25-04-2013 дата публикации
Номер: US20130099243A1
A circuit structure includes a substrate, a nucleation layer of undoped aluminum nitride, a graded buffer layer comprising aluminum, gallium, nitrogen, one of silicon and oxygen, and a p-type conductivity dopant, a ungraded buffer layer comprising gallium, nitrogen, one of silicon and oxygen, and a p-type conductivity dopant without aluminum, and a bulk layer of undoped gallium nitride over the ungraded buffer layer. The various dopants in the graded buffer layer and the ungraded buffer layer increases resistivity and results in layers having an intrinsically balanced conductivity. 1. A circuit structure comprising:a silicon substrate;a nucleation layer of undoped aluminum nitride over the silicon substrate;a buffer layer comprising gallium, nitrogen, one of silicon and oxygen, and a p-type conductivity dopant over the nucleation layer; and,a bulk layer of undoped gallium nitride over the buffer layer.2. The circuit structure of claim 1 , wherein the buffer layer comprises a graded buffer layer and an ungraded buffer layer claim 1 , said graded buffer layer further comprising aluminum.3. The circuit structure of claim 1 , wherein the p-type conductivity dopant comprises at least one of carbon claim 1 , iron claim 1 , magnesium claim 1 , and zinc.4. The circuit structure of claim 3 , wherein the p-type conductivity dopant in the graded buffer layer is an impurity having a total concentration of between about 1 E/cmand 1 E/cm.5. The circuit structure of claim 3 , wherein the p-type conductivity dopant in the ungraded buffer layer and the graded buffer layer is different with respect to composition and/or concentration.6. The circuit structure of claim 1 , wherein the buffer layer is about 1 to about 3 microns thick.7. The circuit structure of claim 1 , wherein the ungraded buffer layer is about 0.5 to about 3 microns thick.8. The circuit structure of claim 1 , further comprising an active layer over the bulk layer claim 1 , the active layer including a layer of ...
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