Composite plating process and equipment for magnetron sputtering-laser heating

Technical field:

The present invention relates to plasma surface metallurgy, in particular to a surface of the conductive material to form the alloy-layer for magnetron sputtering-laser heating of composite plating process and apparatus.

Background technology:

At present, by gas discharge plasma surface modification of various apparatus and process of the method is mainly composed of a: double layer glow ion metal equipment and technology, multi-arc ion diffusion coating equipment and technology, magnetron sputtering ion plating apparatus and technology, DC two-pole sputtering, DC three-pole or four-pole sputtering plating apparatus and technology, and the like. Equipment and process for the above method, in addition to the double-layer glow ion metal equipment and technology, the remaining apparatus and technology are deposited coating formed on the surface of the material, there is no diffusion layer. Therefore poor bonding strength of the film, is very easy to peel off. Double-layer glow ion metal equipment and technology, the glow discharge sputtering the provision of the lug to be diffusion alloy element, due to the low ionization rate, and providing a unit time to the limited number of metallic elements of the alloy, the surface of the affected metal process. Furthermore, double layer glow ion metal, is to heat the workpiece, by the ion bombardment, the heating rate is slow, a long time, the crystal grow serious. The proliferation of infiltrating alloy atoms to, spread of mainly cementite, diffusion speed is very low.

The content of the invention is:

The purpose of this invention is to provide a kind of by utilizing the magnetron sputtering and laser heating, formed on the surface of the conductive material comprises a metal element, and non-metallic elements of the diffusion layer, the diffusion layer deposition layer or deposit + single or composite diffusion plating layer process.

Another purpose of this invention is to provide the composite plating process equipment.

Magnetron sputtering-laser of the present invention composite plating process according to the degree of the heating comprises the following steps:

1. The pieces are placed on the vacuum container is within the reciprocating mechanism and the longitudinal direction of the transverse reciprocating mechanism, the work piece is, the reciprocating mechanism, the vacuum container is an anode, the material of the workpiece and of the, material which is electrically conductive;

2. The magnetron sputtering target is the upper part of the work piece, to provide for the source material sputtering alloy elements, or non-conductive material which is electrically conductive;

3. Up to the extreme vacuum is vacuum 3 × 10^-3 Pa the above;

4. Is filled with a gas medium to the working vacuum, gas medium as ammonia gas or methane or argon;

5. Magnetron sputtering target to the high-voltage DC power supply or a high-voltage pulse power supply or a radio frequency power supply, the adjustable range of the voltage 0-2000V, magnetron sputtering power supply radio-frequency power supply, its frequency range is 13.56MHZ, 27 . 12MHZ;

6. Laser scanning is the surface of the workpiece, the laser heating device, can be Nd: YAG laser or CO₂ laser, the output laser power range from 100-10000W, laser wavelength: the 10.6  m, beam diameter: φ 1 mm -30 mm, after the completion of the laser heating infiltrates expands process, can be formed on the surface of the conductive material comprises a metal element, and non-metallic elements of the diffusion layer, the diffusion layer deposition layer or deposit + single or composite diffusion plating layer.

When working, the magnetron sputtering target and provide sufficient large amount of active metal ion, atom or employed, these active substances adsorbed or deposited on the surface of the workpiece. Laser heating device, periodic of providing high power high-density heat energy, can be used in zero within a few seconds to a few seconds, will be repeatedly local workpiece is heated to the high temperature of more than the phase change points, adsorbed and deposited on the surface of the work piece is fast diffusion of active substances into the workpiece, to form a diffusion layer or sedimentary deposit. At this time the working medium contains ammonia gas, the reactive gas such as methane, is formed on the surface of the work piece will be nitrogen, carburization or the carbon-nitrogen co-diffusion layer.

Used for realizing the process of the invention the apparatus includes:

The vacuum container, the vacuum container in the reciprocating mechanism and the reciprocating travel of the workpiece is, pumping system, an air supply system, a magnetron sputtering, magnetron sputtering power source, a laser heating device.

The advantage of this invention lies in:

(1) by utilizing the magnetron sputtering target, to provide adequate penetration of the alloy elements. Within a short period of time, to provide a large number of active ionic alloy element, the matrix material is fully met the need of and deposited on the surface.

(2) using laser heating device, providing high power high-density heat energy, in zero within a few seconds to a few seconds the material is repeatedly heated to a high temperature, rapidly permeate process implementation;

(3) in a rapid heating, under short-time high-temperature condition of the material of the workpiece, with the energy conditions of rapid diffusion, into the speed is improved greatly, diffusion layer and enhance the bonding force of the deposited film.

(4) when the vacuum degree of the work of metal infiltration, than the general alloying method to improve by at least 1 order of magnitude, thereby greatly improving the surface quality of the workpiece.

(5) can be continuously running, can realize the large area mass production.