05-05-2016 дата публикации
Номер: US20160126315A1
Принадлежит:
The invention provides semiconductor materials including a gallium nitride material layer formed on a silicon substrate and methods to form the semiconductor materials. The semiconductor materials include a transition layer formed between the silicon substrate and the gallium nitride material layer. The transition layer is compositionally-graded to lower stresses in the gallium nitride material layer which can result from differences in thermal expansion rates between the gallium nitride material and the substrate. The lowering of stresses in the gallium nitride material layer reduces the tendency of cracks to form. Thus, the invention enables the production of semiconductor materials including gallium nitride material layers having few or no cracks. The semiconductor materials may be used in a number of microelectronic and optical applications. 192-. (canceled)93. A semiconductor structure comprising:a substrate;an intermediate layer over the substrate, wherein the intermediate layer comprises aluminum nitride, an aluminum nitride alloy, or a gallium nitride alloy;{'sub': x', 'y', '(1-x-y)', 'x', 'y', '(1-x-y), 'a transition layer over the intermediate layer, wherein the transition layer comprises two or more AlInGaN layers with different AlInGaN compositions, wherein 0≦x≦1 and 0≦y≦1;'}a gallium nitride layer over the transition layer.94. The semiconductor structure of claim 93 , wherein the substrate comprises a silicon substrate claim 93 , a silicon-on-insulator substrate claim 93 , a silicon-on-sapphire substrate claim 93 , or a SIMOX substrate.95. The semiconductor structure of claim 93 , wherein the two or more AlInGaN layers comprise at least one aluminum nitride layer.96. The semiconductor structure of claim 93 , wherein the two or more AlInGaN layers comprise at least one layer that is substantially free of gallium.97. The semiconductor structure of claim 93 , wherein the transition layer comprises two or more layers of gallium nitride alloy and two or more ...
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