Baffle cooling device
Technical Field The invention relates to a baffle for vacuum deposition, more specifically relates to a baffle cooling device. Background Art With the development of modern science and technology, the quality of the product and the requirements of the production process to continuously improve, vacuum technology as an indispensable technology, has been widely applied in various technical fields. Wherein a more extensive application of the vacuum plating technology, means that the heating of the evaporation source in vacuum evaporation or the accelerating ion bombardment sputtering, deposited at the substrate surface to form a single-layer or multi-layer thin film. The vacuum plating technology has been widely applied to various fields, such as the well known physical vapor deposition ( Deposition Vapor Physical, PVD), chemical vapor deposition ( Deposition Vapor Chemical, CVD) technology. In the preparation of thin film process, the film thickness is generally required, component pure, stable performance, without stress, such as firmly adhered to. The general film mode of preparation need to be subjected to vacuum, heating, a series of processes such as film. The heating of the coating in the process before, in the not yet reached the evaporation temperature of the evaporant will be the evaporation source to evaporate the impurity, some other evaporant the gas released during the evaporation process, the plated film indoor pressure rise. Impurity and non-stable gas diffusion is caused by uneven thickness of thin film, the component is not net, performance is not steady, stress is relatively large, is not firmly attached to the influence of the main reasons for the plated film quality. The original in the evaporation source and processing board is not taken between the design of the corresponding protection measures can no longer meet the needs of the process, otherwise some manufacturers through the evaporating source and processing board is arranged between the baffle plate to solve the above-mentioned shortcoming. The role of the baffle plate cannot stop the material to enter the corresponding necessary space, under the vacuum environment is also ask the baffle plate will not cause pollution of the vacuum environment, even said vacuum environment can be improved, and the cooling of the baffle plate with the baffle plate can be enhanced the adhesion of the deposition material, the deposition material on the baffle is not easy to fall off, also make the evaporation source to be more smoothly carry out vapor deposition, in addition can also reduce the cavity temperature, maintain in vivo in the vacuum chamber of the vacuum environment. Arranged in the cavity or by the corrugated pipe is sealed by the sealing gasket, is usually also good cooling measures have been taken, the higher vacuum process chamber temperature will, through heat transfer to the corresponding washer or corrugated pipe, this is also very easy to cause the aging of the sealing ring, bellows rupture. Furthermore, rotating through the baffle plate and drive the control electrode, one end of the shaft need to be contacted to the vacuum chamber. Certain time, shaft need of high-speed operation or needs to bear larger torque may be received to the external heat, corresponding to the shaft will also generate heat, when the heat cannot be effectively cooled, will reduce the service life of the shaft and mounting precision, even causing the barriers, impact baffle the normal operation of the control mechanism, the most important point would be caused by the noise, vibration, the problems that may be caused in the product. Known existing cooling device is of a pair of mounting the bearing of the axle, a base or cooling the cavity. In the prior art cannot effectively in sheltering from the evaporation source for cooling the baffle plate, the baffle plate or cooling the evaporation source, is easy to fall off will cause film layer, reduces the vacuum chamber of the process environment. In addition the existing baffle plate, it cannot be guaranteed that the purity and quality of the film. Thus providing a reasonable baffle cooling device is extremely important. Content of the invention The purpose of this invention is to provide a cooling effect is good, strong adhesion, and high cleanliness of the temperature of the vacuum chamber can be reduced, the quality of the film formation of the cooling device. To achieve the above object, the technical scheme of the invention is:to provide a cooling medium to the cooling device for use with the baffle plate, the baffle plate through the rotating shaft suspended in the vacuum environment in the vacuum chamber body and is located between the evaporation source and the substrate to be coated, the rotation of the rotating shaft is fixedly connected with the upper end of the said baffle plate, the lower end of the rotary shaft passes through the vacuum cavity and the vacuum chamber in vitro is fixedly connected with the transmission mechanism, the rotating shaft and the vacuum cavity is provided with a dynamic seal assembly between, the movable sealing component sleeve arranged on the rotating shaft and is pivotally connected with the rotary shaft, wherein the cooling device includes the baffle: connecting seat, the connecting piece, the cooling chamber, cooling pipe, output, input interface and the output interface, the baffle plate through the connecting seat is fixedly connected with the rotary shaft, wherein the connecting piece is fixed on the rotating shaft is located in the outer end of the vacuum chamber, the upper end of the said connecting piece with the rotating shaft is pivoted, the lower end of the said connecting piece is fixedly connected with the input interface, the input interface and the output interface is fixedly connected with the connecting piece and located between the output interface, the rotating shaft, the connecting piece, the input interface and output interface have along the axial direction of rotation of the rotating shaft is provided with a hollow structure and is connected with each other form the cooling chamber, the cooling chamber is suspended the stated delivery pipe and through the rotating shaft, the connecting piece, the input interface, the output pipe is located on the outside of the chamber is connected with the output interface, the cooling tube is laid on the on the baffle, the cooling tube has an input terminal and an output terminal, the input end of the cooling pipe is connected with the cooling chamber, the cooling pipe is connected with the output terminal of the output, wherein the input interface is communicated with the cooling chamber, the output interface is connected with the output pipe. Preferably, the connecting seat including the seat and the connecting seat is connected with, the upper connecting seat and is fixedly connected with the baffle, the lower connection seat and the rotation of the rotating shaft is fixedly connected with the upper end of, said upper is connected with the connecting seat and the lower seat is fixedly connected through screws, the seat is connected on the connecting seat and the lower sealing ring is provided with a 1st between, the upper connecting seat is provided with the upper cavity, the lower connecting seat is provided with a lower cavity, the stated delivery pipe is located in the end of the vacuum cavity, arranged in the inner cavity of the above, the delivery pipe and the 2nd sealing ring is arranged between the upper cavity, said upper cavity and the lower cavity is in communication with the, the the upper cavity is connected with the output end of the cooling pipe and the output pipe, the lower cavity is connected with the input end of the cooling tube and the cooling cavity. Through the stated is connected on the connecting seat and the lower seat, so that the baffle, the cooling pipe, outlet pipe, between the rotary shaft assembly is convenient while at the same time maintaining a high sealing property, to maintain the circulating path of the cooling medium, the cooling be carried out smoothly. Preferably, the lower connection between the seat and the rotary shaft is also provided with a hollow rotary pipe, with the upper end of the rotary tube is fixedly connected with the connecting seat, the lower end of the rotary tube is fixedly connected with the rotary shaft, the output pipe runs through the rotary tube. Through the rotary tube, which is convenient for the baffle plates and the connecting seat, the rotating shaft assembly and disassembly between the, convenient maintenance and replacement. Preferably, the surface of the baffle should be the cooling tube is provided with a groove, the cooling-function pipe is placed in the groove. Through the design of the groove, the cooling pipe is increased, the contact area of the baffle, to enhance the cooling effect of the baffle. As one embodiment of the present invention, the cooling tube is a round tube, the groove is an arc shaped groove. The circular pipe processing facilities and the cost is comparatively cheap. As another embodiment of the present invention, the cooling tube is a rectangular tube, the groove is a rectangular groove. Preferably, the cooling medium is cold water. The cooling-water not only the cooling effect is good and cost is low, the baffle plate can be effectively absorbed, the rotating shaft and the heat generated by the other assembly. Preferably, the transmission mechanism is a gear, the gear is fixed on the rotary shaft and located on the movable seal assembly between the connecting piece. The external power of the gear drive so as to drive the rotating shaft, the range of activity of the baffle plate. Equally preferably, the cooling tube is a metal tube. The metal pipe structure is firm, durable, good heat transfer effect. Equally preferably, the baffle plate comprises an upper surface and a lower surface, the lower surface is frosted surface, the lower surface and the evaporation source relative, through frosted processing, is favorable to the adsorption of coating materials, reduce the probability of particles from, the cooling tube is laid on the upper surface of the baffle. The cooling tube is arranged at the non-coated surface of the baffle plate, directly opposing the evaporation source is avoided, ensuring at the same time shielding effect of the baffle is the protection of the cooling tube. Equally preferably, the connecting piece and between the rotational shaft is provided with a 3rd sealing ring. The sealing effect of the seal rings through the 3rd, to the rotary motion of rotary shaft, between the cooling chamber and the connecting piece is fully sealed, enhance the cooling effect. Compared with the prior art, the baffle plate of the present invention using the cooling device for the cooling pipe on the baffle to realize the cooling of the baffle plate, through a connecting piece and the pivot of the rotating shaft and is fixedly connected with the input interface, the rotating shaft drives the baffle to rotate output when the, input interface and the output interface maintains a fixed state, at the same time the rotation of the baffle plate for the purpose of cooling. Said input interface, the cooling chamber, cooling pipe, outlet pipe, output interface are communicated in turn to form a circulation loop, the cooling medium flows from the input interface, through the cooling chamber after flowing into the cooling pipe through the delivery pipe, flows out of the output interface, the circulation of the cooling medium in the flow process, will carry away the heat, so as to achieve the cooling effect, not only realizes the cooling of the baffle plate, reduces the temperature of the vacuum cavity, and taking away the heat of the rotating shaft and other components, the circulation loop through the cooling of the vapor deposition apparatus in the evaporation source of the baffle for shielding cooling, enhance the adhesion of the film-forming substance and the plate, so that the baffle plate is of the film is not easy to fall off, peeling of the particles of the baffle plates is reduced, the evaporation source evaporation is smooth, thereby improving the quality of the film formation, the temperature of the cavity can be reduced also at the same time. Its structure is simple and reliable, the cooling effect is good, having higher cleanliness. Description of drawings Figure 1 is a structure diagram of the invention baffle cooling device. Figure 2 is another a structure diagram of the invention baffle cooling device. Figure 3 is a schematic diagram of A part is amplified in Figure 1. Figure 4 is a schematic diagram of the flow of the cooling medium in the Figure 1 cooling device shown in the baffle plate. Figure 5 is a schematic diagram of the flow of the cooling medium in the Figure 2 the baffle is shown in the cooling device. Mode of execution In order to detail the technical content of the present invention, is characterized in structure, and the following combined with the mode of execution of further note, wherein different map representative of the same label in the part of the same. The present invention relates to a semiconductor manufacturing field, in particular to a gas insulation in the treating chamber, liquid or powdered solid baffle plate, the baffle plate is mainly relates to a cooling device for cooling the baffle plate. Can be widely used in various of the vacuum equipment in the manufacturing process, is particularly suitable for thin film deposition process. Technology, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), most particularly suitable for the vapor deposition process, a deposition device is mainly used for shielding in the baffle to cool the evaporation source. The baffle cooling device is suitable for use with a cooling medium, the circulation flow with a cooling medium is taken away the heat on the baffle, to achieve the effect of cooling the baffle, improved adhesion, improved the quality of the film formation, and at the same time, reduces the temperature of the vacuum cavity, driving away and other rotating shaft of the baffle the heat generated by the relevant assembly, make the vacuum cavity has a high cleaning degree of in vivo. Reference to Figure 1 and Figure 2, the baffle plate of the embodiment of the invention 10 through the rotating shaft 30 and suspended in the vacuum environment of the vacuum chamber 20 and located in the evaporation source and the substrate to be coated between (Figure not shown), the rotating shaft 30 and the upper end of the baffle plate 10 is fixedly connected to, the rotating shaft 30 passes through the lower end of the the vacuum cavity 20 and the vacuum chamber 20 is fixedly connected with the transmission mechanism, the rotating shaft 30 and the vacuum cavity 20 is provided with a dynamic seal assembly between 50, the movable seal assembly 50 is fixed on the rotating shaft 30 and with the rotating shaft 30 is pivoted, through a moving seal technology to enable the rotating shaft 30 and the vacuum cavity 20 to realize sealing the contact part, further the magnetic fluid sealing technology. The baffle plate of this invention the cooling device includes: a connecting base 610, rotating pipe 620, connecting piece 630, cooling cavity 640, cooling tube 650, output pipe 660, input interface 670 and output interface 680, the rotatable pipe 620, which is located at the said connection seat 610 and the rotating shaft 30 and has the advantages of a hollow structure, the rotatable pipe 620 and the upper end of said connection seat 610 is fixedly connected to, the rotating tube 620 with the at the lower end of the rotating shaft 30 is fixedly connected, through the rotary tube 620 is convenient for the baffle plate 10 is connected with the connecting seat 610, rotating shaft 30 assembly and disassembly between the, convenient maintenance and replacement. The baffle plate 10 through the connecting seat 610 and the rotatable pipe 620 is fixedly connected, wherein the connecting piece 630 is sleeved on the rotating shaft 30 is located in the vacuum cavity 20 on the outer end of, said connecting piece 630 the upper end 632 and the rotating shaft 30 is pivoted, the connecting piece 630 the lower end 634 and the input interface 670 is fixedly connected, the connecting member 630 and the middle part of the rotating shaft 30 is provided with a 3rd between sealing ring 636, wherein the connecting piece 630 the upper end 632 and the rotating shaft 30 is arranged between the 4th seal ring 638, the sealing ring through the 3rd 636 and 4th seal ring 638 sealing function, the rotating shaft 30 to the rotating movement, the cooling cavity 640 and connecting piece 630 fully sealing, to ensure the sealing performance of the cooling circuit, can enhance the cooling effect. Said input interface 670 and said output interface 680 are fixedly connected and is located in the connecting piece 630 and the output interface 680 between, through a connecting piece 630 and the rotating shaft 30 and the pivot of the with the input interface 670 the fixed connection, the rotating shaft 30 drive the baffle plate 10 rotates output 660, input interface 670 and output interface 680 keep the fixed state, the baffle plate 10 and carry on the purpose of cooling. The rotatable pipe 620, the rotating shaft 30, connecting piece 630, input interface 670 and output interface 680 are along the rotating shaft 30 is provided with the axial direction of the hollow structure and are communicated with each other to form the cooling cavity 640, the stated delivery pipe 660 is suspended the cooling cavity 640 and through the rotatable pipe 620, the rotating shaft 30, connecting piece 630, input interface 670, the stated delivery pipe 660 located in the cavity 10 and the tail end of the outside of the output interface 680 is fixedly connected to, the cooling tube 650 is laid on the the baffle plate 10 is, the cooling tube 650 having an input 652 and the output terminal 654, the cooling tube 650 input 652 and the cooling cavity 640 is connected, the cooling tube 650 the output 654 and the output tube 660 is connected with, said input interface 670 and the cooling cavity 640 is connected, said output interface 680 and the output tube 660 is connected. The stated delivery pipe 660 is sleeved on the rotary pipe 620 and the rotating shaft 30 in, the rotating pipe 620 and the rotating shaft 30 and is mounted to the rotating shaft 30 for cooling the assembly, so as to improve the cooling effect. The oil, the cooling medium is cold water. The cooling-water not only cooling effect and low cost, capable of effectively absorbing the baffle plate 10, the rotating shaft 30 and the heat generated by the other assembly. Understandable, the cooling medium can also be for other cooling liquid or gas. The cooling tube 650 is a metal tube, can be stainless steel, copper or other metal alloy. The metal pipe structure is firm, durable, good heat transfer effect. In the embodiment of the invention, the transmission mechanism is set on the rotating shaft 30 of the gear 40, the gear 40 is fixed on the rotating shaft 30 and located on the movable seal assembly 50 and the connecting piece 630 between. The gear 40 by the external power drive so as to drive the rotating shaft 30 to rotate, to realize the control baffle 10 scope of activities. With reference to Figure 3, the connecting seat 610 comprises an upper connecting base 610a and the lower connecting base 610b, the upper connecting base 610a and the baffle plate 10 is fixedly connected to, the lower connecting base 610b and the rotatable pipe 620 is fixed on the upper end of the, said upper connecting base 610a and the lower connecting base 610b through the screw 614 is fixed, said upper connecting base 610a and the lower connecting base 610b 1st is arranged between the sealing ring 616, the connecting base 610a and the lower connecting base 610b sealing, to ensure the sealing performance of the cooling loop. The upper connecting seats 610a is provided with the upper cavity 612a, the lower connecting base 610b is provided with the lower cavity 612b, the the upper cavity 612a and the lower cavity 612b is connected with, the the upper cavity 612a are respectively communicated with the cooling tube 650 the output 654 and the output pipe 660, the lower cavity 612b are respectively communicated with the cooling tube 650 input 652 and the cooling cavity 640. The stated delivery pipe 660 locates in the vacuum cavity 20 arranged in the inner of the partitioned end 612a inner, the stated delivery pipe 660 and the the upper cavity 612a 2nd is arranged between the sealing ring 618, isolating output tube 660 and the lower cavity 612b connected, the cooling tube 650 of the cooling medium only flows through the output pipe 660 output. Through the upper connecting seats 610a and the lower connecting base 610b, so that the baffle 10, cooling tube 650, output pipe 660, the rotating shaft 30 of between convenient to assemble while at the same time maintaining a high sealing property, to maintain the circulating path of the cooling medium, the cooling be carried out smoothly. The oil, the baffle plate 10 comprises an upper surface 12 and a lower surface 14, the lower surface 14 is a frosting surface, the lower surface 14 and the evaporation source relative, through frosted processing, is favorable to the adsorption of coating materials, reduce the probability of particles from. The cooling tube 650 twists and turns of the baffle plate is arranged on the ground 10 of the upper surface 12 is. Cooling tube 650 is disposed in the baffle plate 10 of the non-plating surface, directly opposing the evaporation source is avoided, the baffle plate 10 at the same time shielding effect of the protection of the cooling tube 650. The cooling tube 650 is disposed in the baffle plate 10 is on according to the shape of the baffle 10 the cooling effect and cooling pipe 650 comprehensive consideration processing convenience. The baffle plate 10 of the upper surface 12 corresponding to the cooling pipe 650 is provided with a groove (Figure not shown), the cooling tube 650 is arranged in the groove. Through the design of the groove, increasing the cooling tube 650 and the baffle 10 of the contact area, enhancing baffle 10 cooling effect. As the preferred embodiment of the present invention, the cooling tube 650 is a hollow circular tube, the cooling pipe 650 for the cross section of the round, correspondingly, the groove is an arc shaped groove. The circular pipe processing facilities and the cost is comparatively cheap. Understandable, the cooling tube 650 can also be a hollow rectangular tube, which comprises a hollow square pipe, correspondingly, the groove is a rectangular groove. Reference to Figure 4 and Figure 5, the baffle plate of the embodiment of the invention the working principle of the cooling device: in the coating process, driven by the external driving mechanism is mounted in the vacuum cavity 20 of the rotating shaft 30 of the gear 40, the gear 40 drives the rotating shaft 30 to rotate, the rotatable pipe 620 and the rotating shaft 30 to rotate coaxially, so as to drive the vacuum cavity 20 of the baffle plate 10 rotating, the baffle 10 of the control and limitation of the scope of activities. Because the connection piece 630 role of, output pipe 660 located in the cavity 10 and the tail end of the outside output interface 680 is fixed, so that the baffle 10 in the process of the rotation of the, outlet pipe 660 and input interface 670, output interface 680 can keep the state of the stationary, so as to realize the driving and cooling as a whole. As shown in Figure 4 and Figure 5 in the direction of the arrow shown, the cooling medium from the input interface 670 flows into the, entering the cooling cavity 640 in, through the upper connecting base 610a of the upper cavity 612a and the lower connecting base 610b of the lower cavity 612b connected to the cooling tube 650 input 652, then by the cooling tube 650 the output 654 output flow into the output tube 660 in, finally from the output interface 680 outflow, the circulation of cooling medium. Compared with the prior art, the baffle plate of this invention cooling device utilizes the laying of the baffle 10 of the cooling pipe on 650 the baffle 10 cooling, use of a rotating tube 620, the rotating shaft 30, connecting piece 630, input interface 670 and output interface 680 hollow structure are communicated with each other and form the cooling cavity 640, the input interface 670, cooling cavity 640, cooling tube 650, output pipe 660, output interface 680 are communicated in turn to form a circulation loop, the cooling medium from the input interface 670 flows, through the cooling cavity 640 flows into the cooling tube 650 through the delivery pipe after 660, output interface 680 outflow, the circulation of the cooling medium in the flow process, will carry away the heat, so as to achieve the cooling effect, the baffle not only realizes the 10 cooling, reduces the vacuum chamber 20 the temperature of the in, and takes away the rotating shaft 30 of the heat and other assembly, through the cooling circulation loop in the deposition device for shielding the baffles of the evaporation source 10 for cooling, enhance the adhesion of the film-forming substance and the plate, so that the baffle 10 of the film is not easy to fall off, to reduce the baffle 10 of peeling of particles, the smooth evaporation of the evaporation source, thereby improving the quality of the film formation, the cavity can be reduced also at the same time 10 temperature. Its structure is simple and reliable, the cooling effect is good and has a relatively high cleanliness. The baffle plate of the embodiment of the invention vapor deposition process in the cooling device is under the condition of the, but for any isolation liquid, powdered solid or gas material of the baffle plate 10 and its cooling device is of universal significance. For example, sputtering, and the like. The invention relates to a dynamic seal assembly 50 and the structure of the dynamic seal assembly 50 to seal principle known to technical personnel in the field, are therefore not the other. The best combination of more than in the embodiment described of the invention, but the invention is not limited to the above disclosed embodiments, but should cover all according to the present invention carry out the revision of the nature of the, equivalent combination. The invention discloses a baffle cooling device which comprises a connecting base, a connecting member, a cooling cavity, a cooling pipe, an output pipe, an input interface and an output interface. A baffle is connected fixedly with a rotating shaft through the connecting base; the end part of the rotating shaft, which is positioned outside a vacuum cavity, is sleeved with the connecting member; the connecting member is pivoted with the rotating shaft and fixedly connected with the input interface; the input interface is connected with the output interface fixedly; the rotating cavity, the connecting member, the input interface and the output interface are all provided with hollow structures along the axial direction of the rotating shaft, and the hollow structures are communicated with each other to form the cooling cavity; the output pipe is suspended in the cooling cavity, passes through the rotating shaft, the connecting member, the input piece and the input interface, and is fixedly connected with the output interface; the cooling pipe is laid on the baffle and is provided with an input end communicated with the rotating shaft and an output end connected with the output pipe; and the input interface, the cooling cavity, the cooling pipe, the output pipe and the output interface are communicated to form a cooling medium circulation loop. The baffle cooling device has the advantages of good cooling effect, strong adhesive power, high cleanness and capability of reducing the temperature of the vacuum cavity and improving the formation quality of films. 1. A baffle cooling device, which is suitable for use with a cooling medium, the baffle arranged on the suspension by the rotating shaft provided in the vacuum chamber of the vacuum environment and located between the evaporation source and the substrate to be coated, the rotation of the rotating shaft is fixedly connected with the upper end of the said baffle plate, the lower end of the rotary shaft passes through the vacuum cavity and the vacuum chamber in vitro is fixedly connected with the transmission mechanism, the rotating shaft and the vacuum cavity is provided with a dynamic seal assembly between, the movable sealing component sleeve arranged on the rotating shaft and is pivotally connected with said rotating shaft, characterized in that the baffle plate the cooling device includes: a connecting base, connecting piece, the cooling chamber, cooling pipe, output, input interface and the output interface, the baffle plate through the connecting seat is fixedly connected with the rotary shaft, wherein the connecting piece is fixed on the rotating shaft is located in the outer end of the vacuum chamber, the upper end of the said connecting piece with the rotating shaft is pivoted, the lower end of the said connecting piece is fixedly connected with the input interface, the input interface and the output interface is fixedly connected with the connecting piece and located between the output interface, the rotating shaft, the connecting piece, the input interface and output interface have along the axial direction of rotation of the rotating shaft is provided with a hollow structure and is connected with each other form the cooling chamber, the cooling chamber is suspended the stated delivery pipe and through the rotating shaft, the connecting piece, the input interface, the output pipe is located on the outside of the chamber is connected with the output interface, the cooling tube is laid on the on the baffle, the cooling tube has an input terminal and an output terminal, the input end of the cooling pipe is connected with the cooling chamber, the cooling pipe is connected with the output terminal of the output, wherein the input interface is communicated with the cooling chamber, the output interface is connected with the output pipe. 2. Baffle cooling device according to Claim 1, characterized in that the connecting seat including the seat and the connecting seat is connected with, the upper connecting seat and is fixedly connected with the baffle, the lower connection seat and the rotation of the rotating shaft is fixedly connected with the upper end of, said upper is connected with the connecting seat and the lower seat is fixedly connected through screws, the seat is connected on the connecting seat and the lower sealing ring is provided with a 1st between, the upper connecting seat is provided with the upper cavity, the lower connecting seat is provided with a lower cavity, the stated delivery pipe is located in the end of the vacuum cavity, arranged in the inner cavity of the above, the delivery pipe and the 2nd sealing ring is arranged between the upper cavity, said upper cavity and the lower cavity is in communication with the, the the upper cavity is connected with the output end of the cooling pipe and the output pipe, the lower cavity is connected with the input end of the cooling tube and the cooling cavity. 3. Baffle cooling device according to Claim 2, characterized in that the lower connection between the seat and the rotary shaft is also provided with a hollow rotary pipe, with the upper end of the rotary tube is fixedly connected with the connecting seat, the lower end of the rotary tube is fixedly connected with the rotary shaft, the output pipe runs through the rotary tube. 4. Baffle cooling device according to Claim 1, characterized in that the surface of the baffle should be the cooling tube is provided with a groove, the cooling-function pipe is placed in the groove. 5. Baffle cooling device according to Claim 4, characterized in that the cooling tube is a round tube, the groove is an arc shaped groove. 6. Baffle cooling device according to Claim 4, characterized in that said cooling tube is a rectangular tube, the groove is a rectangular groove. 7. Baffle cooling device according to Claim 1, characterized in that the cooling medium is cold water. 8. Baffle cooling device according to Claim 1, characterized in that the transmission mechanism is a gear, the gear is fixed on the rotary shaft and located on the movable seal assembly between the connecting piece. 9. Baffle cooling device according to Claim 1, characterized in that the cooling tube is a metal tube. 10. Baffle cooling device according to Claim 1, characterized in that the baffle plate comprises an upper surface and a lower surface, the lower surface and the evaporation source relatively, the cooling tube is laid on the upper surface of the baffle. 11. Baffle cooling device according to Claim 10, characterized in that the lower surface of the baffle for the frosted surface. 12. Baffle cooling device according to Claim 1, characterized in that said connecting piece and said rotating shaft is arranged between the 3rd sealing ring.