In a monitoring system, when there is an evaluation that a product is defective, in a solder print inspecting device that is subject to monitoring, that information is sent to a mobile terminal possessed by an operator. The operator who views the notification performs, through the mobile terminal, a checking task for evaluating whether or not the evaluation result regarding the printed substrate that has been evaluated as a defective product is correct. Depending on the evaluation result, an operating instruction is sent to the solder print inspecting device, which has temporarily stopped the printed substrate. If correction information instructing that the defective-product evaluation be corrected to a non-defective-product evaluation is sent from a mobile terminal to the solder print inspecting device, the solder print inspecting device corrects the defective-product evaluation to a non-defective-product evaluation, and releases the temporary stop of the printed substrate. 1. An inspecting device monitoring system for monitoring the operating status of one or more inspecting devices that includes an inspecting unit configured to perform specific inspections regarding specific inspection objects that are conveyed and arrive sequentially , and an evaluating unit configured to perform defective/non-defective-product evaluations on the inspection objects of based on inspection information obtained by the inspecting unit , comprising:one or more mobile terminals, possessed by one or more operators, and including a communicating unit capable of communicating with one or more inspecting devices through a specific communication circuit,wherein the inspecting device comprises:a temporary stopping unit configured to stop temporarily defective-product rejection of, at least, an inspection object relating to a defective-product evaluation, when there has been a defective-product evaluation by the evaluating unit; anda communicating unit, structured so as to enable ...

MANUFACTURING DEVICE OF PACKAGE AND MANUFACTURING METHOD OF PACKAGE

A manufacturing device is used for manufacturing a package including a resin sheet and a predetermined work wrapped with the resin sheet. The manufacturing device includes: a sealing unit that thermally welds overlapping parts of the sheet; and an inspection device that inspects a sealing quality of the sealed portion thermally welded by the sealing unit. The sealing unit makes, by the thermal welding, a thickness of the sealed portion after the thermal welding smaller than a total thickness of the overlapping parts prior to the thermal welding. The inspection device obtains thickness information on the thickness of the sealed portion and determines the sealing quality of the sealed portion based on the thickness information. 1. A manufacturing device of a package including a resin sheet and a predetermined work wrapped with the resin sheet , the manufacturing device comprising:a sealing unit that thermally welds overlapping parts of the sheet; andan inspection device that inspects a sealing quality of the sealed portion thermally welded by the sealing unit, whereinthe sealing unit makes, by the thermal welding, a thickness of the sealed portion after the thermal welding smaller than a total thickness of the overlapping parts prior to the thermal welding, and obtains thickness information on the thickness of the sealed portion; and', 'determines the sealing quality of the sealed portion based on the thickness information., 'the inspection device2. The manufacturing device of the package according to claim 1 , wherein an irradiation device that irradiates the sheet with ultraviolet light; and', 'an imaging device that takes an image of the ultraviolet light transmitting through the sheet and obtains image data while the irradiation device irradiates the sheet comprising the sealed portion with the ultraviolet light,, 'comprises, 'the inspection device furtherobtains, as the thickness information, information on a transmitted light quantity of the sealed portion based ...

BLISTER PACKAGING MACHINE

A blister packaging machine that manufactures a blister pack, wherein the blister pack comprises: a lidded container that includes a container main body and an outer lid portion; and an inner cover film attached to close the opening of the container main body, the blister packaging machine comprising: a conveyor; a molding device that executes a molding process to a strip-shaped container film and form a lidded container-corresponding part corresponding to the lidded container; a placing device that is disposed downstream of the molding device and places the article in a container part; a sealing device that is disposed downstream of the placing device and attaches the inner cover film to close an opening of the container part; and a punching device that is disposed downstream of the sealing device and punches out the lidded container-corresponding part along with the inner cover film to produce the blister pack. 1. A blister packaging machine that manufactures a blister pack , whereinthe blister pack comprises:a lidded container that includes a container main body in which an article is placed and an outer lid portion integrally formed with the container main body, wherein an opening of the container main body is opened and closed by the outer lid portion; andan inner cover film attached to the container main body to close the opening of the container main body in which the article is placed,the blister packaging machine comprising:a conveyor that conveys a strip-shaped container film in a conveying direction;a molding device that executes a molding process to the conveyed strip-shaped container film and forms a lidded container-corresponding part corresponding to the lidded container, wherein the lidded container-corresponding part comprises a container part corresponding to the container main body;a placing device that is disposed downstream of the molding device and places the article in the container part;a sealing device that is disposed downstream of the ...

FLUID CONTROL VALVE

A fluid control valve for controlling high-temperature fluid includes: a valve body including a valve chamber communicating with first and second flow passages, and a valve seat provided in the valve chamber; a metal diaphragm that contacts with and separates from the valve seat; a stem that moves the metal diaphragm up and down; and an actuator that drives the stem. The first flow passage includes a first orifice having a diameter set to 50% or less of a diameter of the second flow passage. Alternatively, the second flow passage includes a second orifice having a diameter set to 50% or less of the diameter of the second flow passage. The diameter of the second flow passage is calculated by converting a cylindrical flow passage area defined between the valve seat and the metal diaphragm when separated from the valve seat into a diameter of a circular flow passage. 1. A fluid control valve for controlling high-temperature fluid , the fluid control valve comprising:a valve body including: a valve chamber communicating with a first flow passage and a second flow passage; and a valve seat provided in the valve chamber;a metal diaphragm configured to contact with or separate from the valve seat;a stem configured to move the metal diaphragm up and down; andan actuator configured to drive the stem,wherein the first flow passage includes a first orifice having a diameter set to 50% or less of a diameter of the second flow passage, or, the second flow passage includes a second orifice having a diameter set to 50% or less of the diameter of the second flow passage, andthe diameter of the second flow passage is a diameter calculated by converting a cylindrical flow passage area defined between the valve seat and the metal diaphragm when separated from the valve seat into a diameter of a circular flow passage.2. In the fluid control valve according to claim 1 , wherein the diameter of the first orifice is 40% or less of the diameter of the second flow passage claim 1 , or claim ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes: a first irradiator that radiates a first light pattern from a first position toward an object; a first grid controller that controls a first grid to change phases of the first light pattern; a second irradiator that radiates a second light pattern from a second position toward the object; a second grid controller that controls the second grid to change phases of the second light pattern; a camera that takes an image of reflected light from the object; and a processor that: performs one of a first imaging process of imaging processes performed by radiation of the first light pattern and a second imaging process of imaging processes performed by radiation of the second light pattern; and subsequently performs the other imaging process without waiting for completion of the transfer or changeover of the first or the second grid involved in the one imaging process. 1. A three-dimensional measurement device comprising: a first light source; and', 'a first grid that converts a light from the first light source into a first light pattern having a striped light intensity distribution, and that radiates the first light pattern from a first position toward a measurement object;, 'a first irradiator that comprisesa first grid controller that controls transfer or changeover of the first grid to change phases of the first light pattern a first predetermined number of times; a second light source; and', 'a second grid that converts a light from the second light source into a second light pattern having a striped light intensity distribution, and that radiates the second light pattern from a second position that is different from the first position toward the measurement object;, 'a second irradiator that comprisesa second grid controller that controls transfer and changeover of the second grid to change phases of the second light pattern a second predetermined number of times, wherein the second predetermined number is smaller than ...

VACUUM PRESSURE CONTROL SYSTEM

A vacuum pressure control system that can easily calculate an optimum valve open degree of a vacuum control valve for making a pressure value of a vacuum chamber agree with a target value is provided. A controller approximates a relation between the pressure value in the vacuum chamber and a flow rate of process gas to linear functions, and the system includes a mapping program and a valve-open-degree calculation program stored in the controller to calculate the optimum valve open degree of the vacuum control valve for making the pressure value in the vacuum chamber agree with the target value based on the linear functions when the process gas at the predetermined flow rate is supplied. The valve open degree of the vacuum control valve is adjusted based on the optimum valve open degree so that the pressure value in the vacuum chamber is made agree with the target value. 1. A vacuum pressure control system comprising:a gas supply source;a vacuum chamber configured to receive supply of gas from the gas supply source;a vacuum control valve configured to adjust a pressure value in the vacuum chamber; anda vacuum pump configured to decompress the vacuum chamber, which are connected in series, a pressure sensor configured to detect the pressure value in the vacuum chamber; and', 'a controller configured to control the vacuum control valve,, 'the vacuum pressure control system further comprising [ approximate a relation of the pressure value in the vacuum chamber and the gas flow rate to a linear function and storing the linear function in the controller according to the mapping program; and', 'calculate an optimum valve open degree of the vacuum control valve which is necessary for making the pressure value in the vacuum chamber agree with the target value when the gas at the predetermined flow rate is supplied based on the linear function according to the valve-open-degree calculation program, and, 'the controller comprises a mapping program and a valve-open-degree ...

COUPLING MEMBER, FLUID-DEVICE CONNECTING JIG, AND FLUID-DEVICE CONNECTING STRUCTURE

A fluid-device connecting structure includes a first fluid device having a first connection part, a second fluid device having a second connection part, an annular seal member to connect the first and second connection parts, and a coupling member to keep the first and second connection parts in a connected state. The coupling member includes a first coupling segment and a second coupling segment, each including at one end a first hinge part or a second hinge part. The first and second connection parts each have a cylindrical outer shape. The first coupling segment has a U-like shape having an opening and surrounds the first and second connection parts over a range more than 180 degrees of an entire circumference of each of the first and second connection parts. 1. A coupling member to be used for a fluid-device connecting structure comprising:a first fluid device having a first connection part;a second fluid device having a second connection part;an annular seal member placed between the first connection part and the second connection part; andthe coupling member for coupling the first connection part and the second connection part through the annular seal member,wherein the coupling member includes a first coupling segment and a second coupling segment, each having a rotational joint part at a first end,the first connection part and the second connection part each have a cylindrical outer shape, andthe first coupling segment has a U-like shape having an opening and is engageable with the second coupling segment at points spaced more than 180 degrees of an entire circumference of each of the first connection part and the second connection part.2. The coupling member according to claim 1 , whereinthe opening has a dimension smaller than a diameter of a tubular part of each of the first connection part and the second connection part, andthe first coupling segment is deformable to expand outward by a distance corresponding to a difference between the dimension of the ...

FLUID CONTROL VALVE

A fluid control valve includes: a drive section; body provided with first port, second port, and valve seat; and valve element formed columnar-shaped and coupled with the drive section, and the valve element includes annular sealing protrusion annularly protruding from end face located on side facing the valve seat, the sealing protrusion being provided at leading end with annular sealing portion to be pressed against the valve seat for sealing and at least the annular sealing protrusion is made of fluororesin. The valve element is configured such that the annular sealing portion is radially displaced with displacement amount of no more than 6.175 μm when the annular sealing portion is pressed against the valve seat by the drive section so that abrasion caused by deformation of the valve element in valve closing is restrained and generation of particles is prevented. 1. A fluid control valve comprising:a drive section;a valve body provided with a first port, a second port, and a valve seat; anda valve element which is columnar-shaped and coupled with the drive section,wherein the valve element includes an annular sealing protrusion annularly protruding from an end face located on a side facing the valve seat, the sealing protrusion being provided at a leading end with an annular sealing portion which will be pressed against the valve seat for sealing, and at least the annular sealing protrusion is made of fluororesin, andthe valve element is configured such that the annular sealing portion is displaced with a displacement amount of no more than 6.175 μm in a radial direction when the annular sealing portion is pressed against the valve seat by the drive section.2. A fluid control valve comprising:a drive section;a valve body provided with a first port, a second port, and a valve seat; anda valve element which is columnar-shaped and coupled with the drive section,wherein the valve element includes an annular sealing protrusion annularly protruding from an end face ...

BLISTER SHEET AND BLISTER PACKAGING MACHINE

A blister sheet includes a container film comprising pockets receiving a content, and a cover film mounted to the container film to close the pockets. The container and the cover film are made of synthetic resins. The cover film is thinner than the container film. One pair of cuts formed for each pocket passes through the container and the cover film and extends to the pocket such that each pocket is placed between the cuts. The container and the cover film are broken from the one pair of cuts toward the pocket. A cutting slit or perforation is formed in the container film to allow for separation of the blister sheet into sheet pieces. The cutting slit or perforation is extended to intersect with the cut and a portion of the cutting slit or perforation that intersects with the cut passes through the container and the cover film. 1. A blister sheet comprising:a container film comprising a plurality of pockets that receives therein a content comprising at least one of a tablet and a capsule; anda cover film mounted to the container film to close the pockets, whereinthe container film and the cover film are respectively made of synthetic resins,the cover film is thinner than the container film,at least one pair of cuts formed for each of the pockets passes through the container film and the cover film and extends to the pocket such that each of the pockets is placed between the one pair of cuts,the container film and the cover film are broken from the one pair of cuts toward the pocket by applying a torsional stress from the one pair of cuts toward the pocket, at least the cover film is broken at a position corresponding to the pocket, and the content is taken out from a portion of breakage of the cover film,a cutting slit or a cutting perforation is formed in at least the container film to allow for separation of the blister sheet into sheet pieces, each having a predetermined number of the pockets,the cutting slit or the cutting perforation is extended to intersect ...

INSPECTION DEVICE, BLISTER PACKAGING MACHINE, AND BLISTER SHEET MANUFACTURING METHOD

An inspection device includes: an illumination device that irradiates an object with near-infrared light; a spectroscope that disperses reflected light from the object irradiated with the near-infrared light; an imaging device that takes a spectroscopic image of the reflected light dispersed by the spectroscope; and a processor. The processor obtains spectral data at a plurality of points on the object based on the spectroscopic image obtained by the imaging device, selects, from among the spectral data at the plurality of points, a group having a highest density of luminance values of a predetermined wavelength component as a dense spectral data group, and performs a predetermined analysis for the object based on the dense spectral data group and detects a different type of object. 1. An inspection device comprising:an illumination device that irradiates an object with near-infrared light;a spectroscope that disperses reflected light from the object irradiated with the near-infrared light;an imaging device that takes a spectroscopic image of the reflected light dispersed by the spectroscope; and obtains spectral data at a plurality of points on the object based on the spectroscopic image obtained by the imaging device,', 'selects, from among the spectral data at the plurality of points, a group having a highest density of luminance values of a predetermined wavelength component as a dense spectral data group, and', 'performs a predetermined analysis for the object based on the dense spectral data group and detects a different type of object., 'a processor that2. The inspection device according to claim 1 , whereinthe processor specifies, as the group having the highest density of luminance values from among the spectral data at the plurality of points, a group having a smaller standard deviation of the luminance values of the predetermined wavelength component.3. The inspection device according to claim 1 , wherein sorts, in a predetermined order of either an ...

SUBSTRATE POSITION DETECTION DEVICE

A substrate position detection device includes: an irradiator that irradiates a predetermined range of a substrate with a predetermined light; an imager that takes an image of the predetermined range of the substrate irradiated with the predetermined light; a moving mechanism that causes a relative movement of the imager and the substrate; and a controller that: detects a position of the substrate by sequentially executing to a plurality of recognition objects on the substrate: a moving process of relatively moving the imager to a position corresponding to a predetermined recognition object among the plurality of recognition objects on the substrate; an imaging process of taking an image of the predetermined recognition object under a predetermined imaging condition; and a recognition process of recognizing the predetermined recognition object based on image data obtained by the imaging process. 1. A substrate position detection device comprising:an irradiator that irradiates a predetermined range of a substrate with a predetermined light;an imager that takes an image of the predetermined range of the substrate irradiated with the predetermined light;a moving mechanism that causes relative movement of the imager and the substrate; anda controller that: a moving process of relatively moving the imager to a position corresponding to a predetermined recognition object among the plurality of recognition objects on the substrate;', 'an imaging process of taking an image of the predetermined recognition object under a predetermined imaging condition; and', 'a recognition process of recognizing the predetermined recognition object based on image data obtained by the imaging process;, 'detects a position of the substrate by sequentially executing to a plurality of recognition objects on the substrateafter termination of the imaging process on the predetermined recognition object among the plurality of recognition objects, executes the recognition process on the ...

BLISTER PACKAGING MACHINE

A blister packaging machine includes: a pocket portion forming unit that forms a pocket portion having a bottom portion and a side portion, in a belt-like container film, and adjusts balance between a thickness of the bottom portion and a thickness of the side portion; an illumination device that is disposed on a downstream side of the pocket portion forming unit, and irradiates the pocket portion with an electromagnetic radiation; an imaging device that is disposed on a side opposite to the illumination device across the container film, and obtains transmitted image data based on the electromagnetic radiation transmitted through the pocket portion; a side portion state detector that detects a state of the thickness of the side portion based on the transmitted image data; and a controller that controls an operation of the pocket portion forming unit. 1. A blister packaging machine comprising:a pocket portion forming unit that forms a pocket portion having a bottom portion and a side portion, in a belt-like container film, and adjusts balance between a thickness of the bottom portion and a thickness of the side portion;an illumination device that is disposed on a downstream side of the pocket portion forming unit, and irradiates the pocket portion with an electromagnetic radiation;an imaging device that is disposed on a side opposite to the illumination device across the container film, and obtains transmitted image data based on the electromagnetic radiation transmitted through the pocket portion;a side portion state detector that detects a state of the thickness of the side portion based on the transmitted image data; anda controller that controls an operation of the pocket portion forming unit based on a result of detection by the side portion state detector.2. The blister packaging machine according to claim 1 , whereinthe side portion state detector detects the state of the thickness of the side portion based on a state of the thickness of the bottom portion in ...

MEASUREMENT DEVICE

A measurement device includes: an optical system that splits incident light into two lights to emit one light as measurement light to a measurement object and the other light as reference light to a reference surface, and recombines the two lights to emit combined light; a light emitter that emits light entering the optical system; an imaging system that takes an image of output light emitted from the optical system; and a processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein the processor: obtains complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area based on the interference fringe image. 1. A measurement device comprising: splits incident light into two lights,', 'emits one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and', 'recombines the two lights and emits combined light as output light;, 'an optical system thata light emitter that emits predetermined light entering the optical system;an imaging system that takes an image of the output light emitted from the optical system; anda processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein obtains a plurality of complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area, based on the interference fringe image taken by the imaging system;', 'obtains a plurality of intensity images at the predetermined intervals with ...

APPEARANCE INSPECTION DEVICE AND BLISTER PACKAGING MACHINE

An appearance inspection device includes: a transparent conveyance body having a surface and a rear face and conveyed in a predetermined direction; an illumination device that irradiates with predetermined light an inspection area through which a plurality of objects pass, wherein the objects are arranged at predetermined intervals on a first face that is one of the surface and the rear face; a plurality of imaging devices each of which takes, along a predetermined direction, an image of part of side faces of the objects located in the inspection area, wherein the predetermined direction is inclined to both the surface and the rear face; and a processor that inspects an appearance of the side faces of the objects based on image data obtained by the imaging device. 1. An appearance inspection device comprising:a transparent conveyance body having a surface and a rear face and conveyed in a predetermined direction;an illumination device that irradiates with predetermined light an inspection area through which a plurality of objects pass, wherein the objects are arranged at predetermined intervals on a first face that is one of the surface and the rear face;a plurality of imaging devices each of which takes, along a predetermined direction, an image of part of side faces of the objects located in the inspection area, wherein the predetermined direction is inclined to both the surface and the rear face; anda processor that inspects an appearance of the side faces of the objects based on image data obtained by the imaging device, whereinthe imaging devices are placed around the inspection area on at least a second face that is opposite to the first face, in plan view viewed in a direction perpendicular to the second face, and an imaging element that comprises a light receiving face; and', 'a both-side telecentric optical system that forms an image of the objects located in the inspection area onto the imaging element, wherein, 'each of the imaging devices comprisesthe ...

APPEARANCE INSPECTION DEVICE AND BLISTER PACKAGING MACHINE

An appearance inspection device includes: a conveyance body having a surface and a rear face and conveyed in a predetermined direction; an illumination device that irradiates with predetermined light an inspection area through which a plurality of objects pass, wherein the objects are arranged at predetermined intervals on a first face that is one of the surface and the rear face; a plurality of imaging devices each of which takes, along a predetermined direction, an image of part of side faces of the objects located in the inspection area, wherein the predetermined direction is inclined to both the surface and the rear face; and a processor that inspects an appearance of the side faces of the objects based on image data obtained by the imaging device. 1. An appearance inspection device comprising:a conveyance body having a surface and a rear face and conveyed in a predetermined direction;an illumination device that irradiates with predetermined light an inspection area through which a plurality of objects pass, wherein the objects are arranged at predetermined intervals on a first face that is one of the surface and the rear face;a plurality of imaging devices each of which takes, along a predetermined direction, an image of part of side faces of the objects located in the inspection area, wherein the predetermined direction is inclined to both the surface and the rear face; anda processor that inspects an appearance of the side faces of the objects based on image data obtained by the imaging device, whereinthe imaging devices are placed around the inspection area on at least the first face out of the surface and the rear face, in plan view viewed in a direction perpendicular to the first face, and an imaging element that comprises a light receiving face; and', 'a both-side telecentric optical system that forms an image of the objects located in the inspection area onto the imaging element, wherein, 'each of the imaging devices comprisesthe light receiving face and ...

MANUAL VALVE AND PNEUMATIC DEVICE

A manual valve provided with a valve body and a handle includes a lock mechanism to which a lock is attachable. The lock mechanism includes a movable member provided with first and second plate portions, and a support rod pivotally supporting the movable member. The movable member includes a mating hole engageable with only the handle placed in a fully-closed position. The movable member is guided along a guide hole through which the support rod is inserted to move between a locking position where the mating hole is engaged with the handle to lock the handle and an unlocking position where the mating hole is not engaged with the handle to allow rotation of the handle. 1. A manual valve comprising:a valve body;a handle rotatably attached to the valve body; anda lock mechanism configured to allow attachment of a lock to restrict the handle from rotating from a predetermined position, a movable member having a bent-plate shape and including a first plate portion and a second plate portion continuous with the first plate portion; and', 'a support rod attached to the valve body to pivotally support the movable member,, 'wherein the lock mechanism comprisesthe first plate portion includes an engagement part configured to engage with the handle to restrict rotation of the handle when the handle is placed in the predetermined position, whereas configured not to engage the handle to permit the rotation of the handle when the handle is placed in a position other than the predetermined position, and a guide hole through which the support rod is slidably inserted to guide the movable member between a locking position in which the engagement part is in engagement with the handle and an unlocking position in which the engagement part is out of engagement with the handle; and', 'a lock hole in which the lock is attachable., 'the second plate portion includes2. The manual valve according to claim 1 , whereinthe lock hole is provided at a location in the second plate portion such ...

BUTTERFLY VALVE

A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy. 1. A butterfly valve to be placed on a pipe connecting a vacuum chamber and a vacuum pump to control vacuum pressure in the vacuum chamber , the butterfly valve comprising:a drive unit provided with a motor;a valve unit connected to the drive unit and internally provided with a flow passage and a butterfly valve element; anda rod connected to the motor, the rod extending from the drive unit into the flow passage through an insertion through hole of the valve unit and being connected to the butterfly valve element, an end portion connected to the valve unit;', 'a hollow part between the motor and the end portion so that the rod is inserted through the hollow part;', 'a cylindrical magnetic member placed in the hollow part so that the magnetic member is coaxial with the rod and covers an outer peripheral surface of the rod; and', 'a magnetic fluid filled in a void between an outer peripheral surface of the magnetic member and an inner peripheral surface of the hollow part, and, 'wherein the drive unit includesthe rod is made of non-magnetic corrosion-resistant alloy.2. The butterfly valve according to claim 1 , whereinthe valve unit includes an inlet port configured to allow purge gas to flow in the valve unit, and a purge gas passage configured to allow communication between the inlet port and the insertion through hole, andthe inlet port and the flow passage are communicated with each ...

NON-SEALED BUTTERFLY VALVE AND METHOD FOR PRODUCING THE SAME

In a non-sealed butterfly valve, a butterfly valve element includes a downstream end face that faces a downstream side of a flow passage during valve closing and a maximum outer diameter portion that makes a gap with a minimum distance. The butterfly valve element includes a first chamfered portion that reduces the diameter of the butterfly valve element from the maximum outer diameter portion to the downstream end face over the entire circumference. The first chamfered portion has a taper angle of 5° or less relative to the thickness direction of the butterfly valve element. The first chamfered portion and the downstream end face intersect each other at a ridge line that falls within an imaginary circle that is centered on the central axis of the butterfly valve element and passes the maximum outer diameter portion. 1. A non-sealed butterfly valve to be placed on a pipe connecting a vacuum chamber and a vacuum pump to control vacuum pressure in the vacuum chamber , the non-sealed butterfly valve comprising:a flow passage;a rod placed extending in a direction perpendicular to the flow passage; anda butterfly valve element having a circular disk shape, coupled to the rod and configured to rotate in association with rotation of the rod about a central axis of the rod to open and close the flow passage,the butterfly valve element including an outer peripheral surface configured to make a predetermined gap with respect to an inner peripheral surface of the flow passage during valve closing,wherein the butterfly valve element includes a downstream end face that faces a downstream side of the flow passage during valve closing and the outer peripheral surface having a maximum outer diameter portion that makes the gap with a minimum distance,the outer peripheral surface of the butterfly valve element further includes a chamfered portion extending over an entire outer circumference so that the butterfly valve element has a diameter decreasing from the maximum outer diameter ...

SOLDER PRINT INSPECTING DEVICE

A solder print inspecting device includes three-dimensional measurement lighting unit that directs a specific light at a printed substrate, a CCD camera for imaging the printed substrate that is illuminated by the light, three-dimensional calculating unit that performs a three-dimensional measurement of cream solder based on image data, etc., and displaying unit that displays a three-dimensional image showing a three-dimensional shape of the cream solder, along with displaying an arrow image showing an operating direction of a squeegee in a solder printing machine, an arrow image showing a conveying direction of the printed substrate, etc. 1. A solder print inspecting device for inspecting solder printed on a substrate by a solder printing machine , comprising:lighting unit that directs a specific light toward the substrate;imaging unit that images the substrate illuminated with the light;three-dimensional calculating unit that performs a three-dimensional measurement of the solder based on image data imaged by the imaging unit;inspecting unit that performs an inspection of the solder based on a value measured by the three-dimensional calculating unit; andimage processing unit that performs a process for displaying, on specific displaying unit, a three-dimensional image showing a three-dimensional shape of the solder viewed from an arbitrary viewing direction based on a value measured by the three-dimensional calculating unit;wherein the image processing unit performs a process for displaying a direction image, showing an operating direction of a specific operation performed by the solder printing machine on the substrate, together with the three-dimensional image of the solder.2. A solder print inspecting device as set forth in claim 1 , wherein the image processing unit performs a process for displaying claim 1 , as a direction image showing the operating direction of the specific operation claim 1 , a direction image showing an operating direction of a squeegee.3 ...

BLISTER PACKAGING MACHINE AND METHOD FOR MANUFACTURING BLISTER PACK

A blister packaging machine manufactures a blister pack including a pocket portion formed in a container film of a belt-like shape and a cover film that closes the pocket portion. The blister packaging machine includes: a conveyor that conveys the container film; a preheater that preheats the container film conveyed by the conveyor; a pocket portion former that forms the pocket portion in the container film softened by the preheater; and a support belt that moves in synchronism with the container film conveyed by the conveyor while supporting a part of the container film other than the pocket portion or a part of the container film other than an area where the pocket portion is to be formed, in at least a location from the preheater to a position downstream of the pocket portion former. 1. A blister packaging machine that manufactures a blister pack including a pocket portion formed in a container film of a belt-like shape and a cover film that closes the pocket portion , the blister packaging machine comprising:a conveyor that conveys the container film;a preheater that preheats the container film conveyed by the conveyor;a pocket portion former that forms the pocket portion in the container film softened by the preheater; anda support belt that moves in synchronism with the container film conveyed by the conveyor while supporting a part of the container film other than the pocket portion or a part of the container film other than an area where the pocket portion is to be formed, in at least a location from the preheater to a position downstream of the pocket portion former.2. The blister packaging machine according to claim 1 , whereinthe pocket portion former includes a lower mold that moves up and down and that has a receiving recess extended along a conveying direction of the container film, andthe support belt locates in the receiving recess in a state that the lower mold moves up.3. The blister packaging machine according to claim 2 , whereinthe pocket ...

SPOOL VALVE

A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction. 1. A spool valve comprising:a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction; anda cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion, whereinthe cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port,when opened, the first port communicates with the second port,when closed, the first port does not communicate with the second port, andthe first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.2. A spool valve according to claim 1 , whereinthe first through hole is a circular hole or an elongated circular hole that has a first diameter, as the first width, in the circumferential direction, andthe second through hole is a circular hole or an elongated circular hole that has a second diameter, as the second width different from the first diameter, in the circumferential direction.3. A spool valve according to claim 1 , wherein at least one of the first through hole and the second through hole is a triangular ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes: an optical system that splits incident light into two lights and radiates lights to a measurement object and to a reference surface, and recombines the two lights to emit combined light; a first irradiator that emits first light including first polarized light and entering a first surface; a second irradiator that emits second light including second polarized light and entering a second surface; a first imaging system to which the first output light enters wherein the first output light is emitted from the first surface when the first light enters the first surface; a second imaging system to which the second output light enters wherein the second output light is emitted from the second surface when the second light enters the second surface; and an image processor that performs three-dimensional measurement based on interference fringe images obtained by the first and second imaging systems. 1. A three-dimensional measurement device comprising:an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other of the two lights as reference light to a reference surface, and recombines the two lights to emit combined light as first and second output lights;a first irradiator that emits first light including first polarized light and entering a first surface of the optical system;a second irradiator that emits second light including second polarized light and entering a second surface of the optical system;a first imaging system to which the first output light enters, wherein the first output light is emitted from the first surface when the first light enters the first surface of the optical system;a second imaging system to which the second output light enters, wherein the second output light is emitted from the second surface when the second light enters the second surface of the optical system; andan image processor that performs ...

COMBINATION VALVE

A combination valve includes a valve seat, a diaphragm valve element, a pilot system to automatically bring the diaphragm valve element into or out of contact with the valve seat by use of air pressure, and a manual system to hold the diaphragm valve element in contact with the valve seat even while air pressure is supplied. In the combination valve, a piston rod is provided such that, when the handle is turned to move the manual stem in a seating direction while the diaphragm valve element and the valve seat are separated from each other, the piston rod moves in the seating direction relative to a first piston and a second piston that are pushed by the air pressure in a separating direction. 1. A combination valve comprising:a valve seat;a valve element;a pilot system configured to automatically bring the valve element into or out of contact with the valve seat by use of air pressure; anda manual system configured to hold the valve element in contact with the valve seat even while the air pressure is supplied to the pilot system, a piston;', 'a first urging member configured to urge the piston in a seating direction; and', 'a piston rod slidably extending through the piston, the piston rod being configured to bring the valve element into contact with the valve seat when the piston rod receives an urging force of the first urging member through the piston, and, 'wherein the pilot system includes a manual stem placed coaxially with the piston rod;', 'a handle coupled to the manual stem; and', 'a screw part configured to move the manual stem in an axial direction according to with turning of the handle, and, 'the manual system includesthe piston rod is placed to be movable in the seating direction relative to the piston when the handle is turned to move the manual stem in the seating direction while the valve element is separated from the valve seat.2. The combination valve according to claim 1 , whereinthe piston rod includes a contact portion configured to contact ...

THREE-DIMENSIONAL MEASUREMENT APPARATUS

A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel. 1. A three-dimensional measurement apparatus comprising:an illumination device that irradiates a measurement object with a first and a second light pattern each having a fringe-like light intensity distribution;a camera that takes image data of the measurement object irradiated with the first and the second light pattern;a motor that displaces a position of the measurement object with respect to the camera; and three-dimensionally measures the measurement object based on the image data,', 'obtains a first measurement value of the measurement object per pixel based on a first predetermined number of image data taken with the first light pattern at a first predetermined number of phases at a first position,', 'obtains at least one of a gain value and an offset value per pixel based on the first predetermined number of image data,', the one of the gain value and the offset value, and', 'a second predetermined number of image data taken with the second light pattern at a second predetermined number of phases at a second position shifted by a half of a pixel in a predetermined direction from the first position, wherein the second predetermined number is smaller than ...

LOW PASS FILTER

A low pass filter including: a coil that includes a band-shaped conductor and is wound a plurality of times around an axis; a capacitor that has one terminal connected to the conductor and the other terminal connected to ground; a cooling plate in contact with an end surface of the wound coil with respect to a direction of the axis; and a ceramic layer that has a flat surface and is disposed on the end surface of the would coil facing the direction of the axis, wherein the ceramic layer contacts the cooling plate, and the cooling plate includes a flow path through which water flows. 1. A low pass filter comprising:a coil that comprises a band-shaped conductor and is wound a plurality of times around an axis;a capacitor that has one terminal connected to the conductor and the other terminal connected to ground;a cooling plate in contact with an end surface of the wound coil with respect to a direction of the axis; anda ceramic layer that has a flat surface and is disposed on the end surface of the would coil facing the direction of the axis, whereinthe ceramic layer contacts the cooling plate, andthe cooling plate comprises a flow path through which water flows.2. A low pass filter according to claim 1 , wherein the coil comprises a laminate having the conductor claim 1 , an insulation film claim 1 , and an adhesive film laminated in this order claim 1 , and the laminate is wound a plurality of times around the axis.3. A low pass filter according to claim 2 , wherein a frequency characteristic of the coil indicative of the relation between impedance of the coil and frequency is adjustable based on a number of windings of the coil claim 2 , a width of the conductor claim 2 , and a thickness of the insulation film.4. A low pass filter according to claim 1 , wherein a frequency to be eliminated is predetermined as an object frequency claim 1 , anda frequency at which the coil has a maximal impedance is shifted a predetermined frequency from the object frequency.5. A low ...

FLUID CONTROL VALVE AND FLUID CONTROL VALVE MANUFACTURING METHOD

A fluid control valve and manufacturing method thereof, wherein, when a pressing force acts on the engagement surface between a diaphragm member and a valve seat-contacting member, the valve seat-contacting member is not displaced and no gap is formed. The diaphragm member made of a first fluorine-based resin material is provided with a diaphragm membrane and a rod-shaped part in the center of the diaphragm membrane. The valve seat-contacting member made of an injection-moldable second fluorine-based resin material is provided with a ring-shaped sealing surface and a recess on the opposite side from the ring-shaped sealing surface. The rod-shaped part is partly fitted into the recess. A ring-shaped recessed is formed on outer circumference of a portion of the rod-shaped part. A small diameter recess is formed on the inner circumference of the recess. The ring-shaped recess section and the small diameter recess adhere closely to form the engagement surface. 1. A fluid control valve comprising: a valve main body provided with a valve seat; a valve element provided with a valve-seat contact member to be in and out of contact with the valve seat and a diaphragm member; and a drive section configured to move the valve element in its axial direction , whereinthe diaphragm member made of a first fluorine resin material is provided with a web portion and a bar-like portion formed in a center of the web portion,the valve-seat contact member made of a second fluorine resin material, which is allowed to be insert-molded, is provided with a valve-seat contact surface and a recessed portion on a side opposite to the valve-seat contact surface,a part of the bar-like portion is fitted in the recessed portion, andthe bar-like portion is formed on its outer circumference with an outer circumferential surface, the recessed portion is formed on its inner circumference with an inner circumferential surface, and the outer circumferential surface and the inner circumferential surface are ...

BOARD INSPECTION APPARATUS

A board inspection apparatus is disclosed, which includes one surface-side irradiator that irradiates a first area on a surface side of a board with first light, a surface-side camera that takes an image of the first area, one rear face-side irradiator that irradiates a second area on a rear face side of the board with second light, a rear face-side camera that takes an image of the second area; and a controller that inspects the first area based on image data obtained from the surface-side camera and the second area based on image data obtained from the rear face-side camera. 1. A board inspection apparatus comprising:a surface-side irradiator that irradiates a first predetermined inspection area on a surface side of a board with first predetermined light;a surface-side camera that takes an image of the first predetermined inspection area irradiated with the first predetermined light;a rear face-side irradiator that irradiates a second predetermined inspection area on a rear face side of the board with second predetermined light;a rear face-side camera that takes an image of the second predetermined inspection area irradiated with the second predetermined light; and the first predetermined inspection area based on a plurality of image data obtained from the surface-side camera, and', 'the second predetermined inspection area based on a plurality of image data obtained from the rear face-side camera, wherein, 'a controller that inspects'} starting emission of the first predetermined light and stopping emission of the second predetermined light to perform one of the first plurality of imaging processes, and subsequently stopping emission of the first predetermined light and starting emission of the second predetermined light to perform one of the second plurality of imaging processes, or', 'starting emission of the second predetermined light and stopping emission of the first predetermined light to perform one of the second plurality of imaging processes, and ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area. 1. A three-dimensional measurement device , comprising:a predetermined optical system that splits predetermined incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light;a light emitter that emits predetermined light entering the predetermined optical system;an imaging system that takes an image of output light emitted from the predetermined optical system; andan image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system, wherein obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area obtained by the imaging system;', 'obtains phase information of ...

FLOWMETER

A flowmeter including a sensor passage disposed with a sensor chip for measuring a flow rate and an orifice passage as a bypass passage placed with respect to the sensor passage is provided. The orifice passage has a passage diameter which is smaller than a passage diameter of an inflow passage, a distribution orifice is placed on an inlet side of the sensor passage, and the orifice passage and the distribution orifice are configured such that changing trends in an effective sectional area becomes same in a graph including a vertical axis indicating the effective sectional area and a lateral axis indicating a fluid pressure of a fluid. 1. A flowmeter comprising a sensor passage disposed with a sensor for measuring a flow rate and a bypass passage placed with respect to the sensor passage , whereinthe flowmeter includes a distribution orifice provided on an inlet side of the sensor passage and a main orifice provided in the bypass passage, andin a graph including a vertical axis indicating an effective sectional area and a lateral axis indicating a fluid pressure of a fluid, a changing trend in the effective sectional area of the main orifice and a changing trend in the effective sectional area of the distribution orifice are similar.2. The flowmeter according to claim 1 , whereinin the graph including the vertical axis indicating the effective sectional area and the lateral axis indicating the fluid pressure of the fluid, the effective sectional area of the distribution orifice decreases to the left in a region where the fluid pressure is negative, andin the graph including the vertical axis indicating the effective sectional area and the lateral axis indicating the fluid pressure of the fluid, the effective sectional area of the main orifice decreases to the left in the region where the fluid pressure is negative.3. The flowmeter according to claim 1 , whereinthe main orifice in a nozzle-like shape has a length in a pipe-axis direction twice or more as long as a ...

BOARD INSPECTION APPARATUS

A board inspection apparatus is disclosed, which includes a surface-side irradiator irradiating a surface of each inspection area of a board, a surface-side camera taking a surface-side image of the surface, a rear face-side irradiator irradiating a rear face of each inspection area, a rear face-side camera taking a rear face-side image of the rear face, and a controller moving the surface-side irradiator and the surface-side camera to a position corresponding to the surface of each inspection area, moving the rear face-side irradiator and the rear face-side camera to a position corresponding to the rear face of each inspection area, and inspecting the surface and the rear face of each inspection area based on the surface-side image and the rear face-side image, respectively. 1. A board inspection apparatus comprising:a surface-side irradiator that irradiates a surface side of each of a plurality of inspection areas of a board;a surface-side camera that takes a surface-side image of the surface side irradiated by the surface-side irradiator;a rear face-side irradiator that irradiates a rear face side of each of the inspection areas;a rear face-side camera that takes a rear face-side image of the rear face side irradiated by the rear face-side irradiator; and moves the surface-side irradiator and the surface-side camera to a position corresponding to the surface side of each of the inspection areas;', 'moves the rear face-side irradiator and the rear face-side camera to a position corresponding to the rear face side of each of the inspection areas; and', 'inspects the surface side and the rear face side of each of the inspection areas based on the surface-side image and the rear face-side image, respectively, wherein, 'a controller thatthe surface-side camera and the rear face-side camera alternately take the surface-side image and the rear face-side image, andthe surface-side camera takes the surface-side image when the rear face-side irradiator stops the ...

INSPECTION DEVICE AND PTP PACKAGING MACHINE

An inspection device for inspecting an inspection object portion in a PTP sheet, the inspection device including: an irradiator that irradiates the inspection object portion with light; an imaging device that takes an image of the inspection object portion irradiated with the light; a processor that detects a defect in the inspection object portion from the taken image by using a predetermined luminance threshold value, and determines whether the inspection object portion is non-defective; a verification image generating circuit that generates a verification image in which a virtual defective image is placed in a non-defective image; and a threshold value verifier that causes the processor to determine whether the inspection object portion is non-defective or defective by using the verification image, in place of the image taken by the imaging device, and to verify the luminance threshold value based on a determination result by the processor. 1. An inspection device for inspecting an inspection object portion , in a Press-Through-Pack (PTP) sheet comprising a pocket portion formed in a container film to house a content , and a cover film bonded to the container film to close the pocket portion , or in a portion of a PTP film that forms the PTP sheet , an irradiator that irradiates the inspection object portion with light;', 'an imaging device that takes an image of the inspection object portion irradiated with the light emitted from the irradiator;', 'a processor that detects a defect in the inspection object portion from the image taken by the imaging device by using a predetermined luminance threshold value, and determines whether the inspection object portion is non-defective or defective;', 'a verification image generating circuit that generates a verification image in which a virtual defective image is placed in a non-defective image determined as non-defective by the processor; and', 'a threshold value verifier that causes the processor to determine whether ...

INSPECTION DEVICE AND PTP PACKAGING MACHINE

An inspection device for inspecting an inspection object of a PTP sheet including a pocket portion formed in a container film, and a cover film mounted to the container film to close the pocket portion, or a portion of a PTP film forming the PTP sheet, includes: an irradiator that irradiates the inspection object with a predetermined light; an imaging device that takes an inspection image of the irradiated inspection object and a peripheral portion of the inspection object; and a processor that: determines whether the inspection object is defective or non-defective based on inspection image data of the inspection object taken from the inspection image. The inspection image data includes data of respective pixels corresponding to an inspection target area subjected to the defective/non-defective determination, and data of respective pixels corresponding to a non-inspection target area that excludes the inspection target area. 1. An inspection device for inspecting an inspection object of a Press-Trough-Pack (PTP) sheet comprising a pocket portion formed in a container film to house a content , and a cover film mounted to the container film to close the pocket portion , or a portion of a PTP film forming the PTP sheet , the inspection device comprising:an irradiator that irradiates the inspection object with a predetermined light;an imaging device that takes an inspection image of the irradiated inspection object and a peripheral portion of the inspection object; and determines whether the inspection object is defective or non-defective based on inspection image data of the inspection object taken from the inspection image, wherein the inspection image data includes data of respective pixels corresponding to an inspection target area subjected to the defective/non-defective determination, and data of respective pixels corresponding to a non-inspection target area that excludes the inspection target area;', 'converts part of the data corresponding to the non-inspection ...

GAS SUPPLY UNIT AND GAS SUPPLY METHOD

A gas supply unit is configured such that when a first gas whose temperature has been controlled at a first temperature is supplied to a chamber through an upper device and then a second gas which starts a chemical reaction at a reaction start temperature lower than the first temperature is supplied to the chamber through the upper device, before cleaning gas is supplied to the chamber through the defined between a base plate and the upper device to cool the upper device down to the reaction start temperature or lower. 1. A gas supply unit configured to supply a first gas whose temperature has been controlled at a first temperature or a second gas that starts a chemical reaction at a reaction start temperature lower than the first temperature to a chamber , the first gas and the second gas being selectively supplied to the gas supply unit , the gas supply unit comprising:a base plate;an upper device supported above the base plate, the upper device having a passage through which the first gas and the second gas are selectively caused to flow;a plurality of middle blocks placed between the base plate and the upper device, the middle blocks each including a passage connected to the passage of the upper device and defining a space part between the base plate and the upper device;a first heater configured to heat the upper device at the first temperature; anda cooling member configured to supply cooling air to the space part to cool the upper device down to the reaction start temperature or lower.2. The gas supply unit according to claim 1 , whereinthe first heater is a planar heater, andthe cooling member is a cooling plate member made of aluminum and placed between the first heater and the upper device so that the cooling member is in surface contact with each of the first heater and the upper device.3. The gas supply unit according to claim 2 , wherein the cooling plate member includes a cooling passage through which the cooling air is supplied to the space part claim ...

FLOW RATE VERIFICATION UNIT

A flow rate verification unit that uses the pressure variation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve. 1. A flow rate verification unit to perform flow rate verification for an integrated gas unit provided with a plurality of gas supply lines arranged in parallel , each of the gas supply lines including a mass flow controller and a flow rate regulation valve , the flow rate verification unit comprising a pressure gauge , a thermometer , and a shutoff valve which are arranged in series , and the flow rate verification unit being configured to verify a flow rate of each mass flow controller one at a time by calculating a volume between the flow rate regulation valve and the shutoff valve by use of a pressure variation value of a pressure measured value per unit time measured by the pressure gauge and a temperature measured value measured by the thermometer in a state in which the shutoff valve is closed ,wherein the flow rate verification unit further includes a connection part provided on an upstream side of the pressure gauge, the connection part being configured to be detachably connected with the integrated gas unit,a verification gas input valve for controlling input of verification gas, a verification-side mass flow controller for measuring a flow rate of the verification gas, and a verification-side flow rate ...

CONNECTED PART SEAL STRUCTURE, AND SEAL MEMBER

In a connected-part seal structure configured to couple a first connected part and a second connected part through a seal member, the taper angles of first and second inner pressure-contact tapered parts provided in the seal member are smaller than the taper angles of first and second inner tapered parts provided in the first and second connected parts. Thus, a pressure-contact force of first and second inside tapered pressure-contact allowances are larger as the inside tapered pressure-contact allowances are located closer to base end parts of first and second annular protrusions. 1. A connected-part seal structure configured to couple a first connected part and a second connected part through a seal member , wherein both or one of a connection end face of the first connected part and a connection end face of the second connected part includes:a passage wall including an open end that opens in the connection end face;an annular protrusion annularly extending along an outer periphery of the open end of the passage wall, the annular protrusion protruding in an axial direction of the passage wall; andan inner mounting groove provided inside the annular protrusion in a radial direction, andthe seal member has an annular shape and includes an annular groove in both or one of end faces, in which the annular protrusion is press-fitted,wherein the inner mounting groove includes an inner tapered part provided inside a base end part of the annular protrusion in the radial direction and at a sharp angle to the annular protrusion, the inner tapered part being continuous with the passage wall,the seal member includes an inner peripheral surface including an inner pressure-contact tapered part formed along an end portion positioned close to the end face in which the annular groove opens, the inner pressure-contact tapered part being slanted corresponding to the inner tapered part, andthe inner pressure-contact tapered part has a taper angle smaller than a taper angle of the ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes: a projector including: a light source that emits a predetermined light; a grid that converts the light from the light source into a predetermined striped pattern; and a driver that moves the grid, and the projector projecting the striped pattern onto a measurement object; an imaging device that takes an image of the measurement object on which the striped pattern is projected; and a controller that: controls the projector and the imaging device to obtain a plurality of image data having different light intensity distributions; executes three-dimensional measurement of the measurement object by phase shifting based on the image data having different light intensity distributions; and obtains each of the image data among the image data having different light intensity distributions. 1. A three-dimensional measurement device comprising: a light source that emits a predetermined light;', 'a grid that converts the light from the light source into a predetermined striped pattern; and', 'a driver that moves the grid, wherein the projector projects the striped pattern onto a measurement object;, 'a projector comprisingan imaging device that takes an image of the measurement object on which the striped pattern is projected; and controls the projector and the imaging device to obtain a plurality of image data having different light intensity distributions;', 'executes three-dimensional measurement of the measurement object by phase shifting based on the plurality of image data having different light intensity distributions; and', moving the grid to a predetermined position and temporarily stopping the grid at the predetermined position; and', 'continuously executing imaging during a predetermined period including at least a stop period of the grid and including part of a moving period of the grid prior to the stop period and/or part of a moving period of the grid after the stop period, or', 'executing imaging in a plurality of ...

FLUID CONTROL VALVE

A fluid control valve includes a multi-stage piston actuator unit with first piston and second pistons coaxially and slidably arranged therein and a valve unit provided with an inlet port for inflow of a control fluid and an outlet port for outflow of the control fluid. The first and second pistons are slidable in a sliding direction perpendicular to an imaginary line connecting the center of the inlet port and the center of the outlet port. The multi-stage piston actuator unit has a smaller thickness in a direction perpendicular to the imaginary line and perpendicular to the sliding direction than the thickness of the valve unit in the direction perpendicular to the imaginary line and perpendicular to the sliding direction. The first and second pistons have either an elliptic or oval cross-section taken perpendicular to the sliding direction, the cross-section having a long axis parallel to the imaginary line. 1. A fluid control valve comprising:a multi-stage piston actuator unit including a plurality of pistons arranged coaxially and slidably within the multi-stage piston actuator unit;a valve unit provided with an inlet port configured to allow a control fluid to flow in the valve unit and an outlet port configured to allow a control fluid to flow out of the valve unit,wherein the pistons are slidable in a sliding direction perpendicular to an imaginary line connecting a center of the inlet port and a center of the outlet port,the multi-stage piston actuator unit has a thickness defined in a direction that is perpendicular to the imaginary line and perpendicular to the sliding direction, the thickness being equal to or smaller than a thickness of the valve unit in the direction that is perpendicular to the imaginary line and perpendicular to the sliding direction, andthe plurality of pistons has either one of an elliptic cross-section and an oval cross-section, taken perpendicular to the sliding direction, the cross-section having a long axis extending parallel ...

PILOT-OPERATED SOLENOID VALVE

A pilot-operated solenoid valve includes a pilot valve unit having a fixed core and a movable core, and a passage block formed with a valve seat which a diaphragm valve element comes into contact or separates from. The pilot valve unit includes an NO port, a common port, and an NC port. The passage block is formed with an inlet port, an outlet port, a back chamber, an NO passage, a common passage, an NC passage an external exhaust passage, and an internal exhaust passage. The solenoid valve further includes a first or second metal ball to seal the external exhaust passage or the internal exhaust passage. The passage block includes a flat cover formed with a communication passage for communicating the recess with the common port. 1. A pilot-operated solenoid valve provided with a pilot valve unit having a fixed core and a movable core , and a passage block formed with a valve seat which a valve element comes into contact or separates from ,wherein the valve element is a diaphragm valve element,the pilot valve unit includes an NO port, a common port, and an NC port,the passage block is formed with an inlet port, an outlet port, a back chamber defined by the diaphragm valve element, an NO passage for communicating the inlet port with the NO port, a common passage for communicating the back chamber with the common port, an NC passage communicated with the NC port, an external exhaust passage for communicating the NC passage with atmosphere, and an internal exhaust passage for communicating the outlet port with the NC passage,the pilot-operated solenoid valve further includes a sealing member to seal one of the external exhaust passage and the internal exhaust passage,the passage block has a rectangular parallelepiped shape having a pair of wide opposite surfaces and four side surfaces surrounding the wide opposite surfaces, the four side surfaces including a first surface attached thereon with the pilot valve unit and a second surface formed with at least one of the ...

INSPECTION DEVICE, PTP PACKAGING MACHINE AND CALIBRATION METHOD OF INSPECTION DEVICE

An inspection device includes: an illumination device that irradiates standard and inspection objects with near-infrared light; a spectroscope that disperses reflected light; an imaging device that takes images of first and second optical spectrums of the reflected light dispersed by the spectroscope to obtain standard spectroscopic image data and inspection spectroscopic image data; and a processor. The processor executes a predetermined arithmetic operation with regard to at least one of (i) each pixel row of the standard spectroscopic image data perpendicular to a wavelength dispersion direction and (ii) each pixel column of the standard spectroscopic image data parallel to the wavelength dispersion direction. The processor, based on luminance values of pixels belonging to the pixel row or column, determines a characteristic of the pixel row and grasps a wavelength sensitivity characteristic of the imaging element under the near-infrared light emitted from the illumination device. 1. An inspection device that performs an inspection using spectral analysis based on spectroscopic image data , the inspection device comprising:an illumination device that irradiates a standard object and an inspection object with near-infrared light;a spectroscope that disperses reflected light reflected from the standard object and the inspection object irradiated with the near-infrared light;an imaging device that comprises an imaging element comprising a plurality of light-receiving elements in a matrix arrangement, and takes images of first and second optical spectrums of the reflected light dispersed by the spectroscope to obtain standard spectroscopic image data of the standard object and inspection spectroscopic image data of the inspection object; and executes a predetermined arithmetic operation with regard to at least one of (i) each pixel row of the standard spectroscopic image data perpendicular to a wavelength dispersion direction of the first optical spectrum of the ...

SOLDER PRINTING INSPECTION DEVICE, SOLDER PRINTING INSPECTION METHOD AND METHOD OF MANUFACTURING SUBSTRATE

A solder printing inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine, and that inspects the solder on the substrate on which a thermosetting adhesive is applied, the solder printing inspection device including: an irradiator that irradiates the solder with light; an imaging device that takes an image of the irradiated solder; a processor that: generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders; generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group; outputs mounting position adjustment information to the component mounting machine. 1. A solder printing inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine , and that inspects the solder on the substrate on which a thermosetting adhesive is applied , the solder printing inspection device comprising:an irradiator that irradiates the solder with light;an imaging device that takes an image of the irradiated solder; and generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders;', 'generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group;', the mounting position adjustment information indicates an amount of positional misalignment and a direction of positional misalignment of ...

THREE-DIMENSIONAL MEASUREMENT DEVICE

A three-dimensional measurement device includes: a projector that includes: a light source that emits predetermined light; and a reflective optical modulator that converts the predetermined light into a predetermined striped pattern, wherein the projector projects the predetermined striped pattern onto a measurement object at a predetermined number of frames per unit time; an imaging device that takes an image of the measurement object projected with the predetermined striped pattern; a processor that: controls the projector and the imaging device to sequentially project a plurality of different ones of the predetermined striped pattern and take images of the plurality of different ones of the predetermined striped pattern to obtain a plurality of image data having different light intensity distributions; and executes three-dimensional measurement of the measurement object based on the plurality of image data. 1. A three-dimensional measurement device , comprising: a light source that emits predetermined light; and', 'a reflective optical modulator that converts the predetermined light into a predetermined striped pattern, wherein the projector projects the predetermined striped pattern onto a measurement object at a predetermined number of frames per unit time;, 'a projector that comprisesan imaging device that takes an image of the measurement object projected with the predetermined striped pattern; controls the projector and the imaging device to sequentially project a plurality of different ones of the predetermined striped pattern and take images of the plurality of different ones of the predetermined striped pattern to obtain a plurality of image data having different light intensity distributions; and', 'executes three-dimensional measurement of the measurement object based on the plurality of image data, wherein, 'a processor thatthe reflective optical modulator comprises a plurality of two-dimensionally arranged pixels that are alternatively changeable ...

SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION METHOD AND METHOD OF MANUFACTURING SUBSTRATE

A substrate inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine, and that inspects the solder and a thermosetting adhesive applied on the substrate, the substrate inspection device including: an irradiator that irradiates the solder and the adhesive with light; an imaging device that takes an image of the irradiated solder and the irradiated adhesive; and a processor that: generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders; generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group. 1. A substrate inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine , and that inspects the solder and a thermosetting adhesive applied on the substrate , the substrate inspection device comprising:an irradiator that irradiates the solder and the adhesive with light;an imaging device that takes an image of the irradiated solder and the irradiated adhesive; and generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders;', 'generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group;', 'generates, based on the design data or the manufacturing data, ideal adhesive inspection reference information indicating a reference inspection position and/or a ...

INSPECTION DEVICE, PTP PACKAGING MACHINE AND INSPECTION METHOD

An inspection device used in manufacture of a Press Through Package (PTP) sheet includes a container film including a pocket portion in which a content is placed and a cover film closing the pocket portion. The inspection device includes: an illumination device that irradiates the content with near-infrared light; a spectroscope that disperses reflected light from the content irradiated with the near-infrared light; an imaging device that takes an image of an optical spectrum of the reflected light dispersed by the spectroscope and acquires spectroscopic image data; and a controller that obtains spectral data of the content based on the spectroscopic image data, executes an inspection of the content based on the spectral data of the content, and executes good or poor quality judgment of the content. 1. An inspection device used in manufacture of a Press Through Package (PTP) sheet that comprises a container film including a pocket portion in which a content is placed and a cover film closing the pocket portion , the inspection device comprising:an illumination device that irradiates the content with near-infrared light;a spectroscope that disperses reflected light from the content irradiated with the near-infrared light;an imaging device that takes an image of an optical spectrum of the reflected light dispersed by the spectroscope and acquires spectroscopic image data; and obtains spectral data of the content based on the spectroscopic image data,', 'executes an inspection of the content based on the spectral data of the content,', 'executes good or poor quality judgment of the content by determining whether each of spectral intensities is within an allowable range, wherein the spectral intensities are respectively in N specific wavelength bands out of a plurality of wavelength bands included in the spectral data of the content, where N is a natural number of not less than 1,', 'successively stores in time series the spectral data of the content determined as a non ...

Clamp device

Provided is a lightweight and compact clamp device in which the waiting position of a first clamp lever at the time when the clamp device is unclamped can be easily adjusted by a simple structure. The clamp device (10) comprises a base (21), a cylinder actuator (31) mounted on the base (21) and capable of performing linear motion, and the first clamp lever (42). Based on the linear motion of the cylinder actuator (31), the arm (41) rotates the first clamp lever (42) in the direction to move near to and away from a second clamp lever (22). A mounting means for changing the mounting position of the cylinder actuator (31) on the base (21) along the direction of the linear motion of the cylinder actuator (31) is provided between the base (21) and the cylinder actuator (31).

Chemical solution control valve

An object is to provide a chemical solution control valve which, in controlling supply of a chemical solution containing particles such as abrasive particles, is capable of dispersing the particles in the chemical solution so as to prevent flocculation thereof. In a chemical solution control valve (10), the outer peripheral end of a projection (23)(the outer peripheral bottom of a valve seat (26)) is provided with a barrier (40). The barrier (40) is disposed such that an angle (α) defined by the centerline (L1) of an output flow path (21) and a line (L2) connecting the center (C) of a valve hole (26a) and the end of the barrier (40) is 30 - 90 degrees. Further, the height (H) of the barrier (40) with the valve disk abutment surface (26c) of the valve seat (26) used as a reference is about half the amount of travel of a diaphragm valve disk (27).

Chemical supply system and chemical supply pump

A chemical supply system in which suction or delivery flow rate of chemical is controlled with high precision while troubles incident to heat generation is removed. In a chemical supply pump (10), a bellows partition member (12) as a variable volume member is housed in a pump housing (11) which is used to section a pump chamber (13) from a pressure action chamber (14). The pressure action chamber (14) is connected with an electro-pneumatic regulator (28). The bellows partition member (12) is coupled with a rod (33) and moving amount of which is detected by a position detector (36). A controller (40) sets a target working amount of the bellows when the chemical is sucked or delivered, and controls the electro-pneumatic regulator (28) based on the difference between the target working amount and an actual working amount determined from detection results by the position detector (36).

Relative pressure control system and relative flow rate control system

The invention provides a relative pressure control system of simple construction capable of accurately adjusting partial pressure ratio for working gas and reliably removing the working gas from a working gas supply pipeline in an emergency. It comprises a plurality of normally open type air-operated valves (8) connected to a working gas supply pipeline supplied with working gas, pressure sensors (3) individually connected in series with the air-operated valves (8) for detecting the pressure delivered from the air-operated valve, a controller (25) for controlling a operating pressure for the air-operated valve (8) on the basis of the pressure detected by the pressure sensor (3), a hard interlock solenoid valve (59) for associating the plurality of air-operated valves (8) such that normally at least one valve is opened, the arrangement being such that of the plurality of air-operated valves (8), a specified air-operated valve (8) has its degree of opening adjusted so as to deliver the working gas at a predetermined partial pressure ratio.

Manual valve where mal function is prevented

　本発明の課題は、誤動作を防止する一方で弁を開閉させる際の操作性を損なわないようにした誤動作防止手動弁を提供することである。この課題を解決するために本発明は、誤動作防止手動弁１では、ロック機構としてハウジング７１に対して回らないように設けられた平行ピン７５と、平行ピン７５に係合するハンドル７２に設けられたサブハンドル７３とを有し、平行ピン７５またはサブハンドル７３がロックバネ７７によって付勢され、サブハンドル７３が平行ピン７５に係合してハンドル７２の回転を禁止するものとした。また、誤動作防止手動弁２では、ロック機構としてハウジング１７１に対して回らないように設けられるスプリングピン１７５と、ハンドル１７２に設けられスプリングピン１７５が挿入されるカム溝１７２ａと、ハンドル１７２と一体であってスプリング１７７によって付勢されるサブハンドル１７３とからなるものとした。

Three-dimensional measuring instrument, filter striped plate, and illuminating means

A three-dimensional measuring instrument for measuring the three-dimensional shape of an object of measurement by a phase shift method in a short measurement time. A printed state inspecting instrument (1) comprises a table on which a printed board (K) printed with a solder paste (H) is placed, an illuminating device (3) constituting illuminating means for projecting three sinusoidal light components having different phases onto the surface of the printed board (K), a CCD camera (4) constituting imaging means for imaging the portion of the printed board (K) onto which the patterns are projected, a white light illuminator (L) for illuminating white light onto the surface of the printed board (K), and a laser pointer for measuring a reference height. A controller (7) specifies the area where the solder paste (H) is present from image data acquired by the illumination by the white light illuminator (L), and calculates the height of the solder paste (H) from the image data acquired by the illumination by the illuminating device (3) by a phase shift method.

流路ブロック

本発明は、圧力損失を小さくでき、極長の流路を形成でき、複雑な流路が形成でき、軽量化が図れる流路ブロックと、その製造方法を提供することを目的とする。本発明の流路ブロック１は、貫通孔２１と貫通孔２１に連通する溝２２が形成されるブロック本体１１と、溝２２を覆う蓋部材１２とを有するので、切削工具で溝２２の深さや幅を調整することで圧力損失を小さくでき、切削工具にて溝２２を長く形成して蓋部材１２により溝２２を覆うことにより極長の流路を形成でき、切削工具にて溝２２を自由自在に形成できるので複雑な流路が形成でき、かつブロック本体１１の板厚を小さくでき軽量化が図れる。  

流量制御弁

　本発明は、流路抵抗を小さくして流体を流れやすくすることができ、流体の流れを安定させることができ、高速で正確な弁開度へ変更することができ、弁開および弁閉の動作の応答性を高くすることができ、寿命を長くすることができる流量制御弁を提供することを目的とする。本発明は、流路入口ポート１６と弁体２１と直線変換機構と流路出口ポート１７が直線上に配置される流量制御弁において、サーボモータ３１の回転駆動を伝達するボールねじナット２７と回転駆動を直線駆動に変換するボールねじ２３と直線駆動を伝達するスプラインが形成されるボールねじ主軸２６とを備える直線変換機構と、流路入口ポート１６および流路出口ポート１７の中心軸方向に平行移動するものであってボールねじ主軸２６と一体の弁体２１とを有することを特徴とする。  

薬液供給システム

　作動時にポンプからの発熱を防止し、先端ノズルから薬液を滴下させる吐出ポンプの小型化を実現できる薬液供給システムを提供する。 　レジストボトル１５の上層空間１５ａに圧縮空気を供給することで吐出ポンプ１１のポンプ室内に陽圧とされた薬液を加圧圧送することにより、ポンプ室内にレジスト液Ｒが充填される。このため、吐出ポンプ１１の可撓性膜を作動室側へ駆動してレジスト液Ｒの吸入動作を行わせるべく、スプリング等を使用するという従来の構成を採用する必要がなくなる。これは、電動機を排除して熱によるダメージを半導体ウェハ４７に与える虞がないのは勿論のこと、吐出ポンプ１１自体をより一層小型化できる。

汽缸控制裝置及活塞致動裝置

[課題] 提供一種能夠使用於對控制物件進行控制的控制結構小型化化、且能夠縮短控制物件的響應時間的汽缸控制裝置及活塞致動裝置。 [解決手段] 汽缸控制裝置（3）的CPU（51）接收到經由操作部（35）輸入的各時間的操作壓力的設定值時，基於此而生成動作模式，並儲存於EEPROM（54）中。CPU（51）通過操作部（35）或上位控制器（9）從儲存在EEPROM（54）中的多個動作模式中指定某個動作模式時，從EEPROM（54）中讀取所被指定的動作模式。然後，CPU（51）根據所讀取的動作模式，控制供排氣部（8）使得汽缸（17）的操作壓力與各時間的操作壓力的設定值一致，由此對活塞致動裝置（1）的動作進行前授控制。

薬液供給用ポンプ

　ダイアフラムの作動室側への変形を短時間且つ確実とし、ポンプ室内への薬液充填時間の短縮と薬液充填量を十分に確保できる薬液供給用ポンプを提供する。 　作動室２６（凹設部２２ａ）の内壁面２２ｃには、その中心部に給排通路２２ｂの開口２２ｄが位置し、その給排通路２２ｂの開口２２ｄから該内壁面２２ｃの周縁部側に展開する十字状の通気溝２２ｅが形成される。これにより、薬液の吸入時において、作動室２６内の作動エアが給排通路２２ｂを通じて排出（吸引）されて該作動室２６内が負圧になる。開口２２ｄが作動室２６の周縁部まで延びる通気溝２２ｅと連通しているので、ダイアフラム２３の中央部が先に給排通路２２ｂの開口２２ｄ部分を覆う事態が生じた場合、先に当接した中央部から外側に位置する通気溝２２ｅから作動室２６内の作動エアの排出（吸引）が継続可能となる。