20-01-2022 дата публикации
Номер: US20220016568A1
Принадлежит:
The invention provides a process of purifying a fluid useful in a manufacturing process, particularly in the manufacture of silicon wafers, by removing one or more impurities; and apparatus for use in the process. 1. A process for purifying a fluid , the process comprising the steps of:{'b': '1', '1.1 Providing an insulated adsorption vessel () comprising an adsorptive media;'}{'b': '1', '1.2 Providing a first fluid F;'}{'b': 1', '1', '1, '1.3 Cooling the insulated adsorption vessel () and/or cooling the first fluid, F, to an operating temperature T in the range of from −40° C. to −130° C.;'}{'b': 1', '1', '1, '1.4 Contacting the fluid F with the insulated adsorption vessel () to remove one or more impurities G;'}{'b': '2', '1.5 Collecting the resulting purified fluid F; and'}{'b': 1', '1', '1, '1.6 Regenerating the insulated adsorption vessel () by vacuum whilst maintaining the temperature of the vessel at a temperature in the range T to T+50° C. (i.e. in the range +10° C. to −130° C.).'}3. A process for purifying a fluid according to claim 1 , the process comprising the steps of{'b': 0', '0, 'sub': 2', '2, '0.1 Contacting a fluid F with an oxidation reactor to oxidise impurities in F to COand HO;'}{'b': '0', 'sub': 2', '2, '0.2 Contacting the resulting fluid F′ with an adsorption vessel, A, to remove COand with an additional adsorption vessel, B, to remove HO; or'}{'b': '0', 'sub': 2', '2, '0.3 Contacting the resulting fluid F′ with a combined adsorption vessel AB to remove COand HO;'}{'b': '1', '0.4 Collecting the resulting Fluid F;'}{'b': '1', 'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, '1.1 Providing an insulated adsorption vessel () as defined in ;'}{'b': 1', '1', '1, '1.3 Cooling the insulated adsorption vessel () and/or the fluid F to an operating temperature T in the range of from −40° C. to −130° C.;'}{'b': 1', '1, '1.4 Contacting the optionally cooled fluid F with the insulated adsorption vessel to remove one or more impurities G;'}{'b': '2', '1.5 ...
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