Laser cleaning method and device for improving uniformity of laser cleaning surface

30-01-2024 дата публикации

Номер:

US0011883859B2

Автор: XUECHUN LIN, ZHIYAN ZHANG, Haijun Yu, Houwang Zhu, Quansheng Zeng, ZHIYONG DONG, HAO LIANG, Wenhao MA, HONGYANG WANG

Принадлежит: Institute of Semiconductors, Chinese Academy of Sciences, CHANGSHA AERONAUTICAL VOCATIONAL AND TECHNICAL COLLEGE

Контакты:

Номер заявки: 86-04-1713

Дата заявки: 22-12-2020

CPC - классификация

B B0 B08 B08B B08B7 B08B7/B08B7/0 B08B7/00 B08B7/004 B08B7/0042 B2 B23 B23K B23K2 B23K26 B23K26/B23K26/0 B23K26/06 B23K26/064 B23K26/07 B23K26/073 B23K26/0738 B23K26/08 B23K26/082

IPC - классификация

B B0 B08 B08B B08B7 B08B7/B08B7/0 B08B7/00 B2 B23 B23K B23K2 B23K26 B23K26/B23K26/0 B23K26/06 B23K26/07 B23K26/073 B23K26/08 B23K26/082 H H0 H01 H01G H01G5 H01G5/H01G5/0 H01G5/01 H01G5/019

Цитирование НПИ

250/236
318/638
356/613
358/1.9
First Chinese Office Action dated Jul. 7, 2020 for Chinese patent application No. 201911353814.2, 17 pages including English translation.