25-06-2014 дата публикации
Номер: CN103881837A
Принадлежит:
The invention discloses a semiconductor industrial cleaning agent and an application thereof, and the semiconductor industrial cleaning agent is characterized by comprising 0.5-9.5% of acid agent, 5-35% of surfactant, 0.1-2.0% of antistatic agent, 1-6% of solubiliser, 1-4% of corrosion inhibitor, 0.1-2.0% of bactericide and the balance of deionized water. The water-based cleaning agent used for polycrystalline silicon chips is colorless transparent or semitransparent liquid; The semiconductor industrial cleaning agent has extremely high surface activity characteristic enables extremely low surface tension, its unique netted chemical structure provides high linearity and high suspensibility, invasion of microbe can be effectively defensed, no corruption and no deterioration are ensured during an usage process, no smelliness is generated, the cost is saved for user, the waste liquid discharge is reduced, the semiconductor industrial cleaning agent is in favor of environmental protection, ...
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