TARGET AGE COMPENSATION METHOD FOR PERFORMING STABLE REACTIVE SPUTTERING PROCESSES

16-06-2016 дата публикации

Номер:

US20160168686A1

Автор: Denis Kurapov, Siegfried Krassnitzer, KURAPOV DENIS, KRASSNITZER SIEGFRIED

Принадлежит: OERLIKON SURFACE SOLUTIONS AG, TRUBBACH

Контакты:

Номер заявки: 75-25-1490

Дата заявки: 30-06-2014

CPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/0 C23C14/00 C23C14/004 C23C14/0042 C23C14/06 C23C14/064 C23C14/0641 C23C14/1 C23C14/14 C23C14/3 C23C14/34 C23C14/348 C23C14/3485 C23C14/349 C23C14/3492 C23C14/35 C23C14/5 C23C14/54 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/0 H01J2237/00 H01J2237/006 H01J2237/2 H01J2237/24 H01J2237/245 H01J2237/2458 H01J2237/24585 H01J2237/3 H01J2237/33 H01J2237/332 H01J2237/3323 H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/324 H01J37/3244 H01J37/32449 H01J37/329 H01J37/3293 H01J37/32935 H01J37/34 H01J37/340 H01J37/3405 H01J37/342 H01J37/3426 H01J37/346 H01J37/3467 H01J37/347 H01J37/3476

IPC - классификация

C C2 C22 C22C C22C9 C22C9/C22C9/0 C22C9/00 C23 C23C C23C1 C23C14 C23C14/C23C14/0 C23C14/00 C23C14/1 C23C14/14 C23C14/3 C23C14/35 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/34 H01J37/340 H01J37/3405

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